• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.818-821
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• 2004

With a rapid development in the area of micro and ultra precision technology, the micro surface machining of small size parts are explosively increased. Especially, to improve efficiency of various beams in lens and reflector, non-rotational symmetric form and several mm level heights changeable surface can be machined at a time. These geometric complex 3D surface cannot be machined by general short stroke FTS. The long stroke FTS if firmly needed to move directly several mm and have nm level positioning accuracy for the complex surface form. The long stroke FTS used linear motors to drive moving unit long and fine, aero static bearings to decrease friction and moving errors in guide way, optical linear scale with nm level resolution to measure position of FTS. Furthermore, to increase the performance of acceleration of FTS, the light material, such as AL is used for the structure and the high stiffness box type structure is selected. In this paper, the genetic algorithm approach is described to determine a set of design parameters for auto tuning. The authors have attempted to model the design problem with the objective of minimizing the error, such as variable pattern change. This method can give the better alternative than existing other method.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.11
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• pp.52-58
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• 2007

A cutting device capable of generating various shapes of the cyclic elliptical trajectory of a cutting tool was proposed and micro v-grooving experiments were performed to investigate the characteristics of elliptical vibration cutting (EVC). The proposed cutting device is comprised of a pair of parallel piezoelectric actuators with which harmonic voltages of varying phase difference and magnitude are supplied, creating various shapes of the elliptical tool path. The attributes of the elliptical locus involving the direction of the axis of an ellipse, the rotational direction and amplitudes of a trajectory were fine-tuned for stable operation of the EVC. The EVC characteristics performed with brass and copper revealed reduction in the cutting resistance and suppression of burr formation, resulting in the enhancement of form accuracy of machined micro-features. While the effect of the EVC increases with the increase of excitation frequency and the amplitude, it is found that a change in the cutting force decreases as the amplitude of an elliptical locus increases.

• Composites Research
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• v.33 no.5
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• pp.262-267
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• 2020

With increasing demands for high-speed machining and lightweight design of machine tools, increasing likeliness of generation of machine tool spindle vibrations has become an important issue. Spindle vibration has a significant impact on the surface finish of the workpiece in ultra-precision machining. It is necessary to resolve the machine tool spindle vibration in various machining processes to improve machining accuracy. In this paper, a TiC-SKH51 metal-matrix composite was used to suppress the vibration of the machine tool spindle. To confirm the dynamic characteristic of the TiC-SKH51 composite, impact hammer tests were conducted. After verifying the reliability of a finite element analysis (FEA) by comparing the results of the impact hammer test with the modal analysis using FEA, the analysis of the machine tool spindle model was performed. The FEA results show that the TiC-SKH51 composite applied machine tool spindle can be utilized to suppress the vibration generation.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.16 no.7
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• pp.4405-4410
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• 2015

Two-dimensional displacements are obtained from the sandwiched patterns, which superpose two linearly-periodic patterns orthogonally, respectively. The transparent top pattern is identified by deflection of the laser beam due to a difference of refractivity and the opaque bottom pattern is identified by deviation of the beam intensity due to a difference of reflectance. In the sample setup, the top pattern made up of build-up film is manufactured by UV laser machining and the bottom pattern is manufactured by ultra-precision trench machining and deposition for aluminum plate. The proposed decoding method is verified experimentally using the $10{\mu}m$ equally spaced sample patterns and the devised optical system. The Korea Academia-Industrial cooperation Society.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.19 no.2
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• pp.267-274
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• 2010

Recently, the magnetorheological (MR) polishing process has been examined as a new ultra-precision polishing technology for mirror surface generation in many applications, such as aspheric lenses, biochips, micro parts, etc. This method uses MR fluids which contains micro abrasives as a polishing media, and can. It is possible to obtain nano level surface roughness under suitable process conditions, however, required polishing time is highly dependent on the applied pre-polishing methods due to its very small material removal rate. Thus, in this study, a combined polishing method is presented to reduce total polishing time for SUS304. First, the electropolishing (EP) method was applied to obtain fine surface roughness, and the MR polishing was followed. Surface roughness variations were investigated according to the process conditions. As the results of this study, it was possible to reduce total polishing time for SUS304 using the proposed combined polishing method.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.13 no.5
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• pp.64-69
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• 2014

This article presents machining experiments to assess the relationship between the profile accuracy and the workpiece hardness using a natural diamond tool on an ultra-precision diamond turning machine. The study is intended to secure a corner cube prism pattern for reflective film capable of high-quality outcomes. The optical performance levels and edge images of corner cubes having various hardness levels of the copper-coated layer on a carbon steel plate are analyzed. The hardness of the workpiece has a considerable effect on the profile accuracy. The higher the hardness of the workpiece, the better the profile accuracy and the worse the edge wear of the diamond tool.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.2 no.1
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• pp.63-68
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• 2003

The aspherical lenses are used as objective lens of optical pickup. To examine the design factor the sample product is made before manufacturing of injection mould of lens. The optimum cutting condition of PMMA lens sample with ultra precision SPDT, the roam spindle speed, the depth of cut, the feedrate are found. The demanded surface roughness 100m Ra, aspherical form error $0.5{\mu}m$ P-V for aspherical lens of optical data storage device are satisfied.

• Journal of Institute of Control, Robotics and Systems
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• v.15 no.8
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• pp.798-803
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• 2009

This paper proposes a grating scanner which is driven by a stack-type piezoelectric element. The mechanism of the grating scanner is based on flexure hinges. Using some constraints, the compliant mechanism is designed and then verified by Finite Element Analysis. The designed compliant mechanism is manufactured by wire electro-discharge machining, and then integrated with a stack-type piezoelectric element for actuation and a capacitance displacement sensor for measuring ultra-precision displacement. Experiments demonstrates the characteristics and the performances of the grating scanner using the terms of working range, resonance frequency, bandwidth and resolution. The grating scanner is applicable to a Moire interferometry for measuring 3-dimensional microscopic surface.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.11 no.1
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• pp.1-6
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• 2012

The polishing of silicon wafers has an important role in semiconductor manufacturing. Generally, getting a flat surface such as a mirror is the purpose of the process. The wafer surface roughness is affected by many variables such as the characteristics of the carrier head unit, operation, speed, the pad and slurry temperature. Optimum process conditions for experimental temperature, pH value, down-force, slurry ratio are investigated, time is used as a fixed factor. This study carried out a series of experiments at varying platen, chuck rpm and oscillation cpm taking particular note of the difference between the rpm and the affect it has on the surface roughness. In this experiment determine the optimum conditions for polishing silicone wafers.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.7 no.4
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• pp.96-101
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• 2008

Due to improve form accuracy and surface roughness of a aspheric lens core that is made of Ni, the study is carried out on localization about a Subminiature Optics of Proximity and Wide Field of View. The required form accuracy P-V $0.2{\mu}m$ and surface roughness is Ra 10 nm. The design of experiment(DOE) is adopted to find a optimal cutting conditions which are spindle speed, depth of cut, feedrate. Finally, the effects of this study are replacing importation and strengthening competitiveness through the localization of the Subminiature Optics of Proximity and Wide Field of View.