• JSTS:Journal of Semiconductor Technology and Science
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• 제5권3호
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• pp.182-186
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• 2005

In this work, thermal evaporation system was employed to deposit thin films of SiC on glass substrates in order to determine the parameters of them. Measurements included transmission, absorption, Seebak effect, resistivity and conductivity, absorption coefficient, type of energy band-gap, extinction coefficient as functions of photon energy and the effect of increasing film thickness on transmittance. Results explained that SiC thin film is an n-type semiconductor of indirect energy band-gap of ${\sim}3eV$, cut-off wavelength of 448nm, absorption coefficient of $3.4395{\times}10^{4}cm^{-1}$ and extinction coefficient of 0.154. The experimental measured values are in good agreement with the typical values of SiC thin films prepared by other advanced deposition techniques.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2008년도 춘계학술대회 논문집
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• pp.441-443
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• 2008

A non-vacuum process for fabrication of $CuInSe_2$ (CIS) absorber layer from the corresponding Cu, In solution precursors was described. Cu, In solution precursors was prepared by a room temperature colloidal route by reacting the starting materials $Cu(NO_3)_2$, $InCl_3$ and methanol. The Cu, In solution precursors were mixed with ethylcellulose as organic binder material for the rheology of the mixture to be adjusted for the doctor blade method. After depositing the mixture of Cu, In solution with binder on Mo/glass substrate, the samples were preheated on the hot plate in air to evaporate remaining solvents and to burn the organic binder material. Subsequently, the resultant CI/Mo/glass sample was selenized in Se evaporation in order to get a solar cell applicable dense CIS absorber layer. The CIS absorber layer selenized at $530^{\circ}C$ substrate temperature for 30 min with various Se gas evaporation temperature was characterized by XRD, SEM, EDS.

• 한국산학기술학회논문지
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• 제12권5호
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• pp.2267-2271
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• 2011

p-채널 박막트랜지스터에 이용할 수 있는 p-형 산화구리 박막반도체를 얻기 위한 연구를 하였다. 진공열증착방법으로 산화구리 박막을 성막하였으며, 증착 후 열처리 조건을 조절하여 박막트랜지스터의 활성층에 적용 가능한 특성을 가지는 산화구리 박막반도체를 얻었다. 열처리 전에 $10^{22}\;cm^{-3}$ 수준의 전자 이송자농도를 가지던 n-형 박막이 열처리 조건을 최적화함에 따라 $10^{16}\;cm^{-3}$ 수준의 정공 이송자농도를 가지는 p-형 산화물반도체 박막으로 변화하였다.

• 동력기계공학회지
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• 제8권1호
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• pp.41-47
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• 2004

Cooling towers are widely used not only for cooling products and equipment in manufacturing process but HVAC(Heating, Ventilation and Air Conditioning) system. As a cooling tower is the terminal apparatus which discharges heat from industrial process, the efficiency of heat exchange in the cooling tower greatly affects to the overall performance of a thermal system. In this paper, we constituted a new water cooling system by using a Latent heat of evaporation in an enclosed tank, and this system is consisted of an enclosed vacuum tank and water driven ejector system. Several experimental cases were carried out for improvement methods of high vacuum pressure and water cooling characteristics. The ejector performance was tested in case of water temperature variations that flows into the ejector. Based on the vacuum pressure by water driven ejector, the water cooling characteristics were investigated for the vaporized air condensing effects.

• 한국전기전자재료학회논문지
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• 제34권2호
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• pp.105-109
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• 2021

CNT fiber has been in the spotlight as a conductor, but the conductivity of CNT fibers do not match that of CNT. This study reveals that the conductivity of CNT fiber can be improved by depositing Al/Cu through vacuum evaporation. Cu is commonly used for deposition on CNT fibers. But low bonding strength of the interface between CNT and Cu could be a disadvantage. To overcome this, Al was deposited on the CNT fiber for forming aluminum carbide islands to increase the interfacial bonding strength. The conductivity characteristics were improved as the deposition time increased. The resistance was measured as a function of temperature, demonstrating that the temperature coefficient of resistance (TCR) is improved to be 241 ppm/℃ in comparison with that of as-received CNT fibers at -1,251 ppm/℃, when the CNT fibers are deposited with Al and Cu, respectively, for 90s and for 540s.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 춘계학술대회 논문집 센서 박막재료 반도체재료 기술교육
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• pp.39-42
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• 2002

There is a renewed interest in the application of photoconductors especially Cd(Zn)Te to x-ray imaging. In this paper, We investigate effects on x-ray detection characteristic of Zn dopped CdTe detector. Cd(Zn)Te film was fabricated by vacuum thermal evaporation method and then investigate physical analysis using EPMA and XRD. We investigated the leakage current and X-ray photosensitivity as applied voltage about fabricated Cd(Zn)Te film. Experimental results showed that the increase of Zn dopped concentration in $Cd_{1-x}Zn_{x}Te$ detector reduced a leakage current and improved a signal to noise ratio significantly.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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• pp.845-848
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• 2002

The study of photoconductor materials is demanded for development for flat-panel digital x-ray Imager. In this paper, We investigated the feasibility of application as x-ray image sensor using Cd(Zn)Te compound with high stopping power on high radiation. These Cd(Zn)Te samples were fabricated by vacuum thermal evaporation method to large area deposition and investigated I-V measurement as applied voltage. The experimental results show that the additional injection Zn in CdTe film reduced the leakage current, for the $Cd_{0.85}Zn_{0.15}Te$ detector, the net charge had the highest value as $144.58pC/cm^2$ at 30 V.

• 한국진공학회지
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• 제15권5호
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• pp.518-526
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• 2006

나노 다공성 알루미나 박막을 제작하고 이를 주형으로 사용해서 진공증착에 의해 규칙적으로 배열된 나노우물구조와 나노그물구조의 금속 박막들(알루미늄, 주석, 코발트)을 제작하였다. 원하는 금속물질을 증발시키기 위하여 저항가열 방법을 사용하였으며, 증착은 torr의 기저진공 속에서 수행되었다. 실험결과에 의하면, 나노우물과 나노그물 구조의 박막 중 어떤 구조가 합성되느냐 하는 것은 증착되는 물질의 양에 의해서 큰 영향을 받는다는 사실을 알 수 있었다. 세포의 크기가 100 nm이고 세공 직경이 60 nm인 다공성 알루미나 박막을 사용했을 때는 대략 우물구조를 합성하는데 필요한 질량의 절반이하 정도가 증착되게 되면 그물 구조가 합성되는 경향을 보여주었다.

• 설비공학논문집
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• 제26권1호
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• pp.21-25
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• 2014

A drying machine for discarded Citrus scrap was developed in this study. The Citrus produced in Jeju Province was treated as wastes (a) after making a beverage, such as drinking juice, and (b) if the size of the product did not fit with its agricultural product criteria. Various types of drying machine were developed in this study, and different kinds of technologies were combined improve the performance. To enhance the performance, the system was maintained in a vacuum state, and a high frequency micro wave was activated to the waste Citrus scrap, to heat up the moisture inside the Citrus kernels. The frequency of the micro-wave was 2.6 GHz, which is the resonant frequency of the molecules. Experiments were conducted with a vacuum of 50, 100, 150, 300, 500, and 700 mbar. The waste Citrus scrap has two types of status : (a) original scrap, and (b) mixed with blender. As results, specimen (a) shows a 0.13 g/sec evaporation rate, while specimen (b) shows a 0.19 g/sec rate, at 50 mbar of environment vacuum condition. For the drying efficiency, specimens (a) and (b) show 0.15 g/W and 0.24 g/W, respectively.

• 한국진공학회지
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• 제12권2호
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• pp.112-117
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• 2003

MgO 박막은 PDP(plasma display panels)분야에서 널리 사용되어 왔다. 본 연구에서는, 기존에 사용되고 있는 e-beam evaporation, reactive magnetron sputtering법과 arc deposition법으로 MgO 보호막을 증착하여 구조적 · 광학적 특성을 비교하였다. 반응 가스인 산소 가스의 유입량을 변화시켜 Mg metal target을 이용하여 vacuum arc deposition equipment 의해 유리 기판 위에 증착하였다. Ellipsometer를 이용하여 치밀도를 측정하고, MgO보호막의 마모율(erosion rate)를 측정하기 위해 가속 실험 방법을 도입, Ar+ 이온빔에 의한 erosion test를 시행하여 내마모성을 알아보았다. 또한, XPS와 UV test를 사용하여 MgO보호막의 광투과도에 미치는 수분의 영향을 조사한 결과, arc evaporation 법이 광투과도 90%이상을 유지하여 수분의 영향에 둔감한 것을 알 수 있었다. 한편, XRD와 AFM을 이용하여 MgO 박막의 구조와 표면 형상에 대해 조사하였다.