Applied Science and Convergence Technology

The Korean Vacuum Society (한국진공학회)
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Measurement Uncertainties for Vacuum Standards from a Low to an Ultra-high Vacuum

  • Hong, S.S. (Korea Research Institute of Standards and Science) ;
  • Shin, Y.H. (Korea Research Institute of Standards and Science) ;
  • Lim, J.Y. (Korea Research Institute of Standards and Science)
  • Received : 2014.05.08
  • Accepted : 2014.05.21
  • Published : 2014.05.30
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Abstract

The Korea Research Institute of Standards and Science (KRISS) has three major vacuum systems: an ultrasonic interferometer manometer (UIM; Section II, Figs. 1 and 2) for a low vacuum, a static expansion system (SES; Section III, Figs. 3 and 4) for a medium vacuum, and an orifice-type dynamic expansion system (DES, Section IV, Figs. 5 and 6) for high and ultra-high vacuum systems. For each system, explicit measurement model equations with multiple variables are given. According to ISO standards, all of these system variable errors were used to calculate the expanded uncertainty (U). For each system, the expanded uncertainties (k = 1, confidence level = 95%) and relative expanded uncertainty (expanded uncertainty/generated pressure) levels are summarized in Table 4. Within the uncertainty limits, our bilateral and key comparisons [CCM.P-K4 (10 Pa to 1 kPa)] are extensive and in good agreement with those of other nations (Fig. 8 and Table 5).

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References

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