• Title/Summary/Keyword: total deposition

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A study on Improvement of sub 0.1$\mu\textrm{m}$VLSI CMOS device Ultra Thin Gate Oxide Quality Using Novel STI Structure (STI를 이용한 서브 0.1$\mu\textrm{m}$VLSI CMOS 소자에서의 초박막게이트산화막의 박막개선에 관한 연구)

  • 엄금용;오환술
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.13 no.9
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    • pp.729-734
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    • 2000
  • Recently, Very Large Scale Integrated (VLSI) circuit & deep-submicron bulk Complementary Metal Oxide Semiconductor(CMOS) devices require gate electrode materials such as metal-silicide, Titanium-silicide for gate oxides. Many previous authors have researched the improvement sub-micron gate oxide quality. However, few have reported on the electrical quality and reliability on the ultra thin gate oxide. In this paper, at first, I recommand a novel shallow trench isolation structure to suppress the corner metal-oxide semiconductor field-effect transistor(MOSFET) inherent to shallow trench isolation for sub 0.1${\mu}{\textrm}{m}$ gate oxide. Different from using normal LOCOS technology deep-submicron CMOS devices using novel Shallow Trench Isolation(STI) technology have a unique"inverse narrow-channel effects"-when the channel width of the devices is scaled down, their threshold voltage is shrunk instead of increased as for the contribution of the channel edge current to the total channel current as the channel width is reduced. Secondly, Titanium silicide process clarified that fluorine contamination caused by the gate sidewall etching inhibits the silicidation reaction and accelerates agglomeration. To overcome these problems, a novel Two-step Deposited silicide(TDS) process has been developed. The key point of this process is the deposition and subsequent removal of titanium before silicidation. Based on the research, It is found that novel STI structure by the SEM, in addition to thermally stable silicide process was achieved. We also obtained the decrease threshold voltage value of the channel edge. resulting in the better improvement of the narrow channel effect. low sheet resistance and stress, and high threshold voltage. Besides, sheet resistance and stress value, rms(root mean square) by AFM were observed. On the electrical characteristics, low leakage current and trap density at the Si/SiO$_2$were confirmed by the high threshold voltage sub 0.1${\mu}{\textrm}{m}$ gate oxide.

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Reproductive Ecology of the Purple Shell , Rapana venosa (Gastropoda : Muricidae), with Special Reference to the Reproductive Cycle, Depositions of Egg Capsules and Hatchings of Larvae) (피뿔고둥 , Rapana venosa (Gastropoda : Muricidae)의 생식생태 , 특히 생식주기 , 난낭산출 및 유생부생)

  • Eu-Yung Chung;Sung-Yeon Kim
    • The Korean Journal of Malacology
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    • v.9 no.2
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    • pp.1-15
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    • 1993
  • The reproductive ecology of the purple shell, Rapana venosa was investigated by the histological observations on depositions of the egg capsules, and hatching of larvae in the laboratory and the subtidal zone of the vicinity of piung-do, Chollabud-do, west coast of korea, for one year from June 1992 to May 1993. The results are summarized as follows:1. Rapana venosa is dioecious in sex. The ovary is composed of a number of ovarian lobules, and the testis comprises a number of ovarian lobules, and the testis comprises of gonads could be classified into 4 stages in males and 5 stages in females: 1) growing stage(in female subdivided into 2 stages of early and late growing stage). 2)mature stage. 3)spent stage or copulationstage. 4)rdcovering stage. The early growing stage in females of the purple shell was in September through February, late gorwing stage was in October to March, mature stage was in September to January, mature stage was in September to July, copulation stage was in Februaty to June and recovering stage in April to October.3. Spawning occurred 3-4 times at intervals of 1-3 days, and completed within 10 days from the beginning of spawning during the spawning season of the year.4. From the results of laboratory and field observations, egg masses are composed of a number of egg capsules, egg masses are occurred from May to late August, and in mid August depositions of egg mass in composed of 90-113 egg capsules, fecundity in an egg capsule was ranged 984 to 1,241 eggs(average 1,096 egg). Therefore, fecundity in total egg capsules spawned per individual during the spawning season is estimated as approximately 320,000 to 450,000 egges.5. The incubation period during deposition of an egg capsule to hatching larvad tood 17 days at 18.3-20.4%C(water temperature)and 1.021 (specific gravity fo sea water).

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Phenol Removal Using Horseradish Peroxidase(HRP)-Mediated Polymerization Reaction in Saturated Porous Media (다공성 포화 매질에서 효소 중합반응을 이용한 페놀 제거)

  • Kim, Won-Gee;Lee, Seung-Mok
    • Journal of Korean Society of Environmental Engineers
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    • v.30 no.10
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    • pp.984-991
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    • 2008
  • This paper reports experimental results, demonstrating the feasibility of horseradish peroxidase(HRP) and H$_2$O$_2$ to reduce phenol transport in saturated porous media. A laboratory-scale packed column reactor(ID: 4.1 cm, sand-bed height 12 cm) column was utilized to simulate injection of HRP and H$_2$O$_2$ into an aquifer contaminated with phenol. Effluent concentrations of phenol and polymerization products were monitored before and after enzyme addition under various experimental conditions(enzyme dose: 0$\sim$2 AU/mL, [ionic strength]: 5$\sim$100 mM, pH: 5$\sim$9). The concentration of phenol in the column effluent was found to decrease by nearly 90% in the presence of HRP(2 AU/mL) and H$_2$O$_2$ in the continuous flow system at pH 7 and ionic strength 20 mM. The influent phenol was converted in the system to insoluble precipitate, which deposited in pore spaces. The remains were discharged as soluble oligomers. About 8% of total pore volume in column system was decreased by deposition of polymer produced.

Basic Marine Environmental Characteristics of Suspended Sediments in the Inner Shelf Zone off Tae-An Peninsula, West Coast of Korea (한반도 서해 태안반도 연근해 부유퇴적물의 기초 해양환경적 특성)

  • 최진용;박용안
    • The Sea:JOURNAL OF THE KOREAN SOCIETY OF OCEANOGRAPHY
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    • v.1 no.1
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    • pp.46-54
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    • 1996
  • A study on the concentrations of total suspended matters (TSM) and their distribution pattern was conducted off the west coast of Tae-An Peninsula during the spring season. Especially non-destructive and fine-tuned analysis for the size-distribution of suspended matters was made using SPECTREX instrument. Water masses were characterized by the typical tidal front, with vertically homogenous coastal waters and the strong thermoclines on the offshore area. Concentrations of suspended matters were generally less than 10 mg/l, but the concentrations increased up to 25 mg/l at the bottom waters and mid-depth waters. Mean particle size of the suspended matters were generally 5-6$\mu\textrm{m}$ and 8-10$\mu\textrm{m}$ for the fine-grained suspended matters and the coarse-grained suspended matters, respectively. They are considered to be composed dominantly of detrital materials. On the coastal area, landward side of tidal front, bottom sediments can be easily resuspended by the strong tidal currents, and therefore, deposition of suspended materials are thought to be rather limited. On the offshore area, however, suspended sediments mostly supplied from the northern part of the present study area near Kyunggi Bay are thought to be transported southward and/or southwestward along the mid- depth layer of strong thermocline.

Hepatic Fibrosis in Cholesterol and Sodium Cholate Diet-Fed Rats

  • Jeong, Won-Il;Lee, Cha-Soo;Chung, Jae-Yong;Jeong, Da-Hee;Do, Sun-Hee;Noh, Dong-Hyung;Lee, Mi-Na;Kim, Seok-Jae;Jeong, Kyu-Shik
    • Proceedings of the Korean Society of Veterinary Pathology Conference
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    • 2002.11a
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    • pp.132-132
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    • 2002
  • Mostly, hypercholesterolemia has been focused on atherosclerosis and coronary heart disease and can be produced by intake of high cholesterol diet. However, toxic effects of cholesterol itself on liver and relationship between intake of high cholesterol diet and hepatic fibrosis have not been clearly investigated. Male Wistar rats were fed diet supplemented with 1.0 % cholesterol and 0.3 % sodium cholate for 12 weeks. Rats were sacrificed at 0, 3, 6, 9 and 12, respectively. Histopathological and blood chemical studies were performed on these animal sets. Total cholesterol, AST, ALT and LDH levels increased from week 3 and maintained around that level throughout the experiment compared to control. However, TG and albumin levels were the same or lower than those of control. Intake of high cholesterol and sodium cholate diet caused hepatic necrosis, macrophage infiltration, steatosis and fibrosis. Following feeding this diet to rats, hepatic necrosis, macrophage infiltration and steatosis markedly increased throughout the experiment, comparing to control. Collagen deposition and myofibroblasts were detected from at week 9 to 12 in the liver. Mast cell increased in proportion to the degree of hepatic damages. In conclusion, these results suggest that intake of high cholesterol diet is a risk factor on hepatic steatosis and fibrosis as well as atherosclerosis and coronary heart disease. Furthermore, this animal model for hepatic fibrosis can be use for application of anti-fibrogenic agents screening in vivo.

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수질 장기관측자료를 활용한 우리나라의 지하수 수질변동 특성

  • 김규범;이강근
    • Proceedings of the Korean Society of Soil and Groundwater Environment Conference
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    • 2003.04a
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    • pp.94-96
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    • 2003
  • Since 1995, MOCT(Ministry of Construction and Transportation) and KOWACO(Korea Water Resources Corporation) have established the National Groundwater Monitoring Network in South Korea and also MOE(Ministry of Environment) has operated Groundwater Quality Monitoring network. Until 2001, 202 monitoring stations by MOCT and 780 monitoring wells by MOE have been constructed, measured groundwater level and analyzed water samples. Groundwater quality analysis has been conducted two times a year during last 6 years for all monitoring wells. The quality data has about 15 components including pH, COD, Count of Coliform group, and etc.. Trend analysis has been peformed for 6 components(Coliform, pH, COD, NO$_3$-N, Cl and EC) of water quality which are analyzed more than 7 times for total monitoring wells. Two test methods have been used ; Sen's test and Mann-Kendall test. These trend tests have been done at the 0.05 significance level. By the result of Sen's test, Count of Coliform group has either upward or downward trends at 4.3 percent of the monitoring points. pH does at 5.6 percent, COD does at 8.6 percent, Nitrate-Nitrogen does at 13.2 percent, Chloride does at 13.4 percent, and. EC does at 11.6 percent of the monitoring points. The exact causes of the groundwater quality trends are difficult to specify. Notable downward trends in nitrate at many monitoring points may be the result of reduction on some contamination sources. Potential causes include diminished agricultural areas, improvements in sewage treatment and a decrease in atmospheric deposition. Increase in chloride at many monitoring points may be the result of increased non-point source pollution such as road salting and runoff from sprawling paved developments and suburbs.

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Evaluation of Heavy Metal Contamination for Bongam Tidal Flat Sediments in Masan Bay, Korea (마산만 봉암갯벌 퇴적물의 중금속 오염도 평가)

  • Lee, Chan-Won;Jeon, Hong-Pyo;Lee, Sung-Jin
    • Journal of Wetlands Research
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    • v.12 no.3
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    • pp.15-20
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    • 2010
  • The contamination loadings generated in Changwon City are coming into Masan Bay through the Bongam tidal flat except the loadings collected and transferred by sewer lines to the wastewater treatment plant. The recovery of waterbirds, shellfishes, and fishes has been quite well recognized in recent years after the first implementation of Masan Bay TPLM (Total Pollution Loads Management) in Korea. This tidal flat has been conserved by the cooperation of several stakeholders and utilized as an ecosystem field site for in situ education. A large industrial complex has been operated since 1970's, therefore increasing the level of pollutants in estuary and costal sediments, especially by heavy metals. Zinc, copper, and lesd contamination of sediment was revealed at higher level by Clean-up guideline (MOMAF) or heavily polluted level by SQC (USEPA). There was a significant difference between two sites at the 95% confidence level, which implies no homogeneity in the processes of transport and deposition even at 500 m of distance. The heavy metal concentrations in the Bongam sediments have been gradually decreased with comparing the data of 2006, and 2009.

Effects of the Ijintang, Sagoonjatang, and Yuggoonjatang on the Hyperlipidemia induced Rabbits (사군자탕(四君子湯), 이진탕(二陳湯) 및 육군자탕(六君子湯)이 고지혈증(高脂血症)에 미치는 영향(影響))

  • Lee, Seung-Jae;Mun, Byeong-Sun;Kim, Sae-Gil
    • The Journal of Internal Korean Medicine
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    • v.15 no.1
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    • pp.45-59
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    • 1994
  • The present experiments were designed to investigate the effect of Ijntang, Sagoonjatang, and Yuggoonjatang on the hyperlipidemia induced rabbit. In order to control the precise chemical and physical condition, the experimental rabbits were supplied with calory limited food. The Hyperlipidemia rabbits were induced by oral administration of cholesterol (250mg/kg) for 4 weeks. The results were as followings : 1. The hyperlipidemia (control) group increased the concentration of serum glucose to $204.1{\pm}2.63\;mg/dl$ at the 4th. week, however, the other drug administrated groups such as Ijintang, Sagoonjatang, and Yuggoonjatang decreased significantly. 2. The control group increased the concentration of serum totalcholesterol to $299.0{\pm}4.18\;mg/dl$ at the 4th. week, however, the other drug administrated groups Ijintang, Sagoonjatang, and Yuggoonjatang decreased significantly. 3. The control group increased the concentration of serum total lipid to $429.1{\pm}1.72\;mg/dl$ at the 4th. week, however, the other drug administrated groups such as Ijintang, Sagoonjatang, and Yuggoonjatang decreased significantly. 4. The control group increased the concentration of serum triglyceride to $149.3{\pm}3.01\;g/dl$ at the 4th. week, however, the other drug administrated groups such as Ijintang, Sagoonjatang, and Yuggoonjatang decreased significantly. 5. The control group increased the concentration of serum HDL-cholesterol to $83.0{\pm}1.09$\;mg/dl$ at the 4th. week, and, the other drug administrated groups such as Ijintang, Sagoonjatang, and Yuggoonjatang increased significantly. 6. The lipid deposition to the aortic endothelium decreased more at the Yuggoonjatang group than the other groups. According to the above experimental results, Yuggoonjatang is assumed to have a more curative effect against hyperlipidemia than the other drug such as Ijintang and Sagoonjatang.

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Hybrid Water Treatment of Carbon Fiber Ultrafiltration Membrane and Polypropylene Beads Coated Photocatalyst: Effect of Organic Materials in Water Back-flushing (탄소섬유 한외여과막 및 광촉매 코팅 폴리프로필렌 구의 혼성 수처리: 물 역세척 시 유기물의 영향)

  • Park, Jin Yong;Kim, Mi Hyang
    • Membrane Journal
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    • v.22 no.6
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    • pp.415-423
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    • 2012
  • For hybrid water treatment of carbon fiber ultrafiltration and photocatalyst, we used the hybrid module that was composed of photocatalyst packing between tubular membrane outside and module inside. Photocatalyst was PP (polypropylene) bead coated with $TiO_2$ powder by CVD (chemical vapor deposition) process. Water back-flushing of 10 sec was performed per every period of 10 min to minimize membrane fouling for modified solution, which was prepared with humic acid and kaolin. Resistance of membrane fouling ($R_f$) decreased as humic acid concentration changed from 10 mg/L to 2 mg/L, and finally the highest total permeate volume ($V_T$) could be obtained at 2 mg/L, which was the same with the previous results. Then, treatment efficiencies of turbidity and humic acid were above 98.9% and 88.7%, respectively, those did not depend on the humic acid concentration. However, the treatment efficiency of humic acid increased a little as the humic acid concentration increased in the previous results.

The Structural and Optical Properties of GaAs- SiO2 Composite Thin Films With Varying GaAs Nano-particle Size (GaAs 나노입자 크기에 따른 SiO2 혼합박막의 구조적 광학적 특성)

  • Lee, Seong-Hun;Kim, Won-Mok;Sin, Dong-Uk;Jo, Seong-Hun;Jeong, Byeong-Gi;Lee, Taek-Seong;Lee, Gyeong-Seok
    • Korean Journal of Materials Research
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    • v.12 no.4
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    • pp.296-303
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    • 2002
  • For potential application to quantum mechanical devices, nano-composite thin films, consisting of GaAs quantum dots dispersed in SiO$_2$ glass matrix, were fabricated and studied in terms of structural, chemical, and optical properties. In order to form crystalline GaAs quantum dots at room temperature, uniformly dispersed in $SiO_2$matrix, the composite films were made to consist of alternating layers of GaAs and $SiO_2$in the manner of a superlattice using RF magnetron sputter deposition. Among different film samples, nominal thickness of an individual GaAs layer was varied with a total GaAs volume fraction fixed. From images of High Resolution Transmission Electron Microscopy (HRTEM), the formation of GaAs quantum dots on SiO$_2$was shown to depend on GaAs nominal thickness. GaAs deposits were crystalline and GaAs compound-like chemically according to HRTEM and XPS analysis, respectively. From measurement of optical absorbance using a spectrophotometer, absorption edges were determined and compared among composite films of varying GaAs nominal thicknesses. A progressively larger shift of absorption edge was noticed toward a blue wavelength with decreasing GaAs nominal thickness, i.e. quantum dots size. Band gaps of the composite films were also determined from Tauc plots as well as from PL measurements, displaying a linear decrease with increasing GaAs nominal thickness.