• Title/Summary/Keyword: vacuum chamber

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CHARACTERISTICS OF THE CONTAMINATED LANGMUIR PROBE (오염된 LANGMUIR 탐침의 특성)

  • Pyo, Y. S.;Min, K. W.;Choi, Y. W.;Lee, D. H.;Kang, K. M.;Hwang, S. M.;Kim, B. C.;Kim, J.;Lee, S. J.
    • Journal of Astronomy and Space Sciences
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    • v.12 no.2
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    • pp.234-243
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    • 1995
  • Korea's third rocket, which is currently under development for launch in 1997, is expected to reach as high as 160km and thus, it will provide a good opportunity for the direct measurement of the plasmas in the E-region ionosphere of the Korean peninsula. Langmuir probe techniques, which are the basic tools of the plasma experiment, may yield inaccurate results if they are applied in the conventional form as they are used in the laboratory experiments because of the contamination. In the present paper we study the contamination problem by performing the ground experiments in the vacuum chamber using the contaminated probe. The result show that the contamination effect is reduced when the plasma density is low or when the frequency of the sweep voltage is fast. We propose a modified Langmuir probe based upon our experiments which is suitable for the rocket experiments.

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Thermal Design of MGSE Panel for Thermal Vacuum Test of Ka-band Engineering Qualification Model Payload of Communications and Broadcasting Satellite (통신방송위성 Ka-대역 기술인증모델 탑재체의 열진공시험을 위한 MGSE 패널 열설계)

  • Kim, Jeong Hun;Choe, Seong Bong;Yang, Gun Ho
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.31 no.2
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    • pp.96-102
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    • 2003
  • The thermal design of MGSE(Mechanical Ground Support Equipment) panel is performed for thermal vacum thest of Ka-band EQM(Engineering Qualification Model) payload of communications and broadcasting satellite. The thermal environments are predicted to evaluate the performance of transponder equipments in the thermal vacum chamber. SINDA is used to verify the thermal design of the heat pipe layout. Embedded 16 heat pipes in the EQM payload developed for Ka-band trasponder equipments are designded properly. The heat fluz loaded on the external facesheet is 265W/㎡ for the hot platear function test of the traspinder equipments, and the zero heat flux for the cold plateau case. The maxium predicted heat transport capability is 2723 W-cm.

An Experimental Study on Design and Starting Characteristics of a Sub-scale Diffuser for Simulating High-Altitude Environment (고고도 환경 모사용 축소형 디퓨저 설계 및 시동특성 연구)

  • Lee, Yang-Suk;Jeon, Jun-Su;Ko, Young-Sung;Yang, Jae-Jun;Kim, Sun-Jin;Kim, Jung-Hoon
    • Journal of the Korean Society of Propulsion Engineers
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    • v.13 no.5
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    • pp.21-28
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    • 2009
  • This experimental study was performed to find the important design parameters and the starting characteristics of a supersonic exhaust diffuser. The experimental study was carried out on a scaled down model of straight cylindrical supersonic exhaust diffuser, in order to evaluate the effects of operating fluid(air, nitrogen), the diffuser inlet area over the primary nozzle throat area($A_d/A_t$), the inlet pressure of primary nozzle, diffuser length over diffuser inner diameter($L_d/D_d$) and existence or nonexistence of diffuser divergence. The test results showed that the starting pressure increased with decrease in diameter of primary nozzle, and the measured starting pressure of the diffuser had approximately 90~98% efficiency as compared with the predicted starting pressure. Also, the diffuser was started at all case, regardless of $L_d/D_d$ (above 8.4) and diffuser divergence. The result of this study can be used as an essential database for developing a simulated high-altitude facility for real-scale model.

X-ray Scattering Study of Reactive Sputtered Ta-N/Ta/Si(001)Film as a Barrier Metal for Cu Interconnection (구리배선용 베리어메탈로 쓰이는 Ta-N/Ta/Si(001)박막에 관한 X-선 산란연구)

  • Kim, Sang-Soo;Kang, Hyon-Chol;Noh, Do-Young
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.05b
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    • pp.79-83
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    • 2001
  • In order to compare the barrier properties of Ta-N/Si(001) with those of Ta-N/Ta/Si(001), we studied structural properties of films grown by RF magnetron sputtering with various $Ar/N_2$ ratios. To evaluate the barrier properties, the samples were annealed in a vacuum chamber. Ex-situ x-ray scattering measurements were done using an in-house x-ray system. With increasing nitrogen ratio in Ta-N/Si(001), the barrier property of Ta-N/Si(001) was enhanced, finally failed at $750^{\circ}C$ due to the crystallization and silicide formation. Compared with Ta-N/Si(001), Ta-N/Ta/Si(001) forms silicides at $650^{\circ}C$. However it does not crystallize even at $750^{\circ}C$. With increasing nitrogen composition in Ta-N/Ta/Si(001), the formation of tantalum silicide was reduced and the surface roughness was improved. To observe the surface morphology of Ta-N/Ta/Si(001) during annealing, we performed an in-situ x-ray scattering experiment using synchrotron radiation of the 5C2 at Pohang Light Source(PLS). Addition of Ta layer between Ta-N and Si(001) improved the surface morphology and reduced the surface degradation at high temperatures. In addition, increasing $N_2/Ar$ flow ratio reduced the formation of tantalum silicide and enhanced the barrier properties.

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CFD Analysis on the Flow Characteristics of Ejector According to the Position Changes of Driving Nozzle for F.W.G (수치해석을 이용한 담수장치용 이젝터의 노즐위치 변화에 따른 이젝터 유동특성 연구)

  • Joo, Hong-Jin;Jung, Il-Young;Yun, Sang-Kook;Kwak, Hee-Youl
    • Journal of the Korean Solar Energy Society
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    • v.31 no.3
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    • pp.23-28
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    • 2011
  • In this study, the ejector design was modeled using Fluent 6.3 of FVM(Finite Volume Method) CFD(Computational Fluid Dynamics) techniques to resolve the flow dynamics in the ejector. A vacuum system with the ejector has been widely used because of its simple construction and easy maintenance. Ejector is the main part of the desalination system, of which designs determine the efficiency of system. The effects of the ejector was investigated geometry and the operating conditions in the hydraulic characteristics. The ejector consists mainly of a nozzle, suction chamber, mixing tube (throat), diffuser and draft tube. Liquid is supplied to the ejector nozzle, the fast liquid jet produced by the nozzle entrains and the non condensable gas was sucked into the mixing tube. The multiphase CFD modeling was carried out to determine the hydrodynamic characteristics of seawater-air ejector. Condition of the simulation was varied in entrance mass flow rate (1kg/s, 1.5kg/s, 2kg/s, 2.5kg/s, 3kg/s), and position of driving nozzle was located from the central axis of the suction at -10mm, 0mm, 10mm, 20mm, 30mm.. Asaresult, suction flow velocity has the highest value in central axis of the suction.

A Study on Electron Beam Weldmetal Cross Section Shapes and Strength of Al 5052 Thick Plate (Al 5052 함금 후판재의 전자빔 용접부 단면 형상과 강도에 관한 연구)

  • Kim, In-Ho;Lee, Gil-Young;Ju, Jeong-Min;Park, Kyoung-Tae;Chun, Byong-Sun
    • Journal of Welding and Joining
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    • v.27 no.3
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    • pp.73-79
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    • 2009
  • This present paper investigated the mechanical properties and the microstructures of each penetration shapes classifying the conduction shape area and the keyhole shape area about electron beam welded 120(T)mm thick plated aluminum 5052 112H. As a result the penetration depth is increased linearly according to the output power, but the aspect ratio is decreased after the regular output power. In the conduction shape area, the Heat affected zone is observed relatively wider than the keyhole shape area. In the material front surface of the welded specimen, the width is decreased but the width in the material rear surface is increased. After the measuring the Micro Vikers Hardness, it showed almost similar hardness range in all parts, and after testing the tensile strength, the ultimate tensile strength is similar to the ultimate tensile strength of the base material in all the specimens, also the fracture point was generated in the base materials of all the samples. In the result of the impact test, impact absorbed energy of the Keyhole shape area is turned up very high, and also shown up the effect about four times of fracture toughness comparing the base material. In the last result of observing the fractographs, typical ductile fraction is shown in each weld metal, and in the basic material, the dimple fraction is shown. The weld metals are shown that there are no other developments of any new chemical compound during the fastness melting and solidification.

Cathode Power Development of Hall Thruster for Small Satellite using Microwave cathode (마이크로웨이브 음극을 이용한 소형 인공위성의 홀 추력기용 음극전원 개발)

  • Kang, Seokhyun;Choo, Wongyo;Choi, Junku;Jeong, Yunhwang;Kim, Younho;Kang, Seongmin;Kuninaka, Hitoshi;Cha, Hanju
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.42 no.11
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    • pp.974-980
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    • 2014
  • A power supply of cathode has been developed for hall-effect thruster for small satellite. A microwave cathode has been applied to the electric propulsion system and cathode power is necessary in oder to work securely. Anode current is varied by a flow rate controlled by anode tank pressure. Then cathode current has to be controled in proportion by anode current. So cathode power supply has been designed to offer a current proportional to anode current. Also cathode power has been tuned to work securely for cathode to emit more electron than anode within 0.03A. The function test of cathode power was performed by constructing an equivalent load for anode and cathode. It has been tested in a vacuum chamber in order to ensure a stable operation of the thruster. And it was confirmed that thruster normally has been operated in the space environment after the launch.

Development of Confined Plasma Source for Hazardous Gas Treatment (유해가스 처리를 위한 Confined Plasma Source 개발)

  • Yoon, Yongho
    • The Journal of the Institute of Internet, Broadcasting and Communication
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    • v.20 no.3
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    • pp.135-140
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    • 2020
  • Since the process gas that is essential in the semiconductor process is a harmful gas, it is an essential task to solve it in an environmentally friendly manner. Currently, the cleaning technology used in the semiconductor process is mostly a wet cleaning based on hydrogen peroxide developed in the 1970s, and the SC-1 cleaning liquid for removing particles on the surface uses a mixture of ammonia and hydrogen peroxide. Therefore, environmental problems are caused, and economic problems caused by excessive water use are also serious. For this reason, the products developed through this study are used to decompose the process harmful gas from the chamber outlet into a harmless gas before entering the vacuum pump, or by incineration and the gaseous components are deposited on the pump. I want to solve the problem. In this paper, CPS (Confined Plasma Source) is proposed to save environment and improve productivity by replacing harmful gases (N2, CF4, SF6⋯., Etc) which are indispensable in semi-contamination process with innocuous gases or incineration with plasma, to study.

Improvement of Starting Performance in Supersonic Exhaust Diffuser with Second Throat for High Altitude Simulation (2차목에 의한 고고도 모사용 초음속 디퓨져 시동성능 향상)

  • Park, Sung-Hyun;Park, Byung-Hoon;Lim, Ji-Hwan;Yoon, Woong-Sup
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2008.05a
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    • pp.321-327
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    • 2008
  • Performance characteristics of the axi-symmetric supersonic exhaust diffuser (SED) with a second throat are numerically investigated. Computational strategy repeats those for a straight exhaust diffuser with zero-secondary flows. Renolds-Average Navier-Stokes equations with a standard ${\kappa}-{\varepsilon}$ turbulence model incorporated with standard wall function are solved to simulate the diffusing evolutions of the nozzle plume. The methodology is validated with accuracy. To predict the improvement of starting performance by second throat diffuser, diffuser characteristic curve due to the SED equipped with the second throat is speculated with respect to that of a straight area type as a function of nozzle stagnation pressure. Principal physics caused by the of the second throst is also addressed in terms of a second throat area ratio.

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Characteristic evaluations and production of triode magnetron sputtering system (Triode magnetron sputtering system의 제작 및 특성평가)

  • Kim, H.H.;Lee, M.Y.;Kim, K.T.;Yoon, S.H.;Yoo, H.K.;Kim, J.M.;Park, C.H.;Lim, K.J.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.07b
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    • pp.787-790
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    • 2003
  • A rf triode magnetron sputtering system is designed and installed its construction in vacuum chamber. In order to calibrate the rf triode magnetron sputtering for thin films deposition processes, the effects of different glow discharge conditions were investigated in terms of the deposition rate measurements. The basic parameters for calibrating experiment in this sputtering system are rf power input, gas pressure, plasma current, and target-to-substrate distance. Because a knowledge of the deposition rate is necessary to control film thickness and to evaluate optimal conditions which are an important consideration in preparing better thin films, the deposition rates of copper as a testing material under the various sputtering conditions are investigated. Furthermore, a triode sputtering system designed in our team is simulated by the SIMION program. As a result, it is sure that the simulation of electron trajectories in the sputtering system is confined directly above the target surface by the force of $E{\times}B$ field. Finally, some teats with the above 4 different sputtering conditions demonstrate that the deposition rate of rf triode magnetron sputtering is relatively higher than that of the conventional sputtering system. This means that the higher deposition rate is probably caused by a high ion density in the triode and magnetron system. The erosion area of target surface bombarded by Ar ion is sputtered widely on the whole target except on both magnet sides. Therefore, the designed rf triode magnetron sputtering is a powerful deposition system.

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