Ion Beam Assisted Deposition 법에 의한 TiN박막 제작 및 특성연구

• 원정연;김종호;강희재;백창현;박상렬;홍주화;위명용
• • Proceedings of the Korean Vacuum Society Conference
  • /
  • 1998.02a
  • /
  • pp.36-37
  • /
  • 1998
• PDF

Deposition of Cu films on Si substrates by Ionized Cluster Beam (Ionized Cluster Beam에 의한 Si 기판 위에 Cu 박막 증착)

• Ki-hwan Kim;Du-
• • Proceedings of the Korean Vacuum Society Conference
  • /
  • 1994.06a
  • /
  • pp.83-83
  • /
  • 1994
• PDF

Deposition of Nano Crystalline Silicon Thin Film by Using a Neutral Beam Method at Low Temperature

• Im, Ung-Seon;Gang, Se-Gu;O, Jong-Sik;Yeom, Geun-Yeong
• • Proceedings of the Korean Vacuum Society Conference
  • /
  • 2008.02a
  • /
  • pp.94-94
  • /
  • 2008
• PDF

Pulsed Laser Deposition 증착조건에 따른 ZnO박막의 결함구조분석

• Song, Hu-Yeong;Kim, Jae-Hun;Kim, Eun-Gyu
• • Proceedings of the Korean Vacuum Society Conference
  • /
  • 2008.02a
  • /
  • pp.274-274
  • /
  • 2008
• PDF

Bottom-up Patterning Method by using of Microcontact Printing and Atomic Layer Deposition on Gold

• Seo, Eun-Gyeong;Jang, Yeong-Jin;Seong, Myeong-Mo
• • Proceedings of the Korean Vacuum Society Conference
  • /
  • 2003.08a
  • /
  • pp.163-163
  • /
  • 2003
• PDF

Bottom-up Patterning Method by using of Microcontact Printing and Atomic Layer Deposition on Silicon

• Park, Mi-Hyeon;Jang, Yeong-Jin;Seong, Myeong-Mo
• • Proceedings of the Korean Vacuum Society Conference
  • /
  • 2003.08a
  • /
  • pp.189-189
  • /
  • 2003
• PDF

UV-enhanced Atomic Layer Deposition(ALD) of $TiO_2$ Thin Films

• Gwon, Yong-Jun;Jang, Yeong-Jin;Seong, Myeong-Mo
• • Proceedings of the Korean Vacuum Society Conference
  • /
  • 2003.08a
  • /
  • pp.111-111
  • /
  • 2003
• PDF

Growth of Highly Oriented Diamond Films by Microwave Plasma Chemical Vapor Deposition

• Lee, Kwang-Man;Choi, Chi-Kyu;Sitar, Zlatko
• • Proceedings of the Korean Vacuum Society Conference
  • /
  • 2003.08a
  • /
  • pp.210-210
  • /
  • 2003
• PDF

Plasma Enhanced Atomic Layer Deposition 기술을 이용한 $Al_{2}O_{3}$와 $ZrO_2$ 박막의 증착 및 특성 연구

• Yun, Seon-Jin;Im, Jeong-Uk;Lee, Jin-Ho
• • Proceedings of the Korean Vacuum Society Conference
  • /
  • 2004.08a
  • /
  • pp.151-151
  • /
  • 2004
• PDF

Electrical and optical properties of P and As doped ZnO films prepared by Pulsed laser deposition

• Vaithianathan, Veeramuthu;Hong, Yong-Seong;Lee, Byeong-Taek;Kim, Sang-Seop
• • Proceedings of the Korean Vacuum Society Conference
  • /
  • 2004.08a
  • /
  • pp.238-238
  • /
  • 2004
• PDF

---