• Title/Summary/Keyword: three-dimensional integration

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Scanning acoustic microscopy for material evaluation

  • Hyunung Yu
    • Applied Microscopy
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    • v.50
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    • pp.25.1-25.11
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    • 2020
  • Scanning acoustic microscopy (SAM) or Acoustic Micro Imaging (AMI) is a powerful, non-destructive technique that can detect hidden defects in elastic and biological samples as well as non-transparent hard materials. By monitoring the internal features of a sample in three-dimensional integration, this technique can efficiently find physical defects such as cracks, voids, and delamination with high sensitivity. In recent years, advanced techniques such as ultrasound impedance microscopy, ultrasound speed microscopy, and scanning acoustic gigahertz microscopy have been developed for applications in industries and in the medical field to provide additional information on the internal stress, viscoelastic, and anisotropic, or nonlinear properties. X-ray, magnetic resonance, and infrared techniques are the other competitive and widely used methods. However, they have their own advantages and limitations owing to their inherent properties such as different light sources and sensors. This paper provides an overview of the principle of SAM and presents a few results to demonstrate the applications of modern acoustic imaging technology. A variety of inspection modes, such as vertical, horizontal, and diagonal cross-sections have been presented by employing the focus pathway and image reconstruction algorithm. Images have been reconstructed from the reflected echoes resulting from the change in the acoustic impedance at the interface of the material layers or defects. The results described in this paper indicate that the novel acoustic technology can expand the scope of SAM as a versatile diagnostic tool requiring less time and having a high efficiency.

Etching Anisotropy Depending on the SiO2 and Process Conditions of NF3 / H2O Remote Plasma Dry Cleaning (NF3 / H2O 원거리 플라즈마 건식 세정 조건 및 SiO2 종류에 따른 식각 이방 특성)

  • Hoon-Jung Oh;Seran Park;Kyu-Dong Kim;Dae-Hong Ko
    • Journal of the Semiconductor & Display Technology
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    • v.22 no.4
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    • pp.26-31
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    • 2023
  • We investigated the impact of NF3 / H2O remote plasma dry cleaning conditions on the SiO2 etching rate at different preparation states during the fabrication of ultra-large-scale integration (ULSI) devices. This included consideration of factors like Si crystal orientation prior to oxidation and three-dimensional structures. The dry cleaning process were carried out varying the parameters of pressure, NF3 flow rate, and H2O flow rate. We found that the pressure had an effective role in controlling anisotropic etching when a thin SiO2 layer was situated between Si3N4 and Si layers in a multilayer trench structure. Based on these observations, we would like to provide further guidelines for implementing the dry cleaning process in the fabrication of semiconductor devices having 3D structures.

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EMOS: Enhanced moving object detection and classification via sensor fusion and noise filtering

  • Dongjin Lee;Seung-Jun Han;Kyoung-Wook Min;Jungdan Choi;Cheong Hee Park
    • ETRI Journal
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    • v.45 no.5
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    • pp.847-861
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    • 2023
  • Dynamic object detection is essential for ensuring safe and reliable autonomous driving. Recently, light detection and ranging (LiDAR)-based object detection has been introduced and shown excellent performance on various benchmarks. Although LiDAR sensors have excellent accuracy in estimating distance, they lack texture or color information and have a lower resolution than conventional cameras. In addition, performance degradation occurs when a LiDAR-based object detection model is applied to different driving environments or when sensors from different LiDAR manufacturers are utilized owing to the domain gap phenomenon. To address these issues, a sensor-fusion-based object detection and classification method is proposed. The proposed method operates in real time, making it suitable for integration into autonomous vehicles. It performs well on our custom dataset and on publicly available datasets, demonstrating its effectiveness in real-world road environments. In addition, we will make available a novel three-dimensional moving object detection dataset called ETRI 3D MOD.

Unveiling Zoological Realms: Exploring the Virtual Frontier, Analyzing Data Export Techniques, and Crafting Immersive Experiences

  • Jumamurod Aralov Farhod Ugli;Narzulloev Oybek Mirzaevich;Leehwan Hwang;Seunghyun Lee
    • International Journal of Internet, Broadcasting and Communication
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    • v.16 no.3
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    • pp.242-252
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    • 2024
  • This study introduces a prototype for a virtual zoo initiative, aimed at optimizing resource utilization and minimizing animal displacement from their natural habitats. The prototype features a thoughtfully developed three-dimensional representation of an emperor penguin, with animations designed to emulate real-life behaviors. An investigation into file format distinctions for scientific research, encompassing Wavefront(OBJ), Collada(DAE), and Filmbox(FBX) formats, was conducted. The research utilized the Hololens 2 device for visualization, Unity for environment development, Blender for modeling, and C# for programming, with deployment facilitated through Visual Studio 2019 and the Mixed Reality Toolkit. Empirical examination revealed the OBJ format's suitability for simple geometric shapes, while DAE and FBX formats were preferred for intricate models and animations. DAE files offer detailed preservation of object structure and animations albeit with larger file sizes, whereas FBX files provide compactness but may face scalability constraints due to extensive data integration. This investigation underscores the potential of virtual zoos for conservation and education, advocating for further exploration and context-specific implementation.

Cyclic Hardening and Degradation Effects on Site Response during an Earthquake (지진시 지반의 반복경화/연화 현상에 의한 부지응답 특성 영향 연구)

  • Lee, Jin-Sun
    • Journal of the Earthquake Engineering Society of Korea
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    • v.12 no.6
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    • pp.65-71
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    • 2008
  • A one-dimensional site response analysis program (KODSAP) was developed using cyclic soil behavior model by using the modified parallel IWAN model. The model is able to predict the cyclic hardening and degradation of soil through the adjustment of the internal slip stresses of its elements beyond the cyclic threshold, and satisfies Bauschinger's effect and the Masing rule in terms of its own behavior characteristics. The program (KODSAP) used the direct integration method in the time domain. The elasticity of the base rock was considered as a viscous damper boundary condition. The effects of cyclic hardening or degradation of soil on site response analysis were evaluated through parametric studies. Three types of analyses were performed to compare the effect of analysis and cyclic parameter on site response. The first type was equivalent linear analysis, the second was nonlinear analysis, and a third was nonlinear analysis using the cyclic hardening or degradation model.

A Study on Numeral Speech Recognition Using Integration of Speech and Visual Parameters under Noisy Environments (잡음환경에서 음성-영상 정보의 통합 처리를 사용한 숫자음 인식에 관한 연구)

  • Lee, Sang-Won;Park, In-Jung
    • Journal of the Institute of Electronics Engineers of Korea CI
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    • v.38 no.3
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    • pp.61-67
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    • 2001
  • In this paper, a method that apply LP algorithm to image for speech recognition is suggested, using both speech and image information for recogniton of korean numeral speech. The input speech signal is pre-emphasized with parameter value 0.95, analyzed for B th LP coefficients using Hamming window, autocorrelation and Levinson-Durbin algorithm. Also, a gray image signal is analyzed for 2-dimensional LP coefficients using autocorrelation and Levinson-Durbin algorithm like speech. These parameters are used for input parameters of neural network using back-propagation algorithm. The recognition experiment was carried out at each noise level, three numeral speechs, '3','5', and '9' were enhanced. Thus, in case of recognizing speech with 2-dimensional LP parameters, it results in a high recognition rate, a low parameter size, and a simple algorithm with no additional feature extraction algorithm.

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A 3-D RBSM for simulating the failure process of RC structures

  • Zhong, Xingu;Zhao, Chao;Liu, Bo;Shu, Xiaojuan;Shen, Mingyan
    • Structural Engineering and Mechanics
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    • v.65 no.3
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    • pp.291-302
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    • 2018
  • Rigid body spring method (RBSM) is an effective tool to simulate the cracking process of structures, and has been successfully applied to investigate the behavior of reinforced concrete (RC) members. However, the theoretical researches and engineering applications of this method mainly focus on two-dimensional problems as yet, which greatly limits its applications in actual engineering projects. In this study, a three-dimensional (3-D) RBSM for RC structures is proposed. In the proposed model, concrete, reinforcing steels, and their interfaces are represented as discrete entities. Concrete is partitioned into a collection of rigid blocks and a uniform distribution of normal and tangential springs is defined along their boundaries to reflect its material properties. Reinforcement is modeled as a series of bar elements which can be freely positioned in the structural domain and irrespective of the mesh geometry of concrete. The bond-slip characteristics between reinforcing steel and concrete are also considered by introducing special linkage elements. The applicability and effectiveness of the proposed method is firstly confirmed by an elastic T-shape beam, and then it is applied to analyze the failure processes of a Z-type component under direct shear loading and a RC beam under two-point loading.

The Expressions of Vector Gravity and Gravity Gradient Tensor due to an Elliptical Cylinder (타원 기둥에 의한 벡터 중력 및 중력 변화율 텐서 반응식)

  • Hyoungrea Rim
    • Geophysics and Geophysical Exploration
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    • v.26 no.1
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    • pp.1-7
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    • 2023
  • This study derives the expressions of vector gravity and gravity gradient tensor due to an elliptical cylinder. The vector gravity for an arbitrary three-dimensional (3D) body is obtained by differentiating the gravitational potential, including the triple integral, according to the shape of the body in each axis direction. The vector gravity of the 3D body with axial symmetry is integrated along the axial direction and reduced to a double integral. The complex Green's theorem using complex conjugates subsequently converts the double integral into a one-dimensional (1D) closed-line integral. Finally, the vector gravity due to the elliptical cylinder is derived using 1D numerical integration by parameterizing a boundary of the elliptical cross-section as a closed line. Similarly, the gravity gradient tensor due to the elliptical cylinder is second-order differentiated from the gravitational potential, including the triple integral, and integrated along the vertical axis direction reducing it to a double integral. Consequently, all the components of the gravity gradient tensor due to an elliptical cylinder are derived using complex Green's theorem as used in the case of vector gravity.

A study on the correction of the connection part of the underground facility 3D model and the correction of irregularities (지하시설물 3차원 모델 연결부 보정 및 요철보정에 관한 연구)

  • Kim, Sung Su;Han, Kyu Won;Heo, Sung Seo;Han, Sang Hoon
    • Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
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    • v.39 no.6
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    • pp.429-435
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    • 2021
  • The integrated underground space map shows the underground facility(water supply, sewage, gas, electric power, communication, heating), underground structures (subway, underpass, underground walkway, underground parking lot, underground shopping mall, common ward), ground(drilling, coffin, geology) refers to a map constructed so that a total of 15 types of underground information can be checked at a glance on a three-dimensional basis. The purpose of this study is to develop a technology to correct the problem of curved surface processing and the unevenness of underground facility pipelines that occur in converting 2D underground facility data into 3D-based underground space integrated map(3D underground facility model). do it with. To this end, we first investigated and reviewed the domestic and foreign status of technologies that generate data on underground facilities based on three dimensions, and developed a surface correction algorithm and an unevenness correction algorithm to solve practical problems. Algorithms to verify the developed algorithm This applied correction program was developed. Based on the above process, the three-dimensional model of the underground facility could be produced identically to reality. This study is judged to have significance as a basic study to improve the utilization of the underground spatial integration map.

Improvement of crossflow model of MULTID component in MARS-KS with inter-channel mixing model for enhancing analysis performance in rod bundle

  • Yunseok Lee;Taewan Kim
    • Nuclear Engineering and Technology
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    • v.55 no.12
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    • pp.4357-4366
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    • 2023
  • MARS-KS, a domestic regulatory confirmatory code of Republic of Korea, had been developed by integrating RELAP5/MOD2 and COBRA-TF. The integration of COBRA-TF allowed to extend the capability of MARS-KS, limited to one-dimensional analysis, to multi-dimensional analysis. The use of COBRA-TF was mainly focused on subchannel analyses for simulating multi-dimensional behavior within the reactor core. However, this feature has been remained as a legacy without ongoing maintenance. Meanwhile, MARS-KS also includes its own multidimensional component, namely MULTID, which is also feasible to simulate three-dimensional convection and diffusion. The MULTID is capable of modeling the turbulent diffusion using simple mixing length model. The implementation of the turbulent mixing is of importance for analyzing the reactor core where a disturbing cross-sectional structure of rod bundle makes the flow perturbation and corresponding mixing stronger. In addition, the presence of this turbulent behavior allows the secondary transports with net mass exchange between subchannels. However, a series of assessments performed in previous studies revealed that the turbulence model of the MULTID could not simulate the aforementioned effective mixing occurred in the subchannel-scale problems. This is obvious consequence since the physical models of the MULTID neglect the effect of mass transport and thereby, it cannot model the void drift effect and resulting phasic distribution within a bundle. Thus, in this study, the turbulence mixing model of the MULTID has been improved by means of the inter-channel mixing model, widely utilized in subchannel analysis, in order to extend the application of the MULTID to small-scale problems. A series of assessments has been performed against rod bundle experiments, namely GE 3X3 and PSBT, to evaluate the performance of the introduced mixing model. The assessment results revealed that the application of the inter-channel mixing model allowed to enhance the prediction of the MULTID in subchannel scale problems. In addition, it was indicated that the code could not predict appropriate phasic distribution in the rod bundle without the model. Considering that the proper prediction of the phasic distribution is important when considering pin-based and/or assembly-based expressions of the reactor core, the results of this study clearly indicate that the inter-channel mixing model is required for analyzing the rod bundle, appropriately.