• 제목/요약/키워드: total deposition

검색결과 624건 처리시간 0.025초

기상반응(CVD)법 의한 실리카 미분말의 제조 (Preparation of Ultrafine Silica Powders by Chemical Vapor Deposition Process)

  • 최은영;이윤복;신동우;김광호
    • 한국재료학회지
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    • 제12권11호
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    • pp.850-855
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    • 2002
  • Silica powders were prepared from $SiCl_4$-$H_2$O system by chemical vapor deposition process, and investigated on size control of the products with reaction conditions. The products were amorphous and nearly spherical particles with 130nm~50nm in size. The size distribution became narrow with the increase of [$H_2$O]/[SiCl$_4$] concentration ratio. The particle size decreased with the increase of reaction temperature, [$H_2$O]/[SiCl$_4$] concentration ratio and total flow rate. The specific surface area measured by BET method was about three times larger than that of electron microscope method.

ELECTROSTATIC SPRAYER OF AGRICULTURAL CHEMICALS

  • Kang, T.G.;Lee, D.H.;Lee, C.S.;Kim, H.j.;Chung, S.J.
    • 한국농업기계학회:학술대회논문집
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    • 한국농업기계학회 2000년도 THE THIRD INTERNATIONAL CONFERENCE ON AGRICULTURAL MACHINERY ENGINEERING. V.III
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    • pp.811-818
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    • 2000
  • Agricultural chemicals spraying is one of the most efficient methods for pesticides control. General farming groups use Speed Sprayer but its deposition amount on practical crops is only 20% of total amount in SS case. Agricultural chemicals which fail to arrive the crops not only cause environmental contamination but loss of agriculture chemicals by lower deposition efficiency. For the purpose of improvement of these problems, this experiment proposes SS attachment type electrostatic induction spraying apparatus with DC power which improves deposition efficiency of agriculture chemicals on the crops.

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DC 반응성 스퍼터링된 TiN 박막의 구조적 및 전기적 특성 (Structural and Electrical Properties of Reactively Sputtered Titanium Nitride Films)

  • 류성용;오원욱;백수현;신두식;오재응;김영남;심태언;이종길
    • 전자공학회논문지A
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    • 제29A권8호
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    • pp.49-55
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    • 1992
  • We Have investigated the properties of the titanium nitrite films widely used in VLSI devices as diffusion barrier in Al-based metallization. TiN films were formed by reactive sputtering from Ti target in Ar-N$_2$ mixtures, varying deposition parameters such as N$_2$ partial pressure, substrate temperature, power, and total pressure. All the samples received the heat treatment at 45$0^{\circ}C$ for 30 min. The resulting films are characterized by mechanical stylus($\alpha$-step), x-ray diffraction(XRD), scanning electron microscopy(SEM), and four point probe method. The Tin film properties strongly depend on the deposition condition. The stoichiometry and Ti deposition rate are critically affected by nitrogen partial pressure, and the resistivity, in particular, is dependent on both the substrate temperature and sputtering power.

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PECVD공정 조건의 질화실리콘 박막특성에 대한 효과 (Effects of PECVD Process Parameters on the Characteristics of SiN Thin Film)

  • 이종무;이철진
    • 한국세라믹학회지
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    • 제24권2호
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    • pp.170-178
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    • 1987
  • Changes of the properties of PECVD-SiN film with the variation of deposition process parameters were investigated and optimum process parameters were determined. The refractive index of the film increased with increasing substrate temperature and pressure, and decreasing rf-power, NH3/SiH4 gas ratio and total gas flow. BHF etch rate and deposition rate show a decreasing tendency with increasing refractive index. The step coverage of the film was not affected much by deposition rate and pressure, but improved apparently with increasing rf-power and NH3/SiH4 gas ratio. Also the optimum process parameters were determined by considering the characteristic properties as well as thickness uniformity of films. The refractive index of the film deposited under this condition was 2.06.

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Computed tomography-guided 3D printed patient-specific regional anesthesia

  • Jundt, Jonathon S.;Chow, Christopher C.;Couey, Marcus
    • Journal of Dental Anesthesia and Pain Medicine
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    • 제20권5호
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    • pp.325-329
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    • 2020
  • Classic anesthetic techniques for the inferior alveolar nerve, lingual nerve, and long buccal nerve blockade are achieved by estimating the intended location for anesthetic deposition based on palpation, inspection, and subsequent correlation for oral anatomical structures. The present article utilizes computed tomography (CT) data to 3D print a guide for repeatable and accurate deposition of a local anesthetic at the ideal location. This technical report aims to anatomically define the ideal location for local anesthetic deposition. This process has the potential to reduce patient discomfort, risk of nerve damage, and failed mandibular anesthesia, as well as to reduce the total anesthetic dose. Lastly, as robotic-based interventions improve, this provides the initial framework for robot-guided regional anesthesia administration in the oral cavity.

전기영동법을 이용한 폴리이미드 박막의 절연파괴특성 (Properties of Electrical Destruction of Polyimide Thin Film Fabricated by The Methode of Electrophoretic Deposi pion)

  • 박귀만;김종석;박강식;김석기;정광희
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1994년도 춘계학술대회 논문집
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    • pp.103-107
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    • 1994
  • An experimental study was carried out to investigate the fabrication process and electrical breakdown of electrodeposted polyimide film from nonaqueous emulsion onto metal electrode surface. The thickness of imide film control led by the deposition voltage and time are proportional to the voltage or time. From the results, yeilds is proportional to the total elctrical charge flow through the electrode. When electrophoretic deposition voltage is 30 [V] deposition time is 30 sec, 40 sec, 50 sec, then the thickness of the films are 2.13 $\mu\textrm{m}$, 2.69 $\mu\textrm{m}$, 3.16 $\mu\textrm{m}$, 3.94 $\mu\textrm{m}$, respectively Electrical breakdown voltage of polyimide thin film shows very high. As film thicknes increase, the breakdown voltage are increased, but are net directly proprotional to thickness of the film.

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킥모터 슬래그 적층량 예측 (Prediction for Slag Mass Accumulation in the Kick Motor)

  • 장제선;김병훈;조인현
    • 한국추진공학회:학술대회논문집
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    • 한국추진공학회 2008년도 제31회 추계학술대회논문집
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    • pp.217-220
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    • 2008
  • 킥모터의 정확한 성능 예측을 위해서 슬래그 적층량을 구하였다. 알루미늄 액적의 궤적 계산을 통해 슬래그가 모터 내부에 적층되는 현상을 나타내었다. 유동현상 및 액적의 적층 현상을 Flunet 6.3을 사용해서 수치해석을 수행하였다. 슬래그 적층량을 예측하기 위해 비행중의 가속도, 액적의 크기 등에 대한 영향을 분석하였고 이를 고려하여 총 슬래그양을 구하였다. 지상시험 결과를 이용해서 구한 슬래그양과 비교해서 수치해석을 통한 슬래그 적층량이 잘 예측된 것을 확인하였다.

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SILICON DIOXIDE FILMS FOR INTERMETAL DIELECTRIC APPLICATIONS DEPOSITED BY AN ECR HIGH DENSITY PLASMA SYSTEM

  • Denison, D.R.;Harshbarger, W.R.
    • 한국진공학회지
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    • 제4권S1호
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    • pp.130-137
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    • 1995
  • Deopsition of thermal quality SiO2 using a high density plasma ECR CVD process has been demonstrated to give void and seam free gap fill of high aspect ratio metallization structures with a simple oxygen-silane chemistry. This is achieved by continuous sputter etching of the film during the deposition process. A two-step process is utilized to deposit a composite layer for higher manufacturing efficiency. The first step, which has a deposition rate of approximately 0.5 $\mu$m/min., is used to provide complete gap fill between the metal lines. The second step, which has a deposition rate of up to 1.5 $\mu$m/min., is used to deposit a total thickness of 2.0$\mu$m for the intermetal dielectric film. The topography of this composite film is very compatible with subsequent chemicl mechanical polishing(CMP) planarization processing.

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STUDY ON ATMOSPHERIC BEHAVIOR OF POLYCYCLIC AROMATIC HYDROCARBONS IN URBAN AREA, JEONJU

  • Kim, Hyoung-Seop;Kim, Jong-Guk;Kim, Kyoung-Soo
    • Environmental Engineering Research
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    • 제12권3호
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    • pp.118-127
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    • 2007
  • Between June and November 2002, the atmospheric concentrations and dry deposition fluxes of polycyclic aromatic hydrocarbons (PAHs) in Chonju were measured four times each over five days. The total concentration of PAHs in ambient air was $84\;ng/m^3$, with about 90% existing in the vapor phase. Plots of log ($K_p$) vs. log (${P_L}^0$) indicated that PAHs partitioning was not in equilibrium and the particulate characteristics did not change with seasonal variations. The PAHs fluxes to a water surface sampler (WSS) and a dry deposition plate (DDP) were about 14.15 and $1.92\;{\mu}g/m^2/d$, respectively. The flux of the gaseous phase, acquired by subtracting the DDP from the WSS results, was about $12.23\;{\mu}g/m^2/d$. A considerable correlation was shown between the atmospheric concentrations and deposition fluxes in the gaseous phase, but not in the particulate phase, as the fluxes of the particulate phase were dependent on the physical velocity differences of the particulates based on the particle diameter.

Chemical Composition and Seasonal Variation of Acid Deposition in Chiang Mai, Thailand

  • Sillapapiromsuk, S.;Chantara, S.
    • Environmental Engineering Research
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    • 제15권2호
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    • pp.93-98
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    • 2010
  • This study aims to determine the chemical composition and seasonal variation of atmospheric acid deposition in order to identify possible sources contributing to precipitation. Sampling and analysis of 132 wet deposition samples were carried out from January to December 2008 at Mae Hia Research Center, Chiang Mai University, Chiang Mai Province. Total precipitation was 1,286.7 mm. Mean electro-conductivity and pH values were 0.94 mS/m and 6.27, respectively. Major cations ($Na^+$, ${NH_4}^+$, $K^+$, $Ca^{2+}$, and $Mg^{2+}$) and major anions ($HCOO^-$, $CH_3COO^-$, $Cl^-$, ${NO_3}^-$, and ${SO_4}^{2-}$) were determined by Ion Chromatography. The relative volume weight mean concentrations of anions, in descending order, were ${SO_4}^{2-}$ > ${NO_3}^-$ > $Cl^-$ > $CH_3COO^-$ > $HCOO^-$ and those of cations were $NH_4^+$ > $Ca^{2+}$ > $Mg^{2+}$ > $K^{+}$ > $Na^+$. Results of a principle component analysis highlighted the influence of various possible sources of ions such as agricultural activity, fuel combustion, marine sources, soil resuspension, and biomass burning.