• 한국정밀공학회지
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• 제28권3호
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• pp.275-284
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• 2011

The accuracy simulation technology of linear motion system is introduced in this paper. Motion errors and positioning errors are simulated using informations on the design parameters of elements of linear motion system. 5 Degree-of-freedom motion error analysis algorithm utilizing the transfer function method and positioning error analysis algorithm which are main frame of accuracy simulation are introduced. Simulated motion errors are compared with experimental results for verifying the effectiveness. Then, using the proposed algorithms, simulation is performed to investigate the effects of ballscrew and linear motor on the motion errors. Finally, the influence of feedback sensor position on the positioning error is also discussed.

• 한국정밀공학회지
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• 제21권11호
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• pp.117-124
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• 2004

Recently, nano-methodology is increasingly important as the ruler for measuring nano-technology, and we applied the linear encoder to nano-methodology. The quadrature output in the linear encoder has an effect on increasing the resolution in some techniques. Already, various interpolation techniques based on the quadrature signal have applied to the precision servo system. In this paper, we propose a new interpolation algorithm for ultra-precision positioning in the low speed with simulation by MATLAB SIMULINK. This method modified previous methods and was properly designed for some given control system. To verify, we first fulfilled the encoder signal test to find main parameters fer the signal transformation, then we proved the proposed interpolation algorithm by experiments, which show that the result of the interpolation algorithm corresponds with the measurement of the laser interferometer in 100 nm unit approximately. In addition, we can get more precise measurement by more accurate and noise-free signal. So we need to compensate imperfections in the encoder signal. After that, we will apply this algorithm to nano positioning system.

• 한국정밀공학회지
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• 제21권12호
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• pp.174-181
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• 2004

Ultra precision positioning mechanism has widely been used on semiconductor manufacturing equipments, optical spectrum analyzer and cell manipulations. Ultra precision positioning mechanism is consisted of several actuators, sensors, guides and control systems. Its efficiency depends on each performance of components. The object of this study is to design, analysis and manufacture all of the inchworm linear motor system, which is one of the equipments embodied in ultra precision positioning mechanism. Inchworm linear motor system is consisted of a controller system and an inchworm linear motor, and its driving form is similar to a motion of spanworm. A design and manufacture of inchworm linear motor, which is consisted of three PZT actuators, a rod, two columns and a guide plate, are performed. Minimizing the von-Mises stress of the hinge using Taguchi method and simulation by FEM software optimizes the structural design in a column of flexure hinge. The designed columns and guide plates are manufactured by a W-EDM and NC-milling. A controller system, which is an apparatus to drive inchworm linear motor, can easily adjust driving conditions by varying resonance frequency and input-output voltage of actuators and amplifiers. The performance of manufactured inchworm linear motor system is verified and valuated. In the future, inchworm linear motor system will be used to make a more precision positioning by reinforcing a sensor and feedback system.

• Design & Manufacturing
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• 제14권2호
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• pp.56-61
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• 2020

Recently, research for machining next-generation micro semiconductor processes and micro patterns has been actively conducted. In particular, it is applied to various industrial fields depending on the machining method in the case of FIB (Focused ion beam) milling. In this study, intends to deal with FIB milling machining technology for ultra-precision diamond tool fabrication technology. Ultra-precision diamond tools require nano-scale precision, and FIB milling is a useful method for nano-scale precision machining. However, FIB milling has a problem of Gaussian characteristics that are differently formed according to the beam current due to the input of an ion beam source, and there are process conditions to be considered, such as a side clearance angle problem of a diamond tool that is differently formed according to the tilting angle. A series of process steps for fabrication a ultra-precision diamond tool were studied and analyzed for each process. It was confirmed that the effect on the fabrication process was large depending on the spot size of the beam and the current of the beam as a result of the experimental analysis.

• 한국정밀공학회지
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• 제29권8호
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• pp.845-852
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• 2012

The diaphragm-type stylus probe was developed for ultra-precision on-machine measurement (OMM) application. This probe is equipped with two diaphragms which are parallel and one capacitive sensor is used for detecting the vertical motion of end tip in the stylus when it is contacted to the optical freeform surface. For better performance of proposed probes, several design parameters such as axial stiffness and the lateral deformations were investigated with finite element analysis techniques. To verify the feasibility, the profiles of the master sphere ball were measured on the ultra-precision milling machine. The measurement results show that the proposed probe can calculate the radius of the circle within the accuracy of 0.1 ${\mu}m$ for the ultraprecision optical surface.

• 한국정밀공학회지
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• 제29권12호
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• pp.1290-1295
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• 2012

Oblique astigmatism according to the rotation of the eye has to be removed for obtaining peripheral clear vision in ophthalmic lenses. For this reason, we calculated tangential and sagittal power using third-order approximation theory and then controlled conic constant for the difference of the two powers to converge to 0 regardless of the rotation angle of the eye. As a result, an aspherical ophthalmic lens without oblique astigmatism was designed. Also, we found optimal machining condition to the lens material using factorial design and finally fabricated the designed lens through ultra-precision machining with that condition.

• 한국정밀공학회지
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• 제23권1호
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• pp.129-135
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• 2006

In this study, a two-axis ultra-precision stage driven by piezoelectric elements is presented. The stage has a flexure-type parallel linear guide mechanism consisting of quad-symmetric simple parallel linear springs and quad-symmetric double compound linear springs. While the simple parallel linear springs guide the linear motion of a moving plate in the stage, the double compound linear springs follow the motion of the simple parallel linear spring as well as compensate the parasitic motions caused by the simple parallel linear springs. The linear springs are designed by rectangular beam type flexures that are deformed by bending deflection rather than axial extension, because the axial extension is smaller than the bending deflection at the same force. The designed guide mechanism is analyzed by finite element method(FEM). Then two-axis parallel linear stage is implemented by the linear guide mechanism combined with piezoelectric elements and capacitance type displacement sensors. It is shown that the manufactured ultra-precision stage achieves 3 nm of resolution in x- and y-axis within 30 ${\mu}m$ of operating range.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1190-1193
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• 2005

In recent years, as the demands of VBNS and VDSL increase, the development of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM elements increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this paper, the optical alignment characteristics of multi-axis ultra precision stage were studied. The alignment algorithms were studied for applying to the ultra precision multi-axis stage. The alignment algorithm is comprised of field search and peak search algorithms. The contour of optical power signals can be obtained by field search and the precise coordinate can be found out by peak search. Two kinds of alignments, such as 1 ch. input vs. 1 ch. output optical stack, and 1 ch. input vs. 8 ch. output PLC stacks were performed for investigating the alignment characteristics.

• 한국정밀공학회지
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• 제29권10호
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• pp.1056-1061
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• 2012

FEM analysis is essential to shorten the development time and reduce the cost for developing high-performance machine tools. Mount joint parts play important role to ensure static and dynamic stability of machine tools. This paper suggests a computational modeling of mount joint part of machine tools. MATRIX27 element of ANSYS is adopted to model mount joint parts. MATRIX27 allows the definition of stiffness and damping matrices in matrix form. The matrix is assumed to relate two nodes, each with six degrees of freedom per node. Stiffness and damping values of commercial mount products are measured to build a database for FEM analysis. Jack mounts with rubber pad are exemplified in this paper. The database extracted from the experiments is also used to estimate of stiffness and damping of untested mounts. FEM analysis of machine tools system with the suggested mount computational model is performed. Static and dynamic results prove the feasibility of the suggested mount model.

• 한국정밀공학회지
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• 제29권10호
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• pp.1043-1049
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• 2012

The FEM analysis of machine tools is the general analysis process to evaluate machine performance in the industry for a long time. Despite advances in FEM software, because of difficult simplicity of CAD drawing, little experience of joints stiffness modeling and troublesome manual contact area divide for bindings, the industry designers think the FEM analysis is still an area of FEM analysis expert. In this paper, the automation of modeling process with simplicity of drawing, modeling of joints and contact area divide is aimed at easy FEM analysis to enlarge utilization of a virtual machine tools. In order to verify the effects of modeling automation, a slant bed type model with tilting table is analyzed. The results show FEM modeling automation method only needed 45 minutes to complete the whole modeling process, while manual modeling method requires almost one month with 8200 calculations for coordinate transformations and stiffness data input.