• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.118.1-118.1
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• 2016

포항가속기연구소 PLS-II 저장링에 설치 운용을 위한 타원편광 언듈레이터(EPU114)용 초고진공 진공 챔버는 전체를 기계가공 후 용접하여 제작하는 기존의 방식을 바꾸어 알루미늄 압출 공법을 적용한 진공 챔버의 개발과 본제품 제작을 완료하였다. 압출 공법을 이용한 초고진공용 진공 챔버 제작은 기계가공 및 용접비용의 절감과 동일 형상의 진공 챔버를 상대적으로 쉽게 대량 생산을 할 수 있는 장점이 있다. 알루미늄 압출형 초고진공 진공 챔버의 기계, 진공 특성을 달성하기 위하여 정밀금형 제작기술, 특수압출기술, 표면처리기술 등이 필수적이다. 본 발표에서는 초고진공 진공 챔버 개발을 위하여 적용된 압출 공법의 소개와 함께 압출 공법이 적용된 타원편광 언듈레이터(EPU114)진공 챔버의 제작, 초고진공 진공달성, 설치 등의 과정을 내용으로 한다.

• Journal of the Korean Vacuum Society
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• v.2 no.4
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• pp.474-479
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• 1993

Submicron contact hole filling with aluminum alloys has been achieved with a multistep metallization method, which utilizes a metal " flow" or self-diffusion process at elevated temperatures after the metal was sputter-deposited. A multi-chamber, modular sputtering system was employed to deposit aluminum alloys and subsequently to anneal the deposited metal films under vacuum at high temperatures. The film were deposited on 200 mm wafers with planar, dc magnetron sputtering sources without anysubstrate bias. The basic process steps studied for the multistep metallization include an initial layer deposition at low temperatures less than $100^{\circ}C$, and an annealin gstep at elevated temperatures, between 450 and $550^{\circ}C$. The degree of planarization or step coverage was dependent strongly upon the temperature and time of the flow step and complete filling of the submicron contacts with aluminum alloys was achieved. Responsible mechanisms for the enhancement in step coverge and factros determining uniform and reproducible flow of aluminum alloys during the high temperauture step are discussed.discussed.

• Transactions on Electrical and Electronic Materials
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• v.17 no.5
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• pp.306-309
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• 2016

The Cs₃Sb photocathode was formed by non-vacuum process technology. An in-situ vacuum device was fabricated successively with flat cesium antimonide photocathode emitters fabricated in a process chamber. The electrical properties of the device were characterized. Electron emission from the devices was induced by photoemitted electrons, which were accelerated by an anode electric field that was shielded from the photoemitter surface. The electrical characteristics of the devices were investigated by measuring the anode current as a function of device operation times with respect to applied anode voltages. Planar blue LED light with a 450 nm wavelength was used as an excitation source. The results showed that the cesium antimonide photocathode emitter has the potential of long lifetime with stable electron emission characteristics in panel devices. These features demonstrate that the cesium antimony photocathodes produced by non-vacuum processing technology is suitable for flat cathodes in panel device applications.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.11a
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• pp.362-365
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• 2000

Rapid Prototyping(RP) techniques have revolutionized traditional manufacturing methods. These techniques allow the user to fabricate a part directly from a conceptual model before investing in production tooling and help develop new models with significant short time. This paper suggests to new process to manufacture large size hollow shape parts for prototype-car using Rapid Prototyping technology and Vacuum Molding with the reduction of delivery time. In addition, This paper introduces the dividing and combining method to make large size RP master model in spite of the limit of the build chamber dimensions of commercialized RP system and post-processing method to achieve sufficient surface quality.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.173.2-173.2
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• 2014

Thin nitride thin films were synthesized by reactive radio-frequency magnetron sputtering in the ultra high vacuum (UHV) chamber. To control the characteristics of thin films, tin nitride thin films were obtained various argon and nitrogen gas mixtures, especially low nitrogen gas ratios. Tin nitride thin films were analyzed with alpha step, scanning electron microscopy (SEM), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and 4 point probe measurement. The result of alpha step and SEM showed that the thickness of thin nitride thin films were decreased with increasing nitrogen gas ratios. The metallic tin structure was decreased and the amorphous tin nitride structure were observed by XRD with higher nitrogen gas ratios. The oxidation state of tin and nitride were studied with high resolution Sn 3d and N 1s XP spectra.

• Journal of the Korean Vacuum Society
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• v.2 no.2
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• pp.145-151
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• 1993

Ultra High Vacuum chamber for surface analysis and a series of AES-LEED controllers for LEED optics was designed and constructed. Electron energy resolution of LEED optics was tested. On the basis of the layer by layer mode, thickness of evaporated Ni on Pt(111) was calculated from the Auger signal ratio.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.279-279
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• 2012

In order to estimate the average migration lengths of $H_3O^+$ ions in amorphous ice, we conducted experiments of reactive ion scattering (RIS), low energy sputtering (LES), and reflection absorption IR spectroscopy (RAIRS) with an ultra-high vacuum (UHV) chamber. Dopped water-ice films were grown on the clean surface of Ru single crystal and analyzed with RIS, LES and RAIRS methods. The population changes of probe molecules, which were buried at a controlled distance from the surface, were monitored by those methods so that we can mesure the migration efficiencies. From the measured efficiencies, we evaluated the average migration lengths. This result is expected to give the information about the dynamics of proton in water-ice film.

• Applied Science and Convergence Technology
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• v.25 no.3
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• pp.47-50
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• 2016

Low temperature test for half-wave resonator (HWR) cryomodule is performed at the superfluid helium temperature of 2 K. The effective temperature is defined for non-uniform temperature distribution. Helium leak detection techniques are introduced for cryogenic system. Experimental set up is shown to make the low temperature test for the HWR cryomodule. The cooldown procedure of the HWR cryomodule is shown from room temperature to 2 K. The cryomodules is precooled with liquid nitrogen and then liquid helium is supplied to the helium reservoirs and cavities. The pressure of cavity and chamber are monitored as a function of time. The vacuum pressure of the cryomodule is not increased at 2 K, which shows leak-tight in the superfluid helium environment. Static heat load is also measured for the cryomodule at 2.5 K.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2008.03a
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• pp.442-447
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• 2008

A numerical analysis has been conducted to investigate and characterize the unsteadiness of flow structure and oscillatory vacuum pressure inside of a supersonic diffuser equipped to simulate the high-altitude rocket test on the ground. A physical model of concern includes a rocket motor, a vacuum chamber, and a diffuser, which have axisymmetric configurations, using nitrogen gas as a driving fluid. Emphasis is placed on investigating physical phenomena of very complex and oscillatory flow evolutions in the diffuser operating at very close to the starting condition, i.e. minimum starting condition, which is one of major important parameters in diffuser design points of view.

• Journal of the Korean GEO-environmental Society
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• v.11 no.9
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• pp.55-60
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• 2010

This study are carried out to an lab model tests to develop a construction method that solidifies high-water content cohesive soil by using filter type drain and vacuum pressure, and that stabilizes the ground by accelerating horizontal drain at incline or in tunnel. The calibration chamber was designed within length of 1.5m and height of 50cm, and a drainage hole for preconsolidation, a switchgear and a piezometer were installed at the bottom part of the chamber. Also, a settlement gage was installed at the top part so that it can measure the settlement by time. The calibration ground basis was made in a form of thin layer from kaolinite and bentonite in 9:1 ratio stirred at 130% water content condition. A filter type drain was installed at chamber center and a vacuum pressure of 0.8MPa was applied through a hose linked to the cap at the top part, then, the settlement was measured in every 1 hour interval. After experiment, the moisture contents were measured by position, then, verified the increase of solidity of the ground through a triaxial compression test on undisturbed profile. After 11 days from the effective date, it was observed that the settlement decreased by maximum 35mm and the water content ratio was reduced by 38% at most while the solidity of the ground increased by 5~8 times greater than before preconsolidation.