• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.83-83
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• 2009

We studied about the effect of newly developed etchant for spacer etch process in gate patterning. With the 110nm CMOS technology, first, we changed the gate pattern size and investigated the variation of spacer etch profile according to the difference in gate length. Second, thickness of spacer nitride was changed and effect of etch ant on difference in nitride thickness was observed. In addition to these, spacer etch power was added as test item for variation of etch profile. We investigated the etch profiles with SEM and TEM analysis was used for plasma damage check. With these results we could check the process margins for gate patterning which could hold best performance and choose the condition for best spacer etch profile.

• Transactions of Materials Processing
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• v.14 no.5 s.77
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• pp.439-443
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• 2005

Deep drawing and cold forging processes are combined to achieve near net shape forming of automotive part which has not only drum shape but also thickness variation. It is important to find out proper intermediate shape where two totally different forming methods should be joined seamlessly. In the course of development of the combined process, finite element analysis can be utilized effectively to decide optimal position for transferring from the sheet metal work to the bulk forming. Because machining process is eliminated, significant improvement in integrity, reliability, and durability of the part is expected. The developed process combination could be applied in real manufacturing process successfully.

• Proceedings of the Korean Institute of Building Construction Conference
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• 2002.05a
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• pp.81-84
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• 2002

Recently Bentonite mat is applied various structure : External waterproofing for underground structure, A reclaimed land, Artificial lake, Large-scaled civil structure, etc. With these various structure environment, water quality for application of Bentonite Mat affects watertightness. Specially spot with a large quantity of Chloride ion like salt water, degree of watertightness revelation is evaluated and applied. In this study, it is a main goal to investigate watertightness of Bentonite Mat with distilled water and salt water dissolved chloride ion Contents 0.88%. The result of this paper is as follows. 1) Water permeability coefficient of Bentonite Mat : distilled water(1.21$\times$10$^{-9}$cm/sec), salt water(3.12$\times$10$^{-7}$cm/sec). 2) Variation of thickness : distilled water(187%), salt water(108%). 3) Swelling ratio : distilled water(1500%), salt water(350%).

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1547-1550
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• 2005

ISB panel, inner structured of metal in two skin and bonded, has inner structures which have low relative density, stiffness and strength with low weight of make improvement for that purpose. A kind of Inner structures have various structure types. In this paper, we have studied the Forming Limit Diagram(FLD), thickness variation and stress strain to dimple structure of sheet by analysis of Dynaform and LS-Dyna.

• Journal of the Korean Society of Industry Convergence
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• v.5 no.3
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• pp.247-254
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• 2002

This study has researched the following conclusion to compare to the existing theory and to examine lateral earth pressure, which have measured to add incremental load on sandy soil, and were different in types of compaction by modeling earth pressure test. Lateral earth pressure by incremental load shows that it is increasing at depth forty four centimeters as 2/3H point for wall high, and under 2/3 H point the variation of earth pressure on incremental load is not conspicuous. Therefor, the more a position of surcharge load is close with fixed wall, the more a variation of lateral earth pressure marks considerably. According to relative compaction density of soil, lateral earth pressure turns up larger effective value for layer compaction test to a thickness of thirty three centimeters than layer compaction test to a thickness of twenty centimeters by the roller.

• Korean Journal of Materials Research
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• v.16 no.5
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• pp.308-311
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• 2006

The purpose of this study is to investigate the difference of the wafer nanotopography impact on the oxide-film thickness variation between the STI CMP using ceria slurry and STI CMP using fumed silica slurry. The nanotopography impact on the oxide-film thickness variation after STI CMP using ceria slurry is 2.8 times higher than that after STI CMP using fumed silica slurry. It is attributed that the STI CMP using ceria slurry follows non-Prestonian polishing behavior while that using fumed silica slurry follows Prestonian polishing behavior.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07b
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• pp.1098-1101
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• 2003

Complex impedances with frequency and voltage variation were analyzed in ITO/$Alq_3$/Al device structure at thickness 100 nm and 200 nm of $Alq_3$, respectively. At low frequency, complex impedance is mostly expressed by resistive component, and at the high frequency by capacitive component. Also, we have evaluated resistance, capacitance and permittivity.

• Journal of Industrial Technology
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• v.29 no.B
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• pp.3-7
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• 2009

A cylindrical pin fin with inside fluid is optimized based on fixed fin volume by using the one dimensional analytic method. Heat loss from the fin and the pin fin radius for fixed fin volume is presented as a function of the fin length. Temperature variation of the fin with the variation of ambient and inside fluid convection characteristic numbers and fin base thickness is listed. The maximum heat loss at the practical fin length and corresponding optimum fin length and radius are presented as a function of fin base thickness, inside convection characteristic number, fin volume and ambient convection characteristic number. One of the results shows that the optimum pin fin shape becomes relatively fatter as the fin volume increases.

• Transactions of the Korean Society of Mechanical Engineers
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• v.19 no.5
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• pp.1149-1157
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• 1995

The research for variation of coolant film thickness and separating force has been investigated following the examination for friction profile of work roll and roughness change of strip surface in rolling mill producting actual commercial products. The obtained results are as follows ; (1) Coolant film thickness in cold rolling has been increased relative to the circumferential velocity of work roll, and formation of coolant films has decreased with the smaller diameter of work roll. (2) Separating force is related to the formation of coolant film, and large separating force is needed to the formation of coolant film but it is constant after formation of appropriate film. (3) Wear and roughness alleviation of work roll is larger in bottom-roll than in top-roll on cold surface is larger in the direction of width than in roll direction, and changes of roughness and strip surface hardness rarely occurred after 3 passes.

• Transactions of the Korean Society of Mechanical Engineers
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• v.8 no.5
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• pp.462-468
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• 1984

The variation of thermal diffusivity with respect to rolling reduction is experimentally determined by flash technique. Copper alloy is used as an experimental and specimens are cut from the slab produced by rolling process with different percent reduction in thickness along the rolling direction and with 30.deg. 60.deg. and 90.deg. angle to the rolling direction. It is found that thermal diffusivity is slightly decreased as rolling reduction increased, and it has tendency that thermal diffusivity is increased slightly as its angle approached to 90.deg. at same rolling reduction.