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Fracture Analysis of a $SiN_x$ Encapsulation Layer for Flexible OLED using Electrical Methods  

Kim, Hyuk Jin (Development Center (LCD), Samsung Display)
Oh, Seungha (Department of Materials Science and Engineering, Seoul National University)
Kim, Sungmin (Department of Materials Science and Engineering, Seoul National University)
Kim, Hyeong Joon (Department of Materials Science and Engineering, Seoul National University)
Publication Information
Journal of the Semiconductor & Display Technology / v.13, no.4, 2014 , pp. 15-20 More about this Journal
Abstract
The fracture analysis of $SiN_x$ layers, which were deposited by low-temperature plasma enhanced chemical vapor deposition (LT-PECVD) and could be used for an encapsulation layer of a flexible organic light emitting display (OLED), was performed by an electrical method. The specimens of metal-insulator-metal (MIM) structure were prepared using Pt and ITO electrodes. We stressed MIM specimen mechanically by bending outward with a bending radius of 15mm repeatedly and measured leakage current through the top and bottom electrodes. We also observed the cracks, were generated on surface, by using optical microscope. Once the cracks were initiated, the leakage current started to flow. As the amount of cracks increased, the leakage current was also increased. By correlating the electrical leakage current in the MIM specimen with the bending times, the amount of cracks in the encapsulation layer, generated during the bending process, was quantitatively estimated and fracture behavior of the encapsulation layer was also closely investigated.
Keywords
encapsulation layer; bending; crack; fractural analysis;
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1 P. Burrows, V. Bulovic, S. Forrest, L. Sapochak, D. McCarty, and M. Thompson, "Reliability and degradation of organic light emitting devices," Applied Physics Letters, vol. 65, pp. 2922-2924, 1994.   DOI   ScienceOn
2 Y. Sato and H. Kanai, "Stability of organic electroluminescent diodes," Molecular Crystals and Liquid Crystals, vol. 252, pp. 435-442, 1994.
3 L. Do, E. Han, Y. Niidome, M. Fujihira, T. Kanno, S. Yoshida, et al., "Observation of degradation processes of Al electrodes in organic electroluminescence devices by electroluminescence microscopy, atomic force microscopy, scanning electron microscopy, and Auger electron spectroscopy," Journal of applied physics, vol. 76, pp. 5118-5121, 1994.   DOI   ScienceOn
4 J. S. Lewis and M. S. Weaver, "Thin-film permeation-barrier technology for flexible organic light-emitting devices," Selected Topics in Quantum Electronics, IEEE Journal of, vol. 10, pp. 45-57, 2004.   DOI   ScienceOn
5 N. Kim, "Fabrication and characterization of thinfilm encapsulation for organic electronics," 2009.
6 G.-F. Wang, X.-M. Tao, and R.-X. Wang, "Flexible organic light-emitting diodes with a polymeric nanocomposite anode," Nanotechnology, vol. 19, p. 145201, 2008.   DOI   ScienceOn
7 J.-A. Jeong, H.-K. Kim, and M.-S. Yi, "Effect of Ag interlayer on the optical and passivation properties of flexible and transparent $Al_2O_3/Ag/Al_2O_3$ multilayer," Applied Physics Letters, vol. 93, pp. 033301-033301-3, 2008.   DOI   ScienceOn
8 Y. Leterrier, L. Medico, F. Demarco, J.-A. Manson, U. Betz, M. Escola, et al., "Mechanical integrity of transparent conductive oxide films for flexible polymer-based displays," Thin Solid Films, vol. 460, pp. 156-166, 2004.   DOI   ScienceOn
9 A. Roberts, B. Henry, A. Sutton, C. Grovenor, G. Briggs, T. Miyamoto, et al., "Gas permeation in silicon-oxide/polymer ($SiO_x$/PET) barrier films: role of the oxide lattice, nano-defects and macro-defects," Journal of Membrane Science, vol. 208, pp. 75-88, 2002.   DOI   ScienceOn
10 Z. Chen, B. Cotterell, W. Wang, E. Guenther, and S.-J. Chua, "A mechanical assessment of flexible optoelectronic devices," Thin Solid Films, vol. 394, pp. 201-205, 2001.   DOI   ScienceOn