• 대한산업공학회지
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• 제29권2호
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• pp.179-189
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• 2003

Gate poly-silicon critical dimension is a prime characteristic of a metal-oxide-semiconductor field effect transistor. It is important to achieve the uniformity of gate poly-silicon critical dimension in order that a semiconductor device has acceptable electrical test characteristics as well as a semiconductor wafer fabrication process has a competitive net-die-per-wafer yield. However, on gate poly-silicon critical dimension, the complexity associated with a semiconductor wafer fabrication process entails hierarchical variance components according to run-to-run, wafer-to-wafer and even die-to-die production unit changes. Specifically, estimates of the hierarchical variance components are required not only for disclosing dominant sources of the variation but also for testing the wafer-level uniformity. In this paper, two experimental designs, a two-stage nested design and a randomized complete block design are considered in order to estimate the hierarchical variance components. Since gate poly-silicon critical dimensions are collected from fixed die positions within wafers, a factor representing die positions can be regarded as fixed in linear statistical models for the designs. In this context, the two-stage nested design also checks the wafer-level uniformity taking all sampled runs into account. In more detail, using variance estimates derived from randomized complete block designs, Duncan's multiple range test examines the wafer-level uniformity for each run. Consequently, a framework presented in this study could provide guidelines to practitioners on estimating the hierarchical variance components and testing the wafer-level uniformity in parallel for any characteristics concerned in semiconductor wafer fabrication processes. Statistical analysis is illustrated for an experimental dataset from a real pilot semiconductor wafer fabrication process.

• 한국산학기술학회논문지
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• 제16권6호
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• pp.3714-3721
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• 2015

서셉터 히터에서 쉬스 열선을 사용하는 방법이 일반화되어 있지만, 대면적 초고온 조건에서는 서셉터의 온도 균일도 성능 저하의 문제가 있다. 본 연구에서는 온도균일도 성능을 향상시킬 수 있도록 판형 형태의 열선을 기본으로 새로운 서셉터를 설계하여 프로토타입을 개발하였다. 표면 온도 $450^{\circ}C$의 고온에서 1.4% 이내로 온도 균일도가 시제작된 서셉터에서 검증될 수 있었다. 또한 온도 학습 데이터를 이용하여 측정 온도 데이터를 예측할 수 있는 커널 회귀 알고리즘을 개발하고, 이러한 예측 데이터와 측정 데이터의 비교 분석으로 균일도 측정 온도의 신뢰성을 확인할 수 있었다.

• 한국지반공학회:학술대회논문집
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• 한국지반공학회 2005년도 춘계 학술발표회 논문집
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• pp.1126-1133
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• 2005

The effects of mean particle size and uniformity coefficient of dredged soils to the liquefaction resistance strength and dynamic characteristics are experimentally studied in this paper. Representative 4 mean particle sizes and 3 uniformity coefficients were selected and 12 representative particle size distribution curves which have different mean particle sizes and uniformity coefficients, were artificially manufactured using the real dredged river soil. Cyclic triaxial tests and torsional shear tests were carried out to analyze the effect of mean particle size and uniformity coefficient to the liquefaction resistance strength and dynamic characteristics of soils.

• Journal of the Optical Society of Korea
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• 제17권2호
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• pp.213-218
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• 2013

Although infrared focal plane array (IRFPA) detectors have been commonly used, non-uniformity correction (NUC) remains an important problem in the infrared imaging realm. Non-uniformity severely degrades image quality and affects radiometric accuracy in infrared imaging applications. Residual non-uniformity (RNU) significantly affects the detection range of infrared surveillance and reconnaissance systems. More effort should be exerted to improve IRFPA uniformity. A novel NUC method that considers the surrounding temperature variation compensation is proposed based on the binary nonlinear non-uniformity theory model. The implementing procedure is described in detail. This approach simultaneously corrects response nonlinearity and compensates for the influence of surrounding temperature shift. Both qualitative evaluation and quantitative test comparison are performed among several correction technologies. The experimental result shows that the residual non-uniformity, which is corrected by the proposed method, is steady at approximately 0.02 percentage points within the target temperature range of 283 K to 373 K. Real-time imaging shows that the proposed method improves image quality better than traditional techniques.

• Transactions on Electrical and Electronic Materials
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• 제18권1호
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• pp.35-41
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• 2017

This study looks at optimizinge light redistribution to improve the overall illuminance uniformity of commercial IRED modules. To obtain uniform illumination over a prescribed rectangular area, a freeform surface lens was evaluated using TracePro. The LED light overall illuminance uniformity regulated in KSC 7658 was verified using Relux software. Experimental test results showed 0.81 overall illuminance uniformity for rectangular light distribution of LED lights having a radiation angle of $80^{\circ}$. After fabricating prototype IRED lights based on these simulation results, illuminance performance was observed when used as actual IRED lighting with a nighttime CCTV system. Image observation photographs of the prototype $80^{\circ}$ rectangular IRED lights confirmed that object images can be seen clearly owing to high overall illuminance uniformity, and that dark regions of the CCTV screen were not shown.

• Journal of the Korean Data and Information Science Society
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• 제15권1호
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• pp.119-127
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• 2004

To test uniformity of a population, we modify the test statistic based on the sample entropy in the literature, and establish its limiting distribution under weaker conditions, which improves the existing results. It is also to study the proposed test statistic based on Vasicek's entropy estimator is consistent.

• Journal of the Korean Data and Information Science Society
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• 제9권2호
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• pp.237-246
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• 1998

지금까지 알려진 의사난수 생성기에서는 혼합 합동 생성기, 승산 합동 생성기, 유니버셜 난수 생성기, 역함수 합동 생성기, 양의 역함수 난수 생성기 등 여러 가지가 있다. 이러한 의사난수 생성기에 대하여 각각 20, 40, 60, 80, 100개의 자료를 생성하여 유의수준(${\alpha}$) 0.1, 0.05, 0.01 기준으로 10,000번의 시행 과정을 통하여 난수의 특성인 일양성과 독립성을 만족하는지를 검정하였다.

• 한국지반환경공학회 논문집
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• 제14권3호
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• pp.13-17
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• 2013

Determination of geotechnical characteristics of soil is either to use the field samples to measure the characteristics of soil through laboratory test or measuring the characteristics directly in the field. Field test can be derived similar value by considering characteristics of site and laboratory test can be confirmed the characteristic of soil by testing with field samples. This article describes relative density as the measure of compaction for cohesionless soils and presents several simple and mathematical relationships to help engineers estimate needed parameters for relative density calculations. The main purpose of this research is to investigate possible correlations between coefficient of uniformity, coefficient of curvature, maximum and minimum void ratio, mean grain size. Results show a linear relationship between the minimum and maximum void ratios and a power function relationship between coefficient of uniformity and the limiting void ratios. Void ratio range, which is the difference between the maximum and minimum void ratios, appeared to be log normally distributed but showed no simple mathematical fit to the data. these results were shown to help engineers estimate needed parameters for relative density calculations.

• Journal of Pharmaceutical Investigation
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• 제6권2호
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• pp.58-68
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• 1976

120 tablets of 25mg phenformin hydrochloride tablet and 4mg chlorpheniramine maleate tablet, respectively, were assayed and analyzed to obtain basic data on the content uniformity of domestic pharmaceuticals. All of the tablets of phenformin hydrochloride and that of chlorpheniramine maleate were met the requirements of the test for weight variation and content but no regularity was found in the content unformity specifications. In case of chlorpheniramine maleate tablets, standard deviation of active ingredient content of B maker was 4.1% and that of C maker 7.1%.

• 대한원격탐사학회지
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• 제26권6호
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• pp.645-652
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• 2010

The performance of the payload Electro-Optical System (EOS) in satellite system is affected by various factors, such as optics design, camera electronics design, and the characteristics of the CCD (Charge Coupled Device) used, etc. Of these factors, the camera electronics design is somewhat unique in that its operational parameters can be adjusted even after the satellite launch. In this paper, the effect of video gain on the non-uniformity correction performance is addressed. And a new optimal non-uniformity correction scheme is proposed and analyzed using the data from real camera electronics unit based on a TDI (Time Delayed Integration) type of CCD. The test results show that the performance of the conventional non-uniformity correction scheme is affected significantly when the video gain is added. On the other hand, in our proposed scheme, the performance is not dependent on the video gain. The insensitivity of the non-uniformity performance on the video-gain is mainly due to the fact that the correction is performed after the dark signal is subtracted from system response.