• Proceedings of the Korean Society of Precision Engineering Conference
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1883-1886
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• 2005

In this paper, a decoupled dual servo (DDS) stage for ultra-precision scanning system with large working range is introduced. In general, dual servo systems consist of a fine stage for short range and a coarse stage for long range. The proposed DDS also consists of a $XY\theta$ fine stage for handling and carrying workpieces and one axis coarse stage. Its coarse stage consists of air bearing guide system and a coreless linear motor with force ripple. The fine has four voice coil motors(VCM) as its actuator. According to a VCM's nature, there are no mechanical connections between coils and magnetic circuits. Moreover, VCM doesn't have force ripples due to imperfections of commutation components of linear motor systems - currents and flux densities. However, due to the VCM's mechanical constraints the working range of the fine is about $25mm^2$. To break that hurdle, the coarse stage with linear motors is used to move the fine about 500mm. Because of the above reasons, the proposed DDS can achieve higher precision scanning than other stages with only one servo. With MATLAB's Sequential Quadratic Programming (SQP), the VCMs are optimally designed for the highest force under conditions and constraints such as thermal dissipations due to its coil, its size, and so on. And for their movements without any frictions, guide systems of the DDS are composed of air bearings. To get precisely their positions, a linear scale with 5nm resolution are used for the coarse stage's motion and three plane mirror laser interferometers with 5nm for the fine's $XY\theta$ motions. With them, on scanning the two stages have same trajectories. The control algorithm is named Parallel method. The embodied ultra-precision scanning system has sub 100nm following error and in-positioning stability.

• Transactions of the Korean Society of Mechanical Engineers A
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• 제22권2호
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• pp.372-379
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• 1998

A new 6 degrees-of-freedom micro stage, based on parallel mechanisms and actuated by using piezoelectric elements, has been developed for the application of micro positioning such as semiconductor manufacturing devices, high precision optical measurement systems, and high accurate machining. The micro stage structure consists of a base platform and an upper platform(stage). The base platform can effectively generates planar motion with yaw motion, while the stage can do vertical motion with roll and pitch motions with respect to the base platform. This separated structure has an advantage of less interference among actuators. The forward and inverse kinematics of the micro stage are discussed. Also, through linearization of kinematic equations about an operating point on the assumption that the configuration of the micro stage remains essentially constant throughout a workspace is performed. To maximize the workspace of the stage relative to fixed frame, an optimal design procedure of geometric parameter is shown. Hardware description and a prototype are presented. The prototype is about 150mm in height and its base platform is approximately 94mm in diameter. The workspace of the prototype is obtained by computer simulation. Kinematic calibration procedure of the micro stage and its results are presented.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.818-821
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• 2004

With a rapid development in the area of micro and ultra precision technology, the micro surface machining of small size parts are explosively increased. Especially, to improve efficiency of various beams in lens and reflector, non-rotational symmetric form and several mm level heights changeable surface can be machined at a time. These geometric complex 3D surface cannot be machined by general short stroke FTS. The long stroke FTS if firmly needed to move directly several mm and have nm level positioning accuracy for the complex surface form. The long stroke FTS used linear motors to drive moving unit long and fine, aero static bearings to decrease friction and moving errors in guide way, optical linear scale with nm level resolution to measure position of FTS. Furthermore, to increase the performance of acceleration of FTS, the light material, such as AL is used for the structure and the high stiffness box type structure is selected. In this paper, the genetic algorithm approach is described to determine a set of design parameters for auto tuning. The authors have attempted to model the design problem with the objective of minimizing the error, such as variable pattern change. This method can give the better alternative than existing other method.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.690-693
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• 2003

Soft x-ray microscopy provides a unique set of capabilities in-between those of visible light and electron microscopy. It has long been recognized that nature provides a 'water window' spectral region between the K shell x-ray absorption edges of carbon (~290eV) and oxygen (~540eV), where organic materials show strong absorption and phase contrast, while water is relatively non-absorbing. This enables imaging of hydrated biological specimens that are several microns thick with high intrinsic contrast using x-rays with a wavelength of 2.3~4.4nm. Soft X-ray microscopy is therefore well suited to the study of specimens like single biological cells. The most direct advantage of X-ray microscope is their high spatial resolution when compared with visible light microscopes, combined with an ability to image hydrated specimens that are several microns with a minimum of preparation. Our study describes the conceptual design of soft x-ray microscope system based on a laser-based source for biomedical application with high resolution ($\leq$50nm) and short exposure time ($\leq$30sec).

• Journal of the Korean Society of Manufacturing Technology Engineers
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• 제23권4호
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• pp.361-367
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• 2014

Ultra-precision positioning plays a crucial role in emerging technologies such as electronics, bioengineering, optics, and various nanofabrication technologies. As a result, various nanopositioning methods have been presented. In particular, nanopositioning using a flexure mechanism and piezo-electric actuator is one of the most valuable methods because of its friction-free motion and subnanometer-scale motion resolution. In this study, a rotational nanoactuator based on a right-circular flexure mechanism and piezo-electric actuator was developed through a consideration of the kinematics and structural deformation. An experimental setup was constructed to verify the performance expectation. Consequently, it was demonstrated that the developed system had a maximum rotational angle of about 0.01 rad, as well as sufficient linearity with respect to the input voltage.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 한국공작기계학회 2004년도 추계학술대회 논문집
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• pp.213-218
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• 2004

As optical fiber communication grows, the fiber alignment become the focus of industrial attention. This greatly influence the overall production rates for the opto-electric products. We proposed multi-axis nano positioning stage for optical fiber alignment. This device has 3 DOF translation and sub nanometer resolution. This nano stage consist of 3 PZT-driven flexure stages which are stacked parallel. The displacement of it is measured with capacitance gauge and is controlled by computer-embedded main controller. The design process of flexure stage using FEM is proposed and the performance evaluation of this system is verified with experiments.

• Proceedings of the KIEE Conference
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• 대한전기학회 2007년도 심포지엄 논문집 정보 및 제어부문
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• pp.221-222
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• 2007

본 논문에서는 초정밀 위치 결정 시스템에서 보다 정확한 제어를 위한 새로운 제어기를 설계한다. 외란을 고려한 시스템의 경우, 환경이 달라질 때마다 측정 노이즈를 정확하게 알아내기란 쉽지 않다. 따라서 측정 장치의 정확성을 나타낼 수 있도록 칼만 필터추정기와 퍼지 이론을 이용하여 정확한 측정 오차값을 구한다. 이때, 파라미터 불확실성과 의란에 강인한 제어를 위해 슬라이딩 모드 제어기와 LQ 최적 제어기가 적용된다. 최종적으로, 제안된 제어기와 시간 최적 제어기의 성능비교를 통하여 보다 강인하고 안정된 성능개선을 증명한다.

• Transactions of the Korean Society of Automotive Engineers
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• 제2권3호
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• pp.33-39
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• 1994

The purpose of this research is to examine precise linear motion and rotary motion. A six-degrees-of-freedom fine motion mechanism is introduced to drive an object precisely in directions of X, Y and Z-axes and around them : three rectangular linear motion and rotary ones. An experimental mechanism is introduced in which a $70$\times$70$\times$70$\times$(${mm}^3$) cube object is driven by six PZT actuator. The study is to establish the six-degrees-of-freedom fine motion mechanism of linear motion and rotary motion using PZT actuator.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 한국해양정보통신학회 2010년도 춘계학술대회
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• pp.725-727
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• 2010

For simulation of Boat motion, pitch, motion element of roll and yaw direction could simulated. The combination of the marine use various multi sensor surveillance system technology with the development of servo motion control algorithm and gyro sensor in six freedom motion is implemented to analyze the movement response. The stabilization of the motion control is developed and Nano driving Precision Pan-Tilt/Gimbal system is obtained from the security positioning cameras with ultra high speed device is used to carry out the exact behavior of the device.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 한국소음진동공학회 2005년도 추계학술대회논문집
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• pp.75-78
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• 2005

In this paper, an experimental study on porous air bearing stiffness for ultra precision positioning system was performed. In general manufacturer provide bearing stiffness under specific air pressure, but the air pressure used in the field is different. Therefore it is necessary to know the stiffness of air bearing under the pressure used in the field. In order to know that, experimental device which can realize actual operating conditions was made. Using this device, static and dynamic stiffness of air bearing can be obtained. As a result, displacement error occurred around 1 $\mu$m at recommended load.