• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.912-915
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• 2004

A vacuum environment is very important for NGL(Next Generation Lithography) apparatuses such as EUVL(Extreme Ultra Violet Lithography) or EPL(Electron Projection Lithography) and so on. The performance of these systems is dominated by vacuum level of processing and positioning accuracy of a stage. So, ultra-precision stage usable in a high vacuum level is needed for the improved performance of these devices. In contrast to atmospheric condition, a special attention must be paid to guide bearing, actuator and other elements. In this paper, air bearing is adopted because of its very high motional accuracy. So, air bearing is designed to be vacuum compatible using differential exhaust method, which prevents air from entering into vacuum chamber. For this, leakage analysis is performed theoretically and verified from experiment.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.371-372
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• 2008

In this paper, we experimentally investigated discharge phenomena inside vacuum interrupter at 1 to 20 Torr to simulate the vacuum leakage. We used glass type of vacuum interrupter where the internal pressure and the type of gasses can be varied according to requirement. The experiment is conducted under ac applied voltage and the experimental circuit is constructed to simulate the actual circuit used in cubical type insulated switchgear. We used two types of gases such as air and $SF_6$. The use of glass type vacuum interrupter allowed us to measure discharges occurring in vacuum interrupter optically. We measured and discussed the discharge occurring in both gases with a current transformer and ICCD camera. We also revealed that electromagnetic wave spectra emitted by the discharge have same frequency range for both gasses.

• Applied Science and Convergence Technology
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• v.23 no.3
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• pp.103-112
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• 2014

The Korea Research Institute of Standards and Science (KRISS) has three major vacuum systems: an ultrasonic interferometer manometer (UIM; Section II, Figs. 1 and 2) for a low vacuum, a static expansion system (SES; Section III, Figs. 3 and 4) for a medium vacuum, and an orifice-type dynamic expansion system (DES, Section IV, Figs. 5 and 6) for high and ultra-high vacuum systems. For each system, explicit measurement model equations with multiple variables are given. According to ISO standards, all of these system variable errors were used to calculate the expanded uncertainty (U). For each system, the expanded uncertainties (k = 1, confidence level = 95%) and relative expanded uncertainty (expanded uncertainty/generated pressure) levels are summarized in Table 4. Within the uncertainty limits, our bilateral and key comparisons [CCM.P-K4 (10 Pa to 1 kPa)] are extensive and in good agreement with those of other nations (Fig. 8 and Table 5).

• Food Science and Preservation
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• v.21 no.6
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• pp.767-775
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• 2014

The shelf-life of fresh mushrooms is notably limited because their browning, texture change, and decay are too fast after immediately harvest. Especially, the best management for extending golden needle mushroom's shelf-life is modified atmosphere packaging under pressure vacuum at cold storage. In this study, three types of films, $20{\mu}m$ polyethylene+polypropylene (PE+PP), oriented polypropylene (OPP), and low density polyethylene (LDPE) were tested to extend the shelf-life of golden needle mushrooms. Mushrooms were packed under pressure vacuum and stored at $10^{\circ}C$ for 2 weeks. The golden mushrooms in LDPE film as a commercial packaging, were highly perishable and immediately proceed deterioration as browning, elongation, fluctuation of respiratory quotient (RQ) and softening within 7 days after packaging. On the other hand, the mushrooms in OPP and PE+PP film shown that shelf-life were extend to 14 days from 7 days, causing delay breakup of vacuum and maintenance of color, length, and RQ during storage. The breakup of vacuum in PE+PP film was faster few days than OPP film packaging. This present study indicated that the golden needle mushrooms by OPP packaging under pressure vacuum treatment might be extended the shelf-life until approximately 14 days during cold storage.

• Journal of Biosystems Engineering
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• v.33 no.3
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• pp.179-185
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• 2008

The seeding rates of the vacuum suction nozzle seeders are affected by the jumping height of the seeds on the vibrating seed hopper. This study was performed to investigate the optimum vibration condition of the seed hopper on the vacuum suction nozzle seeder for improving seeding performance. Experiments were carried out to determine the vibration conditions of the seed hopper by air pressure and eccentric weight, and to optimize the seed-pickup performance of each nozzle by suction pressure. As the result with the experiments, the fluctuations of the jumping height of the seeds were showed at amplitude 0.4 mm and frequency 42 Hz, and jumping heights of the seeds were increased as the air pressure increase and the eccentric weight decrease, regardless number of seeds of the hopper. The best seeding rate of the seed hopper was 98% at the 300-seed cell, when the condition of the seed hopper was the suction air pressure of 94.6 kPa-abs., amplitude and frequency of the seed hopper vibration were at 0.57 mm and 43.6 Hz, respectively. The optimum vibrating conditions of the seed hopper were decided into frequency 43.6-43.8 Hz and the amplitudes 0.61-0.62 mm.

• Journal of Korea Multimedia Society
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• v.17 no.11
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• pp.1363-1373
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• 2014

In this study, a hybrid multi-cup electric cupping system (HMECS) was proposed, based on the ancient cupping method. HMECS consisted of several cups that could be used simultaneously to treat different areas of the patient's body. Each cup was equipped with its own pump and pressure-monitoring system. Moreover, the vacuum pressure of the cups was controlled using fuzzy logic. Through automated control of the vacuum pressure, long-term relief of muscle tightness was achieved. To develop a scientific foundation for this alternative treatment, we compared the VAS(Visual Analog Scale) and ODI(Oswestry Disability Index) scores from conventional basic cupping to the VAS and ODI scores for our proposed HMECS. The improvement rate in the VAS and ODI scores using HMECS after three treatments was higher than that achieved by basic cupping. These results, combined with the convenience offered by enhanced IT capabilities, should increase the popularity of this device among an aging society, and facilitate the opportunity to further explore the potential of Oriental medical practices.

• Membrane and Water Treatment
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• v.6 no.3
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• pp.237-249
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• 2015

In this study we investigate a laboratory scale vacuum membrane distillation system to produce pure water from model oil in water emulsion. Experimental determination of liquid entry pressure (LEP) of a commercial Durapore$^{TM}$ GVPH flat sheet membrane using model emulsions in various oil concentrations has been carried out. Two different methods of liquid entry pressure determination - a frequently used, so-called static and a novel dynamic method - have been investigated. In case of static method, LEP value was found to be 2.3 bar. No significant effect of oil content on LEP was detected up to 3200 ppm. In contrast, LEP values determined with dynamic method showed strong dependence on the oil concentration of the feed and decreased from 2.0 bar to a spontaneous wetting at 0.2 bar in the range 0-250 ppm, respectively. Vacuum membrane distillation tests were also performed. The separation performance is evaluated in terms of flux behavior, total organic carbon removal and droplet size distribution of the feed and final retentate. No significant effect of oil content on the flux was found ($5.05{\pm}0.31kgm^{-2}h^{-1}$) up to 250 ppm, where a spontaneous wetting occurred. High separation performance was achieved along with the increasing oil concentration between 93.4-97.0%.

• Journal of the Korean institute of surface engineering
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• v.37 no.5
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• pp.296-300
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• 2004

The defects of partial denture frameworks are mainly shrinkage porosity, inclusions, micro-crack, particles from investment, and dendritic structure. In order to investigate a good casting condition of partial denture frameworks, the three casting alloys and casting methods were used and detected casting defects were analyzed by using electrochemical methods. Three casting alloys (63Co-27Cr-5.5Mo, 63Ni-16Cr, 63Co-30Cr-5Mo) were prepared for fabricating partial denture frameworks with various casting methods; centrifugal casting (Kerr, USA), high frequency induction casting (Jelenko Eagle, USA), vacuum pressure casting (Bego, Germany). The casting temperature was $1,380^{\circ}C$ (63Co-27Cr-5.5Mo and 63Ni-16Cr) and $1,420^{\circ}C$ (63Co-30Cr-5Mo). The casting morphologies were analyzed using FE-SEM and EDX. The corrosion test of the dendritic structure was performed through potentiodynamic method in 0.9% NaCl solutions at $36.5^{\circ}C$ and corrosion surface was observed using SEM. The defects of partial denture frameworks improved in the order of centrifugal casting, high frequency induction casting, and vacuum pressure casting method, especially, pore defects were found at part of clasp in the case of centrifugal casting method. The structure of casting showed dendritic structure for three casting alloys. In the 63Co-27Cr-5.5Mo and 63Co-30Cr-5Mo, $\alpha$-Co and $\varepsilon$-Co phases were identified at matrix and $${\gamma}$-Ni_2$Cr second phase were shown in 63Ni-16Cr. Also, the corrosion resistance of cast structure increased in the order of vacuum pressure casting, high frequency induction casting, and centrifugal casting method.

• Journal of Sensor Science and Technology
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• v.29 no.5
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• pp.354-359
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• 2020

The high vacuum hermetic sealing technique ensures excellent performance of MEMS resonators. For the high vacuum hermetic sealing, the customization of anodic bonding equipment was conducted for the glass/Si/glass triple-stack anodic bonding process. Figure 1 presents the schematic of the MEMS resonator with triple-stack high-vacuum anodic bonding. The anodic bonding process for vacuum sealing was performed with the chamber pressure lower than 5 × 10^-6 mbar, the piston pressure of 5 kN, and the applied voltage was 1 kV. The process temperature during anodic bonding was 400 ℃. To maintain the vacuum condition of the glass cavity, a getter material, such as a titanium thin film, was deposited. The getter materials was active at the 400 ℃ during the anodic bonding process. To read out the electrical signals from the Si resonator, a vertical feed-through was applied by using through glass via (TGV) which is formed by sandblasting technique of cap glass wafer. The aluminum electrodes was conformally deposited on the via-hole structure of cap glass. The TGV process provides reliable electrical interconnection between Si resonator and aluminum electrodes on the cap glass without leakage or electrical disconnection through the TGV. The fabricated MEMS resonator with proposed vacuum packaging using three-layer anodic bonding process has resonance frequency and quality factor of about 16 kHz and more than 40,000, respectively.

• Korean Journal of Optics and Photonics
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• v.15 no.4
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• pp.325-330
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• 2004

We fabricated a vacuum ultraviolet spectre-reflectometer which consists of a deuterium light source, a vacuum monochromator, and a sample chamber and detector module. The operation was performed in the ultraviolet spectral ranges between 115 nm and 330 nm at the vacuum pressure of 3.0 ${\times}$ 10$^{-4}$ Pa. The wavelength of the vacuum monochromator was calibrated with the line spectrum of a low pressure Mercury lamp of 253.652 nm and 184.95 nm wavelengths, and its resolution was 0.012 nm, and the precision of wavelength was $\pm$ 0.03 nm. With this reflectometer and a deuterium lamp, we measured the spectral regular transmittance and reflectance of materials(MgF$_2$, CaF$_2$, BaF$_2$, SiO$_2$, Sapphire) used as optical components over the spectral range between 115 nm and 230 nm.