• Title/Summary/Keyword: uniformity test

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Statistical Design of Experiments and Analysis: Hierarchical Variance Components and Wafer-Level Uniformity on Gate Poly-Silicon Critical Dimension (통계적 실험계획 및 분석: Gate Poly-Silicon의 Critical Dimension에 대한 계층적 분산 구성요소 및 웨이퍼 수준 균일성)

  • Park, Sung-min;Kim, Byeong-yun;Lee, Jeong-in
    • Journal of Korean Institute of Industrial Engineers
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    • v.29 no.2
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    • pp.179-189
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    • 2003
  • Gate poly-silicon critical dimension is a prime characteristic of a metal-oxide-semiconductor field effect transistor. It is important to achieve the uniformity of gate poly-silicon critical dimension in order that a semiconductor device has acceptable electrical test characteristics as well as a semiconductor wafer fabrication process has a competitive net-die-per-wafer yield. However, on gate poly-silicon critical dimension, the complexity associated with a semiconductor wafer fabrication process entails hierarchical variance components according to run-to-run, wafer-to-wafer and even die-to-die production unit changes. Specifically, estimates of the hierarchical variance components are required not only for disclosing dominant sources of the variation but also for testing the wafer-level uniformity. In this paper, two experimental designs, a two-stage nested design and a randomized complete block design are considered in order to estimate the hierarchical variance components. Since gate poly-silicon critical dimensions are collected from fixed die positions within wafers, a factor representing die positions can be regarded as fixed in linear statistical models for the designs. In this context, the two-stage nested design also checks the wafer-level uniformity taking all sampled runs into account. In more detail, using variance estimates derived from randomized complete block designs, Duncan's multiple range test examines the wafer-level uniformity for each run. Consequently, a framework presented in this study could provide guidelines to practitioners on estimating the hierarchical variance components and testing the wafer-level uniformity in parallel for any characteristics concerned in semiconductor wafer fabrication processes. Statistical analysis is illustrated for an experimental dataset from a real pilot semiconductor wafer fabrication process.

Design and Performance Test of Large-Area Susceptor for the Improvement of Temperature Uniformity (온도 균일도 향상을 위한 대면적 서셉터의 설계 및 성능 시험)

  • Yang, Hac Jin;Kim, Seong Kun;Cho, Jung Kun
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.16 no.6
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    • pp.3714-3721
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    • 2015
  • Although sheath-type heating line is generally used for susceptor heater, performance deterioration problems in temperature uniformity occurs in the case of large scale and high temperature condition. We developed new design and prototype of the susceptor using sheet metal to provide performance improvement in temperature uniformity. Temperature uniformity below 1.4% in the surface temperature condition of $450^{\circ}C$ was verified in the susceptor prototype. Also we developed Kernel regression algorithm to estimate measured temperature using temperature learning data. The reliability of the measured temperature uniformity was confirmed by comparative analysis between predicted data and measured data.

Experimental Study on the Effect of Particle Size Distribution of Soil to the Liquefaction Resistance Strength (입도분포가 액상화 저항강도에 미치는 영향에 관한 실험적 연구)

  • Choi, Mun-Gyu;Seo, Kyung-Bum;Park, Seong-Yong;Kim, Soo-Il
    • Proceedings of the Korean Geotechical Society Conference
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    • 2005.03a
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    • pp.1126-1133
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    • 2005
  • The effects of mean particle size and uniformity coefficient of dredged soils to the liquefaction resistance strength and dynamic characteristics are experimentally studied in this paper. Representative 4 mean particle sizes and 3 uniformity coefficients were selected and 12 representative particle size distribution curves which have different mean particle sizes and uniformity coefficients, were artificially manufactured using the real dredged river soil. Cyclic triaxial tests and torsional shear tests were carried out to analyze the effect of mean particle size and uniformity coefficient to the liquefaction resistance strength and dynamic characteristics of soils.

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New Non-uniformity Correction Approach for Infrared Focal Plane Arrays Imaging

  • Qu, Hui-Ming;Gong, Jing-Tan;Huang, Yuan;Chen, Qian
    • Journal of the Optical Society of Korea
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    • v.17 no.2
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    • pp.213-218
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    • 2013
  • Although infrared focal plane array (IRFPA) detectors have been commonly used, non-uniformity correction (NUC) remains an important problem in the infrared imaging realm. Non-uniformity severely degrades image quality and affects radiometric accuracy in infrared imaging applications. Residual non-uniformity (RNU) significantly affects the detection range of infrared surveillance and reconnaissance systems. More effort should be exerted to improve IRFPA uniformity. A novel NUC method that considers the surrounding temperature variation compensation is proposed based on the binary nonlinear non-uniformity theory model. The implementing procedure is described in detail. This approach simultaneously corrects response nonlinearity and compensates for the influence of surrounding temperature shift. Both qualitative evaluation and quantitative test comparison are performed among several correction technologies. The experimental result shows that the residual non-uniformity, which is corrected by the proposed method, is steady at approximately 0.02 percentage points within the target temperature range of 283 K to 373 K. Real-time imaging shows that the proposed method improves image quality better than traditional techniques.

Overall Illuminance Uniformity of IRED Lighting in Nighttime CCTV

  • Sa-Gong, Geon;Park, Yung-Jun;Park, Jung-Je;Lee, Suho
    • Transactions on Electrical and Electronic Materials
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    • v.18 no.1
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    • pp.35-41
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    • 2017
  • This study looks at optimizinge light redistribution to improve the overall illuminance uniformity of commercial IRED modules. To obtain uniform illumination over a prescribed rectangular area, a freeform surface lens was evaluated using TracePro. The LED light overall illuminance uniformity regulated in KSC 7658 was verified using Relux software. Experimental test results showed 0.81 overall illuminance uniformity for rectangular light distribution of LED lights having a radiation angle of $80^{\circ}$. After fabricating prototype IRED lights based on these simulation results, illuminance performance was observed when used as actual IRED lighting with a nighttime CCTV system. Image observation photographs of the prototype $80^{\circ}$ rectangular IRED lights confirmed that object images can be seen clearly owing to high overall illuminance uniformity, and that dark regions of the CCTV screen were not shown.

Testing Uniformity Based on Vasicek's Estimator

  • Kim, Jong-Tae;Cha, Young-Joon
    • Journal of the Korean Data and Information Science Society
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    • v.15 no.1
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    • pp.119-127
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    • 2004
  • To test uniformity of a population, we modify the test statistic based on the sample entropy in the literature, and establish its limiting distribution under weaker conditions, which improves the existing results. It is also to study the proposed test statistic based on Vasicek's entropy estimator is consistent.

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Uniformity and Independency Tests of Pseudo-random Number Generators (의사난수 생성기의 일양성과 독립성 검정)

  • Park, Kyong-Youl;Kwon, Gi-Chang;Kwon, Young-Dam
    • Journal of the Korean Data and Information Science Society
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    • v.9 no.2
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    • pp.237-246
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    • 1998
  • We put the pseudo-random number generator into catagories like MiCG, MuCG, URG, ICG, EICG, and test uniformity and independency by 10,000 times through n empirical trial after selecting this random number generator. Here, from a fraction of data(20, 40, 60, 80, 100) with a significance level of 0.1, 0.05 and 0.01, we drive cumulative frequency with K-S, $X^{2}$, poker, run, autocorrelation test. As a result from the uniformity and independency among five random number generators based on all these data, all random number generator except EICG passed uniformity and independency test, and the URG turn out to be excellent in periodicity.

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A Study on Correlations for Void Ratio, Coefficient of Uniformity and Coefficient of Curvature for Determination of Relative Density for Sands

  • Im, Soyeong;Jin, Yongguo;Chun, Byungsik
    • Journal of the Korean GEO-environmental Society
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    • v.14 no.3
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    • pp.13-17
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    • 2013
  • Determination of geotechnical characteristics of soil is either to use the field samples to measure the characteristics of soil through laboratory test or measuring the characteristics directly in the field. Field test can be derived similar value by considering characteristics of site and laboratory test can be confirmed the characteristic of soil by testing with field samples. This article describes relative density as the measure of compaction for cohesionless soils and presents several simple and mathematical relationships to help engineers estimate needed parameters for relative density calculations. The main purpose of this research is to investigate possible correlations between coefficient of uniformity, coefficient of curvature, maximum and minimum void ratio, mean grain size. Results show a linear relationship between the minimum and maximum void ratios and a power function relationship between coefficient of uniformity and the limiting void ratios. Void ratio range, which is the difference between the maximum and minimum void ratios, appeared to be log normally distributed but showed no simple mathematical fit to the data. these results were shown to help engineers estimate needed parameters for relative density calculations.

Studies on the Content Uniformity of Pharmaceuticals -On the Content Uniformity of Phenformin Hydrochloride and Chlorpheniramine Maleate Tablets- (의약품(醫藥品)의 Content Uniformity에 관(關)한 연구(硏究) -Phenformin hydrochloride정(錠) 및 Chlorpheniramine maleate정(錠)의 Content Uniformity에 관(關)하여-)

  • Baek, Kyung-Ja;Yong, Jae-Ick
    • Journal of Pharmaceutical Investigation
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    • v.6 no.2
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    • pp.58-68
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    • 1976
  • 120 tablets of 25mg phenformin hydrochloride tablet and 4mg chlorpheniramine maleate tablet, respectively, were assayed and analyzed to obtain basic data on the content uniformity of domestic pharmaceuticals. All of the tablets of phenformin hydrochloride and that of chlorpheniramine maleate were met the requirements of the test for weight variation and content but no regularity was found in the content unformity specifications. In case of chlorpheniramine maleate tablets, standard deviation of active ingredient content of B maker was 4.1% and that of C maker 7.1%.

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CCD Signal Processing for Optimal Non-Uniformity Correction

  • Kong, Jong-Pil;Lee, Song-Jae
    • Korean Journal of Remote Sensing
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    • v.26 no.6
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    • pp.645-652
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    • 2010
  • The performance of the payload Electro-Optical System (EOS) in satellite system is affected by various factors, such as optics design, camera electronics design, and the characteristics of the CCD (Charge Coupled Device) used, etc. Of these factors, the camera electronics design is somewhat unique in that its operational parameters can be adjusted even after the satellite launch. In this paper, the effect of video gain on the non-uniformity correction performance is addressed. And a new optimal non-uniformity correction scheme is proposed and analyzed using the data from real camera electronics unit based on a TDI (Time Delayed Integration) type of CCD. The test results show that the performance of the conventional non-uniformity correction scheme is affected significantly when the video gain is added. On the other hand, in our proposed scheme, the performance is not dependent on the video gain. The insensitivity of the non-uniformity performance on the video-gain is mainly due to the fact that the correction is performed after the dark signal is subtracted from system response.