• 한국전기전자재료학회논문지
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• 제11권8호
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• pp.607-612
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• 1998

RF HPCVD(Helicon Plasma Chemical Vapor Deposition) has been successfully constructed for diamond thin films. The system consists of plasma generation tube, deposition chamber, pumping lines for gas system. A mixture of $CH_4 and H_2$is used for reaction. Two thermocouples, a quartz tube surrounded by a RF antenna and a magnet, and a high temperature heater were set up in the deposition chamber. The process for the thin film diamond deposition has been carried put in a high vacuum system at a substrate temperature of $800^{\circ}C$, and pressure of 5 mtorr. It is also demonstrated. that the RF HPCVD system has advantages for controlling deposition parameters easily.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2000년도 제18회 학술발표회 논문개요집
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• pp.122-122
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• 2000

Magnesium oxide is thermodynamically very stable, has a low dielectric constant and a low refractive index, and has been widely used as substrate for growing various thin film materials, particulary oxides of the perovskite structure. There has been a considerable interest in integrating the physical properties of these oxides with semiconductor materials such as GaAs and Si. In this regard, it is considered very important to be able to grow MgO buffer layers epitaxially on the semiconductors. Various oxide films can then be grown on such buffer layers eliminating the need for using MgO single crystal substrates. Vapor phase epitaxy of magnesium oxide has been accomplished on Si(001) substrates in a high vacuum chamber using the single precursor methylmagnesium tert-butoxide in the temperature range 750-80$0^{\circ}C$. For the epitaxy of the MgO films, SiC buffer layers had to be grown on Si(001). The films were characterized by reflection high energy electron diffraction (RHEED) in situ in the growth chamber, and x-ray diffraction (XRD), x-ray pole figure analysis, scanning electron microscopy (SEM), and x-ray photoelectron spectroscopy (XPS) after the growth.

• 반도체디스플레이기술학회지
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• 제19권4호
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• pp.28-33
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• 2020

Plasma etching process employs high density plasma to create surface chemistry and physical reactions, by which to remove material. Plasma chamber includes silicon-based materials such as a focus ring and gas distribution plate. Focus ring needs to be replaced after a short period. For this reason, there is a need to find materials resistant to erosion by plasma. The developed chemical vapor deposition processing to produce silicon carbide parts with high purity has also supported its widespread use in the plasma etch process. Silicon carbide maintains mechanical strength at high temperature, it have been use to chamber parts for plasma. Recently, besides the structural aspects of silicon carbide, its electrical conductivity and possibly its enhanced life time under high density plasma with less generation of contamination particles are drawing attention for use in applications such as upper electrode or focus rings, which have been made of silicon for a long time. However, especially for high purity silicon carbide focus ring, which has usually been made by the chemical vapor deposition method, there has been no study about quality improvement. The goal of this study is to reduce surface roughness and depth of damage by diamond tool grit size and tool dressing of diamond tools for precise dimensional assurance of focus rings.

• 한국자동차공학회논문집
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• 제15권3호
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• pp.141-146
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• 2007

In this study, the effects of change in ambient gas viscosity on spray structure have been investigated in the high temperature and pressure field. To analyze the structure of evaporative diesel spray is important in speculation of mixture formation process. Emissions of diesel engines can be reduced by the control of the mixture formation process. Therefore, this study examines the evaporating spray structure in the constant volume chamber. The viscosity of ambient gas was selected as the experimental parameter, is changed from 21.7 mPa s to 32.1 mPa s by changing in ambient gas temperature. In order to obtain images of the liquid and vapor-phase of injected spray, exciplex fluorescence method was used in this study. The liquid and vapor-phase images were taken with 35mm still camera and CCD camera, respectively. Consequentially, it could be confirmed that the distribution of vapor concentration is more uniform in the case of the ambient gas with high viscosity than in that of the ambient gas with low viscosity.

• 한국산업융합학회 논문집
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• 제26권4_2호
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• pp.577-584
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• 2023

In this study, among the parts of oil vapor collectors that are already being produced, weaving wire brush automatic transplanters for oil vapor collectors for machine tools of the weaving fixing method, which are not automated due to the specificity of the process and are being produced manually, are developed and reliability is secured through performance evaluation. did Oil vapor collectors play an important role in removing air pollutants and improving air quality, and the coagulation effect of the collection technology is mostly due to brushes. In the experiment, an automatic transplanter was developed to automatically manufacture and produce the wire brush of the oil vapor collector, which is manufactured and used manually. For the experiment of the developed wire brush, an experimental chamber was built, and performance and durability were evaluated through the dust collection efficiency evaluation using the electrostatic precipitator method of contaminants (oil mist). Through this study, we intend to reduce the production time and unit cost of collectors and improve the environment at industrial sites.

• 한국산업보건학회지
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• 제6권1호
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• pp.125-137
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• 1996

This study was designed to investigate effects of relative humidity on the breakthrough of charcoal tubes at a fixed vapor concentration and sampling time during mixed organic vapor sampling. A vapor generator was used to generate three different concentrations of mixed organic vapor and a stainless steel chamber was fabricated and utilized to maintain three different percentages of relative humidity while maintaining a constant temperature. The results were as follows; 1. At high relative humidity, breakthrough of mixed organic vapor occurred quickly at low vapor concentration than at high vapor concentration because of the reduced adsorption volume of charcoal tube due to humidity. 2. Breakthrough by competitive adsorption of vapors onto charcoal tube was observed at first from n-hexane having the lowest boiling point and highest vapor pressure among the three organic vapors investigated, followed by TCE. No breakthrough was observed from toluene under all experimental conditions. 3. For n-hexane, breakthrough was observed after 2 hours of sampling and breakthrough rates were increased as relative humidity increased. For TCE, breakthrough was found after 3 hours of sampling and breakthrough rates by sampling time were increased as vapor concentration increased. 4. The adsorbed amount of mixed organic vapor at breakthrough was shown to have statistically significant correlations with sampling time, relative humidity, and vapor concentration in descending order of correlation. Relative humidity and sampling time for n-hexane and sampling time and concentration for TCE were both statistically significantly correlated. 5. Relative humidity was found to affect the amount of breakthrough of mixed organic vapor and n-hexane. Among three percentages of relative humidity investigated, the amount of breakthrough at 85 % relative humidity was significantly larger than those of at lower percentages of relative humidity. No statistically significant difference was found between 25 % and 55 % relative humidity. 6. The results of multiple regression analysis between breakthrough and relative humidity, vapor concentrations showed that the coefficient of determination of mixed organic vapor was 0.263 and those of n-hexane and TCE were 0.275 and 0.189, respectively. 7. Flow rates of sampling pumps used were found to be affected by relative humidity present. At 25 %, 55 %, and 85 % relative humidity, the relative errors of sampling pump were 1.4 %, 13.4 %, and 18.6 %, respectively. In conclusion, the results of this study showed that high relative humidity could reduce the adsorption volume of charcoal tubes and subsequently increase breakthrough rates. Therefore, to prevent breakthrough when sampling mixed organic vapors, it is suggested that either sampling volume be reduced on the flow rate be lowered so as to minimize breakthrough of the most volatile organic vapor in the mixture. In addition, since the flow rates of a sampling pump can be adversely affected by high relative humidity, it is recommended to use a constant flow mode pump when sampling in the highly humid environment.

• 한국항공우주학회지
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• 제40권3호
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• pp.222-229
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• 2012

점화 시의 분사기의 냉각은 분사순간의 초저온액체상태의 산화제 분무의 증기압에 영향을 미치고, 이는 연소반응에 따른 연소실 압력상승 과도단계에서 분무의 상(phase) 천이 시점을 결정하는 인자 중 하나이다. 분무의 상변화는 액체로켓 연소기의 점화특성에 큰 영향을 미치며, 액체산소/메탄 추진제를 사용하는 연료과잉 폐쇄형사이클 액체로켓엔진의 주연소기용 분사기로 사용될 수 있는 액체-기체 동축형 스월분사기에 대하여 점화초기 분사기 냉각온도에 따른 점화시험을 수행하였다. 초기 냉각온도에 따라 점화 시 산화제 분무의 액상으로의 천이시기가 달라지며, 충분한 냉각을 통해 산화제 분무의 증기압을 낮춘 경우 산화제 분무의 상 천이 시기를 나타내는 화염 quenching 현상이 일찍 나타나는 것을 확인할 수 있었다.

• 한국군사과학기술학회지
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• 제23권3호
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• pp.294-301
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• 2020

Man-In-Simulant Test(MIST) provides a test method to evaluate chemical protective equipments such as protective garments, gloves, footwear and gas mask. The MIST chamber is built to control concentration of chemical vapor that has a activity space for two persons. Non-toxic methyl-salicylate(MeS) is used to simulate chemical agent vapor. We carried out to measure inward leakage MeS vapors by using passive adsorbent dosimeter(PAD) which are placed on the skin at specific locations of the body while man is activity according to the standard procedure in MIST chamber. But more time is required for PADs and there is concern of contamination in PADs by recovering after experiment. Therefore detector for measuring in real time is necessary. In order to analyze in real time the contamination of the personal protective equipment inside the chemical environment, we have developed a wireless real-time gas detector. The detector consists of 8 gas-sensors and 1 control-board. The control-board includes a CPU for processing a signal, a power supply unit for biasing the sensor and Bluetooth-chipset for transmission of signals to external PC. All signals from gas-sensors are converted into digital signals simultaneously in the control-board. These digital signals are stored in external PC via Bluetooth wireless communication. The experiment is performed by using protective equipment worn on manikin. The detector is mounted inside protective equipment which is capable of providing a real-time monitoring inward leakage MeS vapor. Developed detector is demonstrated the feasibility as real-time detector for MIST.

• 한국자동차공학회논문집
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• 제11권3호
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• pp.58-64
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• 2003

Dimethyl Ether(DME) has been considered as one of the most attractive alternative fuels for compression ignition engine. Its main advantage in diesel engine application is high efficiency of diesel cycle with soot free combustion though conventional fuel injection system has to be modified due to the physical properties of DME. Experimental study of DME and conventional diesel spray employing a common-rail type fuel injection system with a 5-hole sac type injector was performed in a constant volume vessel pressurized by nitrogen gas. Spray cone angles and penetrations of the DME spray were characterized and compared with those of diesel. For evaluation of the evaporating characteristics of the DME, shadowgraphy technique employing an Ar-ion laser and an ICCD camera was adopted. Tip of the DME spray was formed in mushroom-like shape at atmospheric chamber pressure, which disappeared in higher chamber pressure. Spray tip penetration and spray cone angle of the DME became similar to those of diesel under 3MPa of chamber pressure. Higher injection pressure provided wider vapor phase area while it decreased with higher chamber pressure condition.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2018년도 춘계학술대회 논문집
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• pp.76-76
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• 2018

LCD 디스플레이 크기는 점차 대형화를 이루면서, 현재 LCD 디스플레이 크기는 3,000*3,320mm 크기까지 증가하여 개발이 활발이 이루어지고 있다. 디스플레이의 크기가 증가함에 따라 제조 장비의 크기도 증가되어야 하므로, LCD 디스플레이 CVD 공정에 사용되는 4,200*3,300mm 크기의 대형 Aluminium Vacuum Chamber 에 피막두께 $15{\mu}m$ 이상을 구현함과 동시에 두께 균일도가 우수하며 염수분무시험으로 168시간 이상의 내식성 확보가 가능한 양극산화조건 개발을 위하여 양극산화 피막의 각종 특성 평가를 실시하였다. 양극산화 피막 두께 측정은 와전류(Eddy Current)의 원리를 이용한 비파괴식 두께 측정법(ISO 2360, ASTM D 7091)을 적용하였으며, 염수분무시험 방법은 (KS D 9502)을 적용하였으며, HCl bubble stream 시험 방법은 HCl 5% 농도를 투명 아크릴 튜브에 채운후 bubble stream 을 종점으로 하여 평가를 실시하였으며, 열충격을 이용한 도금밀착성(KS D 0254), 도장접착력(ASTM D 3359) 등을 이용하여 전해조건 및 전해액 농도에 따른 피막 특성 비교평가를 실시하여 최적의 대형 Aluminium Vacuum Chamber 양극산화 전해 조건을 개발하여 4,200*3,300mm 크기의 대형 Aluminium Vacuum Chamber 제조를 목적으로 하였다.