• 한국전기전자재료학회논문지
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• 제33권6호
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• pp.433-438
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• 2020

To enhance the tunneling electroresistance (TER) ratio of a ferroelectric tunnel junction (FTJ) device using Al-doped HfO₂ thin films, a thin insulating layer was prepared on a TiN bottom electrode, for which TiN was preliminarily treated at various temperatures in O₂ ambient. The composition and thickness of the inserted insulating layer were optimized at 600℃ and 50 Torr, and the FTJ showed a high TER ratio of 430. During the heat treatments, a titanium oxide layer formed on the surface of TiN, that suppressed oxygen vacancy generation in the ferroelectric thin film. It was found that the fabricated FTJ device exhibits two distinct resistance states with higher tunneling currents by properly heat-treating the TiN bottom electrode of the HfO₂-based FTJ devices in O₂ ambient.

• 전기화학회지
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• 제5권1호
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• pp.21-26
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• 2002

비정질 루테늄 산화물을 사용한 수퍼캐패시터를 개발하였다. 삼염화루테늄 수화물$(RuCl_3{\cdot}xH_2O)$로부터 제조한 비정질의 이산화루테늄 수화물$(RuO_2{\cdot}nH_2O)$을 사용하여 수퍼캐패시터 전극을 제조하였다. 집전체로는 티타늄 및 STS 304박막에 비해 보다 넓은 전위창을 가지는 탄탈륨 박막을 사용하였다. 제조한 전극과 4.8M 황산 전해액을 사용하여 수퍼캐패시터를 제조하였다. 전극의 비정전용량은 순환전위전류분석에서 미분 최대 값으로 산화 및 환원 과정 각각 710 및 $645\;F/g-RuO_2{\cdot}nH_2O$이었으며, 평균값은 $521\;F/g-RuO_2{\cdot}nH_2O$으로 나타났다. 수퍼캐패시터를 포화카로멜기준전극에 대하여 0.5 V로 protonation level을 조정하고, 충방전 시험한 바, $151\;F/g-RuO_2{\cdot}nH_2O$의 비정전용량을 나타내었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.115-116
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• 2012

The demand for flexible electronic systems such as wearable computers, E-paper, and flexible displays has increased due to their advantages of excellent portability, conformal contact with curved surfaces, light weight, and human friendly interfaces over present rigid electronic systems. This seminar introduces three recent progresses that can extend the application of high performance flexible inorganic electronics. The first part of this seminar will introduce a RRAM with a one transistor-one memristor (1T-1M) arrays on flexible substrates. Flexible memory is an essential part of electronics for data processing, storage, and radio frequency (RF) communication and thus a key element to realize such flexible electronic systems. Although several emerging memory technologies, including resistive switching memory, have been proposed, the cell-to-cell interference issue has to be overcome for flexible and high performance nonvolatile memory applications. The cell-to-cell interference between neighbouring memory cells occurs due to leakage current paths through adjacent low resistance state cells and induces not only unnecessary power consumption but also a misreading problem, a fatal obstacle in memory operation. To fabricate a fully functional flexible memory and prevent these unwanted effects, we integrated high performance flexible single crystal silicon transistors with an amorphous titanium oxide (a-TiO2) based memristor to control the logic state of memory. The $8{\times}8$ NOR type 1T-1M RRAM demonstrated the first random access memory operation on flexible substrates by controlling each memory unit cell independently. The second part of the seminar will discuss the flexible GaN LED on LCP substrates for implantable biosensor. Inorganic III-V light emitting diodes (LEDs) have superior characteristics, such as long-term stability, high efficiency, and strong brightness compared to conventional incandescent lamps and OLED. However, due to the brittle property of bulk inorganic semiconductor materials, III-V LED limits its applications in the field of high performance flexible electronics. This seminar introduces the first flexible and implantable GaN LED on plastic substrates that is transferred from bulk GaN on Si substrates. The superb properties of the flexible GaN thin film in terms of its wide band gap and high efficiency enable the dramatic extension of not only consumer electronic applications but also the biosensing scale. The flexible white LEDs are demonstrated for the feasibility of using a white light source for future flexible BLU devices. Finally a water-resist and a biocompatible PTFE-coated flexible LED biosensor can detect PSA at a detection limit of 1 ng/mL. These results show that the nitride-based flexible LED can be used as the future flexible display technology and a type of implantable LED biosensor for a therapy tool. The final part of this seminar will introduce a highly efficient and printable BaTiO3 thin film nanogenerator on plastic substrates. Energy harvesting technologies converting external biomechanical energy sources (such as heart beat, blood flow, muscle stretching and animal movements) into electrical energy is recently a highly demanding issue in the materials science community. Herein, we describe procedure suitable for generating and printing a lead-free microstructured BaTiO3 thin film nanogenerator on plastic substrates to overcome limitations appeared in conventional flexible ferroelectric devices. Flexible BaTiO3 thin film nanogenerator was fabricated and the piezoelectric properties and mechanically stability of ferroelectric devices were characterized. From the results, we demonstrate the highly efficient and stable performance of BaTiO3 thin film nanogenerator.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2016년도 추계학술대회 논문집
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• pp.195-195
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• 2016

Titanium and its alloys are widely used as implants in orthopedics, dentistry and cardiology due to their outstanding properties, such as high strength, high level of hemocompatibility and enhanced biocompatibility. Hence, recent works showed that the synthesis of new Ti-based alloys for implant application involves more biocompatible metallic alloying element, such as, Nb, Hf, Zr and Mo. In particular, Nb and Hf are one of the most effective Ti ${\beta}-stabilizer$ and reducing the elastic modulus. Plasma electrolyte oxidation (PEO) is known as excellent method in the biocompatibility of biomaterial due to quickly coating time and controlled coating condition. The anodized oxide layer and diameter modulation of Ti alloys can be obtained function of improvement of cell adhesion. Silicon (Si) and magnesium (Mg) has a beneficial effect on bone. Si in particular has been found to be essential for normal bone and cartilage growth and development. In vitro studies have shown that Mg plays very important roles in essential for normal growth and metabolism of skeletal tissue in vertebrates and can be detected as minor constituents in teeth and bone. The aim of this study is to research Si and Mg doped hydroxyapatite film formation by plasma electrolytic oxidation. Ti-29Nb-xHf (x= 0, 3, 7 and 15wt%, mass fraction) alloys were prepared Ti-29Nb-xHf alloys of containing Hf up from 0 wt% to 15 wt% were melted by using a vacuum furnace. Ti-29Nb-xHf alloys were homogenized for 2 hr at $1050^{\circ}C$. Each alloy was anodized in solution containing typically 0.15 M calcium acetate monohydrate + 0.02 M calcium glycerophosphate at room temperature. A direct current power source was used for the process of anodization. Anodized alloys was prepared using 270V~300V anodization voltage at room. A Si and Mg coating was produced by RF-magnetron sputtering system. RF power of 100W was applied to the target for 1h at room temperature. The microstructure, phase and composition of Si and Mg coated oxide surface of Ti-29Nb-xHf alloys were examined by FE-SEM, EDS, and XRD.

• Korean Chemical Engineering Research
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• 제49권6호
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• pp.758-763
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• 2011

본 연구에서는 poly(ethylene oxide) (PEO)와 poly(methyl methacrylate) (PMMA) 블렌드를 고분자 매트릭스(matrix)로 사용하고, 가소제로propylene carbonate (PC), 리튬염인 $LiClO_4$, 그리고 서로 다른 함량의 세라믹 필러인 $TiO_2$를 이용하여 용액 캐스팅(solution casting)법에 의해 고분자 복합체 전해질 필름을 제조하였다. 고분자 전해질의 결정화도와 이온전도도는 각각, X선 회절분석기(XRD)와 AC임피던스법을 통해 분석하였고, 표면 형태학(morphology)을 조사하기 위해 주사전자현미경(SEM)으로 고찰하였다. 그 결과, $TiO_2$의 함량을 증가시킴으로써 PEO의 결정화 영역이 감소하였고, 이온전도도는 증가하였다. 특히 $TiO_2$의 함량이 15 wt%일 때 가장 높은 이온전도도가 관찰된 반면, 15 wt% 이상을 첨가한 경우, 이온전도도가 감소된 경향을 관찰할 수 있었다. 이는 표면 형태학를 통해 고분자와 필러간의 비혼합성 혹은 필러응집에 의해 불균일적인 형태학이 나타남으로써 이온전도도가 감소하는 현상을 확인할 수 있었다.

• 해양환경안전학회지
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• 제22권1호
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• pp.138-144
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• 2016

티타늄은 표면에 형성되는 보호성 부동태 피막 때문에 일반부식과 해수에서 내식성이 강하지만 염산, 황산, 인산 등의 산에서는 보호성 산화물 피막이 파괴된다고 알려져 있다. 본 연구에서는 Ti에 Al 및 V등을 첨가한 ${\alpha}+{\beta}$계에 대하여 $1066^{\circ}C$와 $966^{\circ}C$에서 5시간 용체화 열처리를 실시하고, 이 시편을 $550^{\circ}C$, $600^{\circ}C$, 및 $650^{\circ}C$에서 각각 1시간, 4시간, 8시간 및 16시간 시효열처리한 후 마이크로비커스 경도를 측정하고, 이 시편을 1N $H_2SO_4$ 용액에서 전기화학적 분극법으로 부식을 계측하였으며, 분극을 마친 시편의 표면을 현미경 조직사진으로 부식상태를 검토하였다. 시험 결과 용체화열처리한 시편이 모재와 시효열처리한 시편보다 높은 내식성을 나타내며. 용체화 온도가 높고 시간이 길어질수록 내식성은 증가하였다.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2018년도 춘계학술대회 논문집
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• pp.74-74
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• 2018

Ti-6Al-4V alloys have been widely used as orthopedic materials because of their excellent corrosion resistance and mechanical properties. However, it does not bind directly to the bone, so it requires a surface modification. This problem can be solved by nanotube and micropore formation. Plasma electrolytic oxidation (PEO) treatment for micropore, which combines high-voltage spark and electrochemical oxidation, is a new way of forming a ceramic coating on light metals such as titanium and its alloys. This method has excellent reproducibility and can easily control the shape and size of the Ti alloy. In this study, formation of bioactive surface by PEO-treatment after $2^{nd}$ ATO technique of Ti-6Al-4V alloy was invesgated by various instrument. Nanotube oxide surface structure was formed on the surface by anodic oxidation treatment in 0.8 wt.% NaF and 1M $H_3PO_4$ electrolytes. After nanotube formation, nanotube layer was removed by ultrasonic cleaning. PEO-treatment was carried out at 280V for 3 minutes in the electrolytic solution containing the bioactive substance (Mg, Zn, Mn, Sr, and Si). The surface of Ti-6Al-4V alloy was observed by field emission scanning electron microscopy (FE-SEM, S-4800 Hitachi, Japan). An energy dispersive X-ray spectrometer (EDS, Inca program, Oxford, UK) was used to analyze the spectra of physiologically active Si, Mn, Mg, Zn, and Sr ions. The PEO film formed on the Ti-6Al-4V alloy surface was characterized using an X-ray diffractometer (TF-XRD, X'pert Philips, Netherlands). It is confirmed that bioactive ions play an essential role in the normal bone growth and metabolism of the human skeletal tissues.

• 공업화학
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• 제3권1호
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• pp.88-99
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• 1992

광 전기분해시 양극으로 사용되는 산화티타늄 반도체 전극의 안정성을 증대시키고 효율향상을 위해서 순수한 티타늄 전극을 양극 산화법, 전기로 산화법, 불꽃 산화법으로 산화 피막을 제조하였으며 In을 Ti와 $TiO_2$소지에 전기도금을 한 후 전기로 산화법으로 혼합 산화물을 제조하였다. 또한 $Al_2O_3$ 와 NiO는 진공증착 방법을 이용하여 Ti 소지위에 증착시킨 후 전기로 산화법을 이용하여 혼합 산화물을 제조하였다. 에너지변환 효율(${\eta}$)은 인가전위에 따라서 다른 값을 갖는데 0.6V로 계산하여 보면 $1200^{\circ}C$의 불꽃으로 2분간 산화시킨 전극이 0.98%로 가장 큰 값을 가졌으며 양극 산화법으로 제조한 전극의 ${\eta}$는 0.14%로 작은 값을 보여 주었다. 한편 $800^{\circ}C$ 전기로에서 10분간 산화시킨 전극의 ${\eta}$는 0.57%로 띠간 에너지는 2.9eV로 나타났다. 한편 In을 Ti 및 $TiO_2$ 소지위에 전기도금시킨 전극의 ${\eta}$는 0.8%였으며 인가전위가 증가함에 따라서 ${\eta}$는 증가하였다. 그러나 $Al_2O_3$와 NiO를 Ti소지위에 진공증착시킨 전극의 ${\eta}$는 다른 전극들에 비해서 가장 낮은 값을 나타내었다.

• 구강회복응용과학지
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• 제25권2호
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• pp.183-190
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• 2009

본 연구의 목적은 NaF와 $H_3PO_4$를 사용하여 양극산화과정을 통해 나노튜브 제작 조건을 찾는 것이다. 절삭된 직경 15 mm, 두께 1.5 mm의 티타늄 디스크를 양극에, 백금을 음극에 연결하고 전극간의 거리는 10 mm가 되도록 하였다. $H_3PO_4$와 NaF 용액을 전해질로 하여 양극산화를 시행하였는데 전압, 전해질 농도, 산화시간을 달리하여 티타늄 디스크에 나노튜브를 형성하였다. 양극산화 후 24시간 동안 증류수로 세척한 후 24시간 동안 $40^{\circ}C$ 오븐에서 건조하고 시편의 표면구조 형상을 관찰 분석하였다. 실험 결과 0.5 wt % NaF에서 전압과 시간이 증가함에 따라 pore 형태의 초기 나노튜브 형성되었다. 1.0 wt % NaF에서 20 V, 20 분과 25 분에서 나노튜브가 생성되었고, 30 V에서 튜브의 형태가 커지면서 터지는 양상을 보였다. 2.0 wt % NaF에서 전압과 시간에 상관없이 적절한 나노튜브형태가 형성되지 않았다. $1M\;H_3PO_4$, 1.0 wt % NaF 전해용액, 20 V, 20분 양극산화 조건에서 티타늄 디스크 상에 가장 잘 정렬된 형태의 나노튜브 구조가 형성되었다. 양호한 형태의 나노튜브 형성을 위해서는 전해질의 종류에 따라 적절한 농도, 전압, 시간의 형성조건이 필요할 것으로 사료된다.

• Journal of Periodontal and Implant Science
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• 제30권1호
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• pp.187-203
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• 2000

The precipitation of calcium phosphate on implant surface has been known to accelerate osseointegration and to enhance osseous adaptation. The present study was performed to examine whether the precipitation of calcium phosphate on Ti-6Al-4V alloy could be affected by the immersion in NaOH solution and heat treatment. Ti-6Al-4V alloy plates of $15{\times}3.5{\times}1mm$ in dimension were polished sequentially from #240 to #2,000 emery paper and one surface of each specimen was additionally polished with $0.1{\mu}m$ alumina paste. Polished specimens were soaked in various concentrations of NaOH solution(0.1, 1.0, 3.0, 5.0, 7.0, 10.0 M) at $60^{\circ}C$ for 24 hours for alkali treatment, and 5.0 M NaOH treated specimens were heated for 1 hour at each temperature of 400, 500, 600, 700, $800^{\circ}C$. After the alkali and heat treatments, specimens were soaked in the Hank's solution with pH 7.4 at $36.5^{\circ}C$ for 30days.The surface ingredient change of Ti-6Al-4V alloy was evaluated by thin-film X-ray diffractometer(TF-XRD) and the surface microstructure was observed by scanning electron microscope(SEM), and the elements of surface were analyzed by X-ray photoelectron spectroscopy(XPS). The results were obtained as follows ; 1. The precipitation of calcium phosphate on Ti-6Al-4V alloy was accelerated by the immersion in NaOH solution and heat treatment. 2. In Alkali treatment for the precipitation of calcium phosphate on Ti-6Al-4V alloy, the optimal concentration of NaOH solution was 5.0 M. 3. In heat treatment after alkali treatment in 5.0 M NaOH solution, the crystal formation on alloy surface was enhanced by increasing temperature. In heat treated alloys at $600^{\circ}C$, latticed structure and prominences of calcium phosphate layer were most dense. On heat treated alloy surface at the higher temperature(${\geq}700^{\circ}C$), main crystal form was titanium oxide rather than apatite. The above results suggested that the precipitation of calcium phosphate on the surface of Ti-6Al-4V alloy could be induced by alkali treatment in 5.0 M-NaOH solution and by heat treatment at $600^{\circ}C$.