• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1998년도 춘계학술대회 논문집
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• pp.427-430
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• 1998

Electro Discharge Machining (EDM) is a so-call non-conventional machining technique. This paper presents the experimental results of an EDM technique for the fabrication of microholes on #7440 pyrex glass substrates. With various applied voltages and at various concentration of NaOH solution, the glass substrates have been microdrilled using the copper electrodes of which diameters are 250 $\mu\textrm{m}$ to 450 $\mu\textrm{m}$. The machined throughholes have been observed the top diameter, the bottom diameter and machining time have been measured. The experimental results show that the machining time decreases as the concentration of NaOH solution increases, the applied voltage increases and the needle diameter decreases. Also, the top diameter increases as the needle diameter increases or the applied voltage increases. The bottom diameter decreases as the needle diameter decreases or the applied voltage decreases.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1997년도 추계학술대회 논문집
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• pp.393-396
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• 1997

Electro Discharge Machining (EDM) is a so-call non-conventional machining technique. This paper presents the experimental results of an EDM technique for the fabircation of microholes on #7440 pyrex glans. With various applied voltages and at various concentration of KOH solution, the glass substrate have been microdrilled using the copper electrodes of which diameters are 250$\mu\textrm{m}$ to 450$\mu\textrm{m}$, respectively. The machined throughholes have been observed the top diameter, the bottom diameter, hollow width and hole diameter of the hole, and machining time hale been measured. The experimental results show that the machining time decreases as the concentration of KOH solution increases or the applied voltage increase. Also, The top diameter increases as the concentration of KOH solution decreases or the allied voltage increases. The bottom and hollow width decreases as the of KOH solution increases or the applied voltage decreases.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2006년도 제37회 하계학술대회 논문집 C
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• pp.1627-1628
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• 2006

In this paper, mesoporous only platinum electrode and micro pore platinum electrode with mesoporous Pt are fabricated and characterized on a silicon substrate to check their usability as enzymeless sensing electrodes for developing non-disposable glucose sensors integrated with silicon CMOS read out circuitry. Since most of electrochemical glucose sensors are disposable due to the use of the enzymes that are living creatures, these are limited to use in the in-vivo and continuous monitoring system applications. The proposed mesoporous Pt electrode with approximately 2.5nm in pore diameter and 150nm in height was fabricated by using a nonionic surfactant $C_{16}EO_8$ and an electroplating technique. The micro pore Pt electrode with mesoporous Pt means the mesoporous Pt electrode fabricated on top of micro pore arrayed Pt electrode with approximately $10{\mu}m$ in pore diameter and $80{\mu}m$ in height. The measured current responses at 10mM glucose solution of plane Pt, micro pore Pt, micro pore with mesoporus Pt, and mesoporous Pt electrodes are approximately $9.9nA/mm^2$, $92.4nA/mm^2$, $3320nA/mm^2$ and $44620nA/mm^2$, respectively. These data indicate that the mesoporous Pt electrode is much more sensitive than the other Pt electrodes. Thus, it is promising for non-disposable glucose sensor and electrochemical sensor applications.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집
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• pp.362-365
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• 2002

Hf thin films were deposited on bottom metal using a RF magnetron sputtering method followed by oxidation and annealing in O$_2$ and N$_2$ ambient, respectively. Various top metal electrodes (i.e., Al, Au, and Cu) were deposited by evaporation, and their roles on physical and electrical properties were investigated. Using the XRD, SEM and AFM techniques, we confirmed that the grain size of HfO$_2$ thin films enlarges as a function of oxidation temperature, increasing dielectric constant. However, other electrical properties (e.g., tan) deteriorateas a consequence. The dielectric constant and tan of HfO$_2$ thin films oxidized at 500 $^{\circ}C$ were 17-25 and 3${\times}$10-3 - 2x10-2, respectively, in the frequency range of 1 Hz to 1 MHz. The leakage current density was less than 1${\times}$10-8A/cm2 up to 0.7 MV/cm. In addition, electrical properties of HfO$_2$ thin films (e.g., the dielectric constant, leakage current and tan $\delta$) depend on top metal electrode. We showed that Al top metal electrode results in the best result.

• Journal of Electrochemical Science and Technology
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• 제14권4호
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• pp.320-325
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• 2023

In Li-ion batteries, a thick electrode is advantageous for lowering the inactive current collector portion and obtaining a high energy density. One of the critical failure mechanisms of thick electrodes is inhomogeneous lithiation and delithiation owing to the axial location of the electrode. In this study, it was confirmed that the top layer of the composite electrode contributes more to the charging step owing to the high ionic transport from the electrolyte. A high-loading multilayered electrode containing LiFePO₄ (LFP) and LiNi_0.8Co_0.1Mn_0.1O₂ (NCM811) was developed to overcome the inhomogeneous electrochemical reactions in the electrode. The electrode laminated with LFP on the top and NCM811 on the bottom showed superior cyclability compared to the electrode having the reverse stacking order or thoroughly mixed. This improvement is attributed to the structural and interfacial stability of LFP on top of the thick electrode in an electrochemically harsh environment.

• 마이크로전자및패키징학회지
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• 제25권2호
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• pp.31-34
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• 2018

차세대 유연 광전소자 적용을 위한 금속-산화물 샌드위치 구조인 ZnO/Al/ZnO 박막의 유연투명전극 기초연구를 수행하였다. 모든 증착은 유연성을 가지는 PET 기판 상에서 이루어졌으며, 상 하부 ZnO층의 두께가 광 투과도에 미치는 영향을 확인하기 위하여 Al 층의 두께는 모두 8 nm로 고정시킨 채 상부 ZnO 층의 두께는 5-70 nm, 하부 ZnO 층의 두께는 2.5-20 nm까지 변화를 주었다. 가시광선영역(380 nm-770 nm) 파장대를 가지는 광원의 투과도에 대하여 측정한 결과, 상부 ZnO 층의 두께가 30 nm이며 하부 ZnO 층의 경우 2.5 nm 일 때 가장 높은 투과도를 보였다. 400 nm 파장기준 투과도 62%, 면저항 $19{\Omega}/{\Box}$, 그리고 곡률반경 5 mm 조건에서의 휨 테스트 후 면저항과 투과도의 변화가 발생하지 않는 ZnO/Al/ZnO 유연투명전극 결과를 보고한다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.394.2-394.2
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• 2014

We fabricated highly transparent and flexible Ti doped In2O3 (TIO)/Ag nanowire(NW)/TIO (TAT) multilayer electrodes by linear facing target sputtering (LFTS) and brush-painting for used as flexible for anode organic solar cells(FOSCs). The characteristics of TAT transparent anode as a function of number of brush-painting cycles was also investigated. At optimized conditions we achieved highly flexible TAT multilayer electrodes with a low sheet resistance of $9.01{\Omega}/square$ and a high diffusive transmittance more than 80% in visible region as well as superior mechanical stability. The effective embedment of the Ag NW network between top and bottom TIO films led to a metallic conductivity, high transparency. Based on FE-SEM HRTEM, and XRD analysis, we can find that the Ag NW network was effectively embedded between top and bottom TIO layers due to good flexibility of Ag NW, the TAT multilayer showed superior flexibility than single TIO layer. Successful operation of FOSCs with high power conversion efficiency of 3.01% indicates that TAT hybrid electrode is a promising alternative to conventional ITO electrode for high performance FOSCs.

• 반도체디스플레이기술학회지
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• 제3권3호
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• pp.1-4
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• 2004

Fabrication and electrical and mechanical properties of piezoelectric micro bending actuators (PMBA) using sol-gel-multi-coated thick PZT films and MEMS processes were investigated. PMBA could be used for design and fabrication of micro fluidic devices, for example, micro-pumps, micro dispensers, and so on. PMBA were fabricated using 2 um thick PZT films on Pt (350 nm)/$SiO_2$ (500 nm)/Si ($300\mu\textrm{m}$) substrates and MEMS processes. 7 types of PMBA were fabricated with areas of silicon diaphragms, PZT films and top electrodes. When the sizes of silicon diaphragms, PZT films and Pt top electrodes were reduced from 3000$\times$$1389\mu\textrm{m}$, 4000$\times$$1000\mu\textrm{m}$ and 4000$\times$$900\mu\textrm{m}$ down to 14%, 14% and 11 % of them, respectively, the center displacements of PMBA were decreased from 0.68 um to 0.10 um at 5 Hz and 12 Vpp. So, PMBA with large areas showed larger displacements than PMBA with small areas and experimental results were also good agreement with the plate and shell theory.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2010년도 하계학술대회 논문집
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• pp.172-172
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• 2010

The Patterned vertical alignment (PVA) mode has many advantages such as perfect dark state at the normal direction and wide viewing angle. However, PVA mode needs additional process to pattern electrodes of both substrates and complicated assembly process. Moreover, this mode shows slow response time. To overcome these problems, we use plane shape ITO on top substrate instead of patterned electrode and form proper tilt angle of LC director on the surface while maintaining these original merits. Consequently, we achieve fast response time and improve transmittance.

• 반도체디스플레이기술학회지
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• 제13권4호
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• pp.15-20
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• 2014

The fracture analysis of $SiN_x$ layers, which were deposited by low-temperature plasma enhanced chemical vapor deposition (LT-PECVD) and could be used for an encapsulation layer of a flexible organic light emitting display (OLED), was performed by an electrical method. The specimens of metal-insulator-metal (MIM) structure were prepared using Pt and ITO electrodes. We stressed MIM specimen mechanically by bending outward with a bending radius of 15mm repeatedly and measured leakage current through the top and bottom electrodes. We also observed the cracks, were generated on surface, by using optical microscope. Once the cracks were initiated, the leakage current started to flow. As the amount of cracks increased, the leakage current was also increased. By correlating the electrical leakage current in the MIM specimen with the bending times, the amount of cracks in the encapsulation layer, generated during the bending process, was quantitatively estimated and fracture behavior of the encapsulation layer was also closely investigated.