Microdrilling of Glass Substrates by Electrochemical Discharge Machining

전기화학적 방전법에 의한 유리기판의 미세가공

Electro Discharge Machining (EDM) is a so-call non-conventional machining technique. This paper presents the experimental results of an EDM technique for the fabircation of microholes on #7440 pyrex glans. With various applied voltages and at various concentration of KOH solution, the glass substrate have been microdrilled using the copper electrodes of which diameters are 250$\mu\textrm{m}$ to 450$\mu\textrm{m}$, respectively. The machined throughholes have been observed the top diameter, the bottom diameter, hollow width and hole diameter of the hole, and machining time hale been measured. The experimental results show that the machining time decreases as the concentration of KOH solution increases or the applied voltage increase. Also, The top diameter increases as the concentration of KOH solution decreases or the allied voltage increases. The bottom and hollow width decreases as the of KOH solution increases or the applied voltage decreases.