• 제목/요약/키워드: tunability

검색결과 155건 처리시간 0.032초

Floating Zone Technique법으로 질소분위기 하에서 성장한 BaZr0.08Ti0.92O3 다결정의 Tunability 및 열처리 효과 (Annealing Effect and Tunability of BaZr0.08Ti0.92O3 Polycrystal Grown in N2 Gas Atmosphere by Floating Zone Technique)

  • 황호병
    • 한국전기전자재료학회논문지
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    • 제17권11호
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    • pp.1178-1185
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    • 2004
  • In the atmosphere of $N_2$ gas, BaZ $r_{0.08}$ $Ti_{0.92}$ $O_3$ polycrystal was grown by floating zone technique using BaZ $r_{0.08}$ $Ti_{0.92}$ $O_3$ ceramics as a feed and SrTi $O_3$(1l0) single cystal as a seed. The dielectric constant and loss at 10 kHz, 100 kHz, and 1 MHz for the as-grown sample were measured as a function of temperature in the temperature range between -10$0^{\circ}C$ and 150 $^{\circ}C$ to find a dielectric peak with frequency dispersion at Curie point. The hysteresis loop showed that the grown sample had very small polarization which was 0-0.01 $\mu$C/$\textrm{cm}^2$ for the applied dc-electric fields from -7 kV/cm to +7 kV/cm. However, the normal hysteresis loop was appeared after oxygen annealing. The electric-field dependence of the dielectric constant for both the as-grown and the post-annealed samples was studied by measuring the dielectric constants as a function of the biased-electric fields and their tunability was figured out from it at room temperature(27 $^{\circ}C$) and cryotemperature( -73$^{\circ}C$). Tunability for the as-grown sample was 51 % and the figure of merit 20.4 at 10kHz with the biased electric-field of 12 kV/cm. The tunability for the grown sample may be increased up to 80 % if the electric field of 25 kV/cm is applied. Tunability for the post-annealed sample was 41 % and the figure of merit 10.3 at 10 kHz with the biased electric-field of 12 kV /cm. Post-annealing improved the crystallinity of the as-grown sample but decreased its tunability.ability.

Highly Tunable Block Copolymer Self-assembly for Nanopatterning

  • 정연식;정재원
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2011년도 춘계학술발표대회
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    • pp.6.1-6.1
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    • 2011
  • Nanoscale block copolymer (BCP) patterns have been pursued for applications in sub-30 nm nanolithography. BCP self-assembly processing is scalable and low cost, and is well-suited for integration with existing semiconductor fabrication techniques. However, one of the major technical challenges for BCP self-assembly is limited tunability in pattern geometry, dimension, and functionality. We suggest methods for extending the degree of tunability by choosing highly incompatible polymer blocks and utilizing solvent vapor treatment techniques. Siloxane BCPs have been developed as self-assembling resists due to many advantages such as high etch-selectivity, good etch-resistance, long-range ordering, and reduced line-edge roughness. The large incompatibility leads to extensive degree of pattern tunability since the effective volume fraction can be easily manipulated by solvent-based treatment techniques. Thus, control of the microdomain size, periodicity, and morphology is possible by changing the vapor pressure and the mixing ratio of selective solvents. This allows a range of different pattern geometry such as dots, lines and holes and critical dimension simply by changing the processing conditions of a given block copolymer without changing a polymer chain length. We demonstrate highly extensive tunability (critical dimension ~6~30 nm) of self-assembled patterns prepared by a siloxane BCP with extreme incompatibility.

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Tunable RF 기기 적용을 위한 ALD-HfO2의 마이크로파 대역 강유전체 특성 고찰 (Study on the Ferroelectric Properties of ALD-HfO2 in Microwave Band for Tunable RF Apparatus)

  • 한상우;이창현;이정해;차호영
    • 전기전자학회논문지
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    • 제22권3호
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    • pp.780-785
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    • 2018
  • 본 논문에서는 tunable RF 기기에 적용이 가능한 $HfO_2$ 강유전체를 활용하여 metal-ferroelectric-metal (MFM) 커패시터를 구현하였으며 마이크로파 대역주파수 까지 전압에 따른 커패시턴스 tunability 특성을 고찰 하였다. 1kHz부터 5GHz 대역에 이르기까지 광범위한 범위의 커패시턴스-전압 특성을 분석하였으며 커패시턴스 tunability는 500 MHz 이상의 주파수에서 2.5 GHz 대역까지 ~3 %의 tunability가 유지되는 것을 확인 하여 마이크로파 주파수 대역에서 ALD $HfO_2$기반 전자 제어 가변 커패시터의 사용 가능성을 입증하였다.

불순물 첨가에 따른 $(Ba,Sr,Ca)TiO_{3}$ 세라믹의 유전특성 (Dielectric Properties of $(Ba,Sr,Ca)TiO_{3}$ Ceramics with Additon of Dopant)

  • 이성갑;이영희;임성수;박인길
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 추계학술대회 논문집 Vol.14 No.1
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    • pp.42-45
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    • 2001
  • $(Ba_{0.6}Sr_{0.4}Ca_{x})TiO_{3}+yZrO_{2}$ wt% (x=0.10, 0.15, 0.20, y=0.5~3.0) specimens were fabricated by the mixed-oxide method and then the structural and dielectric properties as a function of the composition ratio and $ZrO_2$ contents were studied. All BSCT specimens showed dense and homogeneous structure without the presence of the seconds phase. The Curie temperature and the dielectric constant at room temperature decreased with increasing the Ca/Ba composition ratio and $ZrO_2$ content. The BSCT(50/40/10) specimens showed the excellent tunability property. And the tunability were increased with increasing the contents of $ZrO_2$.

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Characterization of BST Thin Films using MgO(100) Buffer Layer for Tunable Device

  • Lee Cheol-In;Kim Kyoung-Tae;Kim Chang-Il
    • Transactions on Electrical and Electronic Materials
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    • 제7권2호
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    • pp.67-71
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    • 2006
  • In this paper, we have investigated the structure and dielectric properties of the $(Ba_{0.6}Sr_{0.4})TiO_3$ (BST) thin films fabricated on MgO(100)/Si substrate by an alkoxide-based sol-gel method. Both the structure and morphology of those films were analyzed by x-ray diffraction (XRD) and atomic force microscope (AFM). For the MgO(100)/Si substrate, the BST thin films exhibited highly (100) orientation. The highly (100)-oriented BST thin films showed high dielectric constant, tunability, and figure of merit (FOM). The dielectric constant, dielectric loss and tunability of the BST thin films annealed at $700^{\circ}C$ deposited on the MgO(100)/Si substrate measured at 10 kHz were 515.9, 0.0082, and 54.3%, respectively.

불순물 첨가에 따른 (Ba,Sr,Ca)$TiO_3$ 세라믹의 유전특성 (Dielectric Properties of (Ba,Sr,Ca)$TiO_3$ Ceramics with Addition of Dopant)

  • 이성갑;이영희;임성수;박인길
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 추계학술대회 논문집
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    • pp.42-45
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    • 2001
  • (Ba$_{0.6-x}$Sr$_{0.4}$Ca$_{x}$)TiO$_3$+yZrO$_2$wt% (x=1.10, 0.15, 0.20, y=0.5~3.0) specimens were fabricated by the mixed and ZrO$_2$ contents were studied. All BSCT specimens contents were studied. All BSCT specimens showed dense and homogeneous structure without the presence of the seconds phase. The Curie temperature and the dielectric constant at room temperature decreased with increasing the Ca/Ba composition ratio and ZrO$_2$ content. The BSCT(50/40/10) specimens showed the excellent tunability property. And the tunability were increased with increasing the contents of ZrO$_2$./TEX>.

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Mesh Patterned High Tunable MIM Capacitor

  • 이영철
    • 한국정보통신학회:학술대회논문집
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    • 한국해양정보통신학회 2008년도 추계종합학술대회 B
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    • pp.640-643
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    • 2008
  • In this work, a novel tunable MIM capacitor with the meshed electrode is proposed first in order to improve the tunability characteristics using fringe fields. The capacitors were fabricated on a low-resistivity Si substrate employing lead zinc niobate (PZN) thin film dielectric. The fabricated capacitor with the meshed electrode, whose line width and spacing was $2.5{\mu}m$, achieved the effective capacitance tunability of 31 % that is higher value of 18.5 % than that of the conventional capacitor with the rectangular-type electrode.

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PZT/Ferrite 합성 세라믹의 전기적.자기적 특성연구 (Electrically and magnetically Characterization for Ferroelectric/Ferrimagnetic ceramics)

  • 김장용;오준학;문병무
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 추계학술대회 논문집 Vol.14 No.1
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    • pp.30-33
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    • 2001
  • This thesis deal with ferroelectric and ferrimagnetic materials, PZT/Ferrite ceramics. We conducted test of magnetical and electrical measurement. From this measurement, We obtained tunability and we can control characteristic impedance($Z_0$) from permeability($\mu$) and dielectric constant($\varepsilon$) for impedance matching in transmission line.

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PZT/Ferrite 합성 세라믹의 전기적.자기적 특성연구 (Electrically and magnetically Characterization for Ferroelectric/Ferrimagnetic ceramics)

  • 김장용;오준학;문병무
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 추계학술대회 논문집
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    • pp.30-33
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    • 2001
  • This thesis deal with ferroelectric and ferrimagnetic materials, PZT/Ferrite ceramics. We conducted test of magnetical and electrical measurement. From this measurement, We obtained tunability and we can control characteristic impedance(Z$_{0}$) from permeability($\mu$) and dielectric constant($\varepsilon$) for impedance matching in transmission line.e.

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