• Title/Summary/Keyword: ultrasonic cleaning

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Study on Aluminum Frame Surface Cleaning Process for Photomask Pellicle Fabrication (포토마스크 펠리클 제조를 위한 Aluminum Frame 표면 세정공정 연구)

  • Kim, Hyun-Tae;Kim, Hyang-Ran;Kim, Min-Su;Lee, Jun;Jang, Sung-Hae;Choi, In-Chan;Park, Jin-Goo
    • Korean Journal of Materials Research
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    • v.25 no.9
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    • pp.462-467
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    • 2015
  • Pellicle is defined as a thin transparent film stretched over an aluminum (Al) frame that is glued on one side of a photomask. As semiconductor devices are pursuing higher levels of integration and higher resolution patterns, the cleaning of the Al flame surface is becoming a critical step because the contaminants on the Al flame can cause lithography exposure defects on the wafers. In order to remove these contaminants from the Al frame, a highly concentrated nitric acid ($HNO_3$) solution is used. However, it is difficult to fully remove them, which results in an increase in the Al surface roughness. In this paper, the pellicle frame cleaning is investigated using various cleaning solutions. When the mixture of sulfuric acid ($H_2SO_4$), hydrofluoric acid (HF), hydrogen peroxide ($H_2O_2$), and deionized water with ultrasonic is used, a high cleaning efficiency is achieved without $HNO_3$. Thus, this cleaning process is suitable for Al frame cleaning and it can also reduce the use of chemicals.

A Study on the Cleaning of AISI 304 Stainless Steel Surface for Gold Plating (금도금을 위한 AISI 304 스테인레스강 표면의 세정)

  • 한범석;장현구
    • Journal of the Korean institute of surface engineering
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    • v.28 no.1
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    • pp.23-33
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    • 1995
  • AISI 304 stainless steel has high resistance to corrosion due to the presence of a self-healing chromium oxide film on the surface, which also accounts for the difficulty in plating. Surface cleaning of this alloy is of fundamental importance in gold plating since its effectiveness puts an upper limit on the quality of the final coating. The cleaning of AISI 304 stainless steel was investigated with elimination of artificial passive oxide film and degreasing of remaining buffing wax as stearic acid. The familiar cleaning methods i.e. ultrasonic cleaning, electro-cleaning and activation treatment were fabricated in this study. Activation treatment showed best cleaning efficiency for elimination of passive oxide film among these methods, which was also confirmed by AES (Auger electron spectrometer) analysis. However, the best condition of cleaning was obtained by combining these methods. Electrocleaning time, for degreasing the stearic acid layer, was decreased with increasing amount of added KCN.

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The Effect of Temporary Cement Cleaning Methods on the Retentive Strength of Cementation Type Implant Prostheses (임시 시멘트 제거방법이 시멘트 유지형 임플란트 보철물의 유지력에 미치는 영향)

  • Shin, Hwang-Kyu;Song, Young-Gyun;Shin, Soo-Yeon
    • Journal of Dental Rehabilitation and Applied Science
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    • v.27 no.2
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    • pp.125-140
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    • 2011
  • The remnant of temporary cement on the intaglio surface of cast restoration may have a negative effect on the retentive strength of permanent cement. This study was to evaluate the effect of temporary cement cleaning methods on the retentive strength of cementation type implant prostheses. Prefabricated implant abutments - height 5.5mm, diameter 4.5mm, 6 degree axial wall taper with chamfer margins were used. Forty copings-abutment specimens were divided into four groups(each n=10) according to the cleaning methods for temporary cement(Temp-$Bond^{(R)}$) as follows : no temporary cementation(the control group), orange solvent, ultrasonic cleaning, air borne-particle abrasion. After the application of temporary cement and the separation, the cleaning procedure was performed according to the protocol of each group. The specimens were cemented with $Premier^{(R)}$ Implant $Cement^{TM}$. After the permanent cementation, the specimens were subjected to thermocycling and pulled out from the specimens with a universal testing machine at a cross-head speed of 0.5mm/min. After the retentive strength test, all the specimens were cleaned using ultrasonic cleaning, abraded with air borne-particles, and steam-cleaned. Likewise, the specimens were temporarily cemented(Temp-$Bond^{(R)}$ NE), cleaned according to the protocol of each group, cemented with $Premier^{(R)}$ Implant $Cement^{TM}$ and subjected to thermocycling and measurement of their retentive strength. The mean of group with orange solvent were significantly lower than those of other groups(p<0.05). There was no significance between group with ultrasonic cleaning and group with air borne-particle abrasion. Group with ultrasonic cleaning and group with air-particle abrasion were no significance at control group. There was no significance between group cemented with Temp-$Bond^{(R)}$ and group cemented with Temp-$Bond^{(R)}$ NE. Within the limitation of this study, it can be concluded that the temporary cement cleaning method with only orange solvent may have a negative effect on the retentive strength of permanent cement. Ultrasonic cleaning and air borne-particle abrasion methods are recommended for the temporary cement cleaning method on cementation type implant prostheses.

Study on the Cleaning Screen Printing using Alternative Cleaning Solvent of 1,1,1-TCE, CFC-113 (1,1,1-TCE, CFC-113 대체세정제를 이용한 스크린인쇄 세정연구)

  • Lee, Ki-Chang;Yoon, Cheol-Hun;Hwang, Sung-Kwy;Oh, Se-Young;Lee, Seok-Woo;Ryu, Jung-Wok
    • Journal of the Korean Applied Science and Technology
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    • v.14 no.2
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    • pp.115-122
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    • 1997
  • The field of printing use to pressurization ink using screen gassamer that is called screen printing. Existing cleaning solvent using screen printing are the organic solvents including aromatic compounds carried with poisonous and stench. Besides, cleaning method of current screen printing are for the most part mixed cleaning method of dipping and polish. Using 1,1,1-TCE, CFC-113 alternative system cleaning solvent be substituted for existing cleaning solvent against screen printing ink measured the cleaning efficiency according to gravimetric analysis method and property change of gassamer according to Image Analyzer. Also, Cleaning process system carry with excellent cleaning efficiency studied which was proposed new cleaning process including ultrasonic and vibration cleaning process be substituted for existing mixed cleaning method of dipping and polish.

A Study on the Effectiveness of Remanufacturing Technology for the Diesel Oxidation Catalyst(DOC) Deactivated by Diesel Exhaust Gas (경유차 매연저감장치에 의해 비활성화된 DOC촉매의 재제조 효과에 관한 연구)

  • Park, Hea-Kyung
    • Clean Technology
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    • v.16 no.4
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    • pp.265-271
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    • 2010
  • The deactivated diesel oxidation catalyst(DOC) was remanufactured by ultrasonic wave treatment with various solutions, followed by active component re-impregnation. The catalytic performance and surface properties of remanufactured DOC were studied at various remanufacturing conditions. The proper ultrasonic-wave cleaning time at various solutions and optimal re-impregnation amounts of active component for the best catalytic performance were investigated. The catalytic performance tests on the conversions of CO and THC(total hydrocarbon) were also carried out at various temperatures by catalytic reaction test unit using bypass gas from the diesel engine dynamo system. It was found that the catalytic performance of DOC remanufactured with the high-temperature air washing, ultrasonic wave cleaning at acidic/basic solutions and active component re-impregnation method was recovered to 90% level of its activity compared to that of the fresh DOC, which was caused by removing the deactivating materials from the surface of the DOC through the analyses of catalyst performance test and their characterization by Optical microscope, EDX, ICP, TGA, and porosimeter.

Evaluation of Cleaning Method for Remanufacturing Using Start Motor of Vehicle (차량용 스타트모터를 활용한 재제조 세척방법 평가)

  • Park, Sang Jin;Son, Woo Hyun;Jeon, Chang Su;Mok, Hak Soo
    • Journal of the Korean Society of Industry Convergence
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    • v.23 no.3
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    • pp.381-392
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    • 2020
  • The necessity and the importance of the remanufacturing are increasing day by day along with environmental problems. Many studies are being conducted on remanufacturing, but the research for cleaning is much lacking. This study aims to evaluate the effective cleaning method for remanufacturing of start motors, one of the automobile parts. The cleaning process consists of oil stain removal, drying and rust removal processes. In this study, the two processes were conducted except for the drying process which has little influence on cleaning. The methodology for cleaning agent selection, degreasing and rust removal process was presented. For each methodology, five analysis factors were calculated by two-way comparison according to the process, and the values were evaluated quantitatively by substituting them into the evaluation table. In the selection of cleaning agent, neutral system, ultrasonic cleaning in degreasing, and grinding in rust removal were selected as the best cleaning methods.

Evaluation of removal forces of implant-supported zirconia copings depending on abutment geometry, luting agent and cleaning method during re-cementation

  • Rodiger, Matthias;Rinke, Sven;Ehret-Kleinau, Fenja;Pohlmeyer, Franziska;Lange, Katharina;Burgers, Ralf;Gersdorff, Nikolaus
    • The Journal of Advanced Prosthodontics
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    • v.6 no.3
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    • pp.233-240
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    • 2014
  • PURPOSE. To evaluate the effects of different abutment geometries in combination with varying luting agents and the effectiveness of different cleaning methods (prior to re-cementation) regarding the retentiveness of zirconia copings on implants. MATERIALS AND METHODS. Implants were embedded in resin blocks. Three groups of titanium abutments (pre-fabricated, height: 7.5 mm, taper: $5.7^{\circ}$; customized-long, height: 6.79 mm, taper: $4.8^{\circ}$; customized-short, height: 4.31 mm, taper: $4.8^{\circ}$) were used for luting of CAD/CAM-fabricated zirconia copings with a semi-permanent (Telio CS) and a provisional cement (TempBond NE). Retention forces were evaluated using a universal testing machine. Furthermore, the influence of cleaning methods (manually, manually in combination with ultrasonic bath or sandblasting) prior to re-cementation with a provisional cement (TempBond NE) was investigated with the pre-fabricated titanium abutments (height: 7.5 mm, taper: $5.7^{\circ}$) and SEM-analysis of inner surfaces of the copings was performed. Significant differences were determined via two-way ANOVA. RESULTS. Significant interactions between abutment geometry and luting agent were observed. TempBond NE showed the highest level of retentiveness on customized-long abutments, but was negatively affected by other abutment geometries. In contrast, luting with Telio CS demonstrated consistent results irrespective of the varying abutment geometries. Manual cleaning in combination with an ultrasonic bath was the only cleaning method tested prior to re-cementation that revealed retentiveness levels not inferior to primary cementation. CONCLUSION. No superiority for one of the two cements could be demonstrated because their influences on retentive strength are also depending on abutment geometry. Only manual cleaning in combination with an ultrasonic bath offers retentiveness levels after re-cementation comparable to those of primary luting.

A Study on Process Simulation Analysis of the Water Jet Cleaning Robot System for Micro Drill-bits (마이크로 드릴비트의 워터젯 세척 로봇시스템의 공정 시뮬레이션 분석에 관한 연구)

  • Kuk, Youn-Ho;Park, Sang-Rok;Park, Kee-Jin;Choi, Hyun-Jin
    • Korean Journal of Computational Design and Engineering
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    • v.20 no.3
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    • pp.291-297
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    • 2015
  • A water jet cleaning robot system for micro drill bits is to refurbish micro drill bits used for the PCB manufacturing process. It can refurbish drill bits with the minimum diameter of ${\phi}0.15{\sim}0.075mm$ of which the total quantity have been discarded before. Micro drill bits with the minimum diameter of ${\phi}0.075mm$ can be cleaned by applying the water jet cleaning robot system out of the manual ultrasonic cleaning in the past for the cleaning equipment as the initial process in refurbishing. This study analyzed problems, while applying the apparatus mechanism for the workability such as the robot traces of Transfer Robot I and II, drill bit loading and unloading, and cleaning tasks in the water jet cleaning robot system in an effort to carry out simulations. In addition, the cleaning work process was optimized as the work process was verified in advance and the production quantity was analyzed through simulations.

Reuse of HPLC Guard Column by Ultrasonic Cleaning

  • Lee, Byung-Dae
    • Journal of the Korean Applied Science and Technology
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    • v.33 no.3
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    • pp.459-465
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    • 2016
  • This study investigated reusability of costly guard column by ultrasonic. It also investigated various effects that affect to guard column generation by ultrasonic. When investigated 30 KHz of frequency, area of ascorbic acid is 73.0% compared to unused guard column. As a result of investigation of effect of pH, guard column by ultrasonic is effective at alkali area. As a result of investigation of solvent effect, when ethanol is used, generation rate is 81.9% as of peak area compared to the case of analysis in un used column. From the result, it indicates that regenerated guard by ultrasonic is reusable.