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http://dx.doi.org/10.6117/kmeps.2018.25.2.031

Aluminum based ZnO/Al/ZnO flexible Transparent Electrodes Fabricated by Magnetron sputtering  

Bang, GeumHyuck (School of Advanced Materials Engineering, Dong-Eui University)
Choi, Dooho (School of Advanced Materials Engineering, Dong-Eui University)
Publication Information
Journal of the Microelectronics and Packaging Society / v.25, no.2, 2018 , pp. 31-34 More about this Journal
Abstract
In this study, the feasibility of ZnO/Al/ZnO flexible transparent electrodes for future flexible optoelectronic devices was investigated. All depositions were performed on PET substrates. The thicknesses of the top and bottom ZnO layers were 5-70 nm and 2.5-20 nm, respectively. The highest visible light transmittance was recorded when the thicknesses of the top and bottom ZnO layers 30 nm and 2.5 nm, respectively. 62% optical transmittance (at the wavelength of 400 nm) and sheet resistance of $19{\Omega}/{\Box}$ were measured. After repetitive bending test at a curvature radius of 5 mm, the transmittance and sheet resistance did not change.
Keywords
Sputtering; Aluminum; ZnO; Thin film; Transparent electrode;
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Times Cited By KSCI : 2  (Citation Analysis)
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