• 한국재료학회지
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• 제22권7호
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• pp.358-361
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• 2012

Co and Ni as catalysts in $SnO_2$ sensors to improve the sensitivity for $CH_4$ gas and $CH_3CH_2CH_3$ gas were coated by a solution reduction method. $SnO_2$ thick films were prepared by a screen-printing method onto $Al_2O_3$ substrates with an electrode. The sensing characteristics were investigated by measuring the electrical resistance of each sensor in a chamber. The structural properties of $SnO_2$ with a rutile structure investigated by XRD showed a (110) dominant $SnO_2$ peak. The particle size of the $SnO_2$:Ni powders with Ni at 6 wt% was about 0.1 ${\mu}m$. The $SnO_2$ particles were found to contain many pores according to a SEM analysis. The sensitivity of $SnO_2$-based sensors was measured for 5 ppm of $CH_4$ gas and $CH_3CH_2CH_3$ gas at room temperature by comparing the resistance in air to that in the target gases. The results showed that the best sensitivity of $SnO_2$:Ni and $SnO_2$:Co sensors for $CH_4$ gas and $CH_3CH_2CH_3$ gas at room temperature was observed in $SnO_2$:Ni sensors coated with 6 wt% Ni. The $SnO_2$:Ni gas sensors showed good selectivity to $CH_4$ gas. The response time and recovery time of the $SnO_2$:Ni gas sensors for the $CH_4$ and $CH_3CH_2CH_3$ gases were 20 seconds and 9 seconds, respectively.

• 한국산학기술학회논문지
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• 제9권3호
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• pp.615-620
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• 2008

저저항 배선층으로 쓰일 수 있는 선폭 $0.5{\mu}m$, 70nm 높이의 폴리실리콘 패턴에 $10nm-Ni_{1-x}Co_x$(x=0.2, 0.6, and 0.7)의 금속 박막을 열증착법으로 성막하고 쾌속 열처리 (RTA) 온도를 $700^{\circ}C$와 $1000^{\circ}C$로 달리하여 실리사이드화 공정을 실시하여 상부에 니켈코발트 실리사이드를 형성시켰다 이때의 미세구조를 확인하고 FIB (focused ion beam)를 활용하여 저에너지 조건 (30kV-10 pA-2 sec)에서 배선층을 국부적으로 조사하여 실리사이드 층의 선택적 제거 가능성을 확인하였다. 실험 범위내의 실리사이드화 온도 범위와 NiCo 상대 조성 범위에서 주어진 FIB 조건으로 선택적으로 저저항 실리사이드 층의 제거가 가능하였으나, 상대적으로 Co 함유량이 많은 실리사이드는 배선층 내부에서 기포가 발생하였으며, 이러한 기포로 인해 실리사이드 층만의 국부적 제거는 불가능하였다.

• 한국표면공학회지
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• 제47권5호
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• pp.263-268
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• 2014

Nanocrystalline diamond(NCD) coated SiC balls were applied in a ball-on-disk tribometer. After seeding in an ultrasonic bath containing nanometer diamond powders, $2.2{\mu}m$ thick NCD films were deposited on sintered 3 mm diameter SiC balls at $600^{\circ}C$ in a 2.45 GHz microwave plasma CVD system. Bare $ZrO_2$ and SiC balls were prepared for comparison as test balls. Tribology tests were performed in air with pairs of three different balls and mirror polished steel(SKH51) disk. The wear tracks on balls and disks were examined by optical microscope and alpha step profiler. Under the load of 3 N, the friction coefficients of steel against $ZrO_2$, SiC and NCD-coated balls were between 0.4 and 0.8. After a few thousands sliding laps, the friction coefficient of NCD-coated balls dropped from 0.45 to below 0.1 and maintained thereafter. Under a higher load of 10 N or 20 N with a long sliding distance of 2 km, $ZrO_2$ and SiC balls exhibited the similar friction coefficients as above. The friction coefficient of NCD-coated balls was less than 0.1 from the beginning and increased to above 0.1 steadily or with some fluctuations as sliding distance increased. NCD coating layers were found worn out after long duration and/or high load sliding test, which resulted in the friction coefficient higher than 0.1.

• 한국표면공학회지
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• 제51권4호
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• pp.243-248
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• 2018

All solid state thin film batteries with two types of cell structure, Pt / $LiCoO_2$ / LiPON / Cu and Pt / $LiCoO_2$ / LiPON / $LiCoO_2$ / Cu, are prepared and their electrochemical performances are investigated to evaluate the effect of $LiCoO_2$ interlayer at the interface of LiPON / Cu. The crystallinity of the deposited $LiCoO_2$ thin films is confirmed by XRD and Raman analysis. The crystalline $LiCoO_2$ cathode thin film is obtained and $LiCoO_2$ as the interlayer appears to be amorphous. The surface morphology of Cu current collector after cycling of the batteries is observed by AFM. The presence of a 10 nm-thick layer of $LiCoO_2$ at the interface of LiPON / Cu enhances the interfacial adhesion and reduces the interfacial resistance. As a result, Li plating / stripping at the interface of LiPON / Cu during charge/discharge reaction takes place more uniformly on Cu current collector, while without the interlayer of $LiCoO_2$ at the interface of LiPON / Cu, the Li plating / stripping is localized on current collector. The thin film batteries with the interlayer of $LiCoO_2$ at the interface of LiPON / Cu exhibits enhanced initial coulombic efficiency, reversible capacity and cycling stability. The thickness of the anode current collector Cu also appears to be crucial for electrochemical performances of all solid state thin film batteries.

• 대한기관식도과학회지
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• 제3권1호
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• pp.84-93
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• 1997

The bronchoscopy is usually performed in the patients who present symptoms of wheezing, hemoptysis, signs of airway obstruction, unexplained long-term chronic cough with or without radiologic features of pneumonia, emphysema or atelectasis. The symptoms and signs of cases of suspected airway foreign body are of often cofused with those of asthma pneumonia and other respiratory tract disease. The ventilating bronchoscopy will be helpful for removal of certain foreign bodies as well as alleviating medically-unresponsive bronchopulmonary conditions via removing abnormal secretions or merely improving ventilation. The authors have performed clinical analysis of 59 patients who were suspected of airway foreign bodies and treated by ventilating bronchoscopy from September 1985 to February 1995. The results were as follows: 1) Among the 59 cases of bronchoscopy, 51 cases(97%) were under the age of 3. The ratio of male and female was 2.69:1 2) Most common presenting symptom was coughing(84.7%) followed by dyspnea, fever, wheezing and anterior chest pain. 3) Among 39 cases of identified foreign bodies, abnormal findings in the chest X-ray films were found in 33 cases(84.6%) and most common abnormal radiologic feature was pneumonia in 10 cases(25.6%) followed by combination of pneumonia and emphysema, or emphysema alone. All the 20 cases of absent foreign body presented abnormal radiologic features and common findings were pneumonia and atelectasis. 4) Vegetable foreign bodies were the most common form of removed airway foreign bodies(69.2%) followed by metallic foreign bodies(12.8%) and plastic foreign bodies(7.7%). 5) By distribution of the location of foreign bodies, 29 cases(74.4%) were located in the main bronchus( 16 cases of right side and 13 cases of left side), 8 cases were in the trachea and 2 cases were found at the cordal level. 6) By duration of foreign body lodgement in the airway, 9 cases(23.1%) were removed within 7 to 30 days, 10 cases(5.6%) within 3 days and 5 cases(12.8%) were enlodged over 30 days. 7) In the cases of absent foreign bodies, common bronchoscopic findings were mucopurulent or thick mucoid discharge in the main bronchi, erythema or edema of bronchial mucosa and all the cases were improved after ventilating bronchoscopy with concomitant medical management.

• Current Photovoltaic Research
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• 제11권1호
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• pp.8-12
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• 2023

In this work, we investigated the thickness of Ag precursor layer to improve the performance of flexible CIGSe solar cells grown on stainless steel (STS) substrates through three-stage co-evaporation with Ga grading followed by alkali treatments. The small amount of incorporated Ag in CIGSe films showed enhancement in the grain size and device efficiency. With an optimal 6 nm-thick Ag layer, the best cell on the STS substrate yielded more than 16%, which is comparable to the soda-lime glass (SLG) substrate. Thus, the addition of controlled Ag combined with alkali post-deposition treatment (PDT) led to increased open-circuit voltage (VOC), accompanied by the increased built-in potential as confirmed by capacitance-voltage (C-V) measurements. It is related to a reduction of charge recombination at the depletion region. The results suggest that Ag alloying and alkali PDT are essential for producing highly efficient flexible CIGSe solar cells.

• 한국재료학회지
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• 제33권11호
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• pp.475-481
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• 2023

Recently, the electron transport layer (ETL) has become one of the key components for high-performance perovskite solar cell (PSC). This study is motivated by the nonreproducible performance of ETL made of spin coated SnO₂ applied to a PSC. We made a comparative study between tin oxide deposited by atomic layer deposition (ALD) or spin coating to be used as an ETL in N-I-P PSC. 15 nm-thick Tin oxide thin films were deposited by ALD using tetrakisdimethylanmiotin (TDMASn) and using reactant ozone at 120 ℃. PSC using ALD SnO₂ as ETL showed a maximum efficiency of 18.97 %, and PSC using spin coated SnO₂ showed a maximum efficiency of 18.46 %. This is because the short circuit current (Jsc) of PSC using the ALD SnO₂ layer was 0.75 mA/cm² higher than that of the spin coated SnO₂. This result can be attributed to the fact that the electron transfer distance from the perovskite is constant due to the thickness uniformity of ALD SnO₂. Therefore ALD SnO₂ is a candidate as a ETL for use in PSC vacuum deposition.

• 한국결정성장학회지
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• 제34권4호
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• pp.139-142
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• 2024

SiC와 GaN 등의 광에너지갭 소재들의 전력반도체에 대한 활용과 소자의 개발 추세와 함께 더 높은 에너지갭을 갖는 AlN 단결정에 대한 연구도 2인치 단결정 웨이퍼의 개발 성공 등 많은 연구 결과가 보고되고 있다. 그러나, 화학기상증착공법을 적용하여 성장된 AlN 단결정은 수 마이크로미터의 두께 이하의 박막은 개발되었으나, 그 이상의 두께를 갖은 결과는 거의 없다. 따라서, 본 연구에서는 화학기상증착공법중 하나인 HVPE(Hydride vapor phase epitaxy) 법을 적용하여 성장하고자 하였다. 성장된 AlN 단결정은 자체 제작된 설비를 이용하여 제작하였으며, 사파이어 기판을 사용하여, AlN 단 결정을 제조하기 위한 조건을 확립하고자 하였고, 그 결과를 광학현미경 관찰을 통하여 성장거동을 고찰하고자 하였다.

• 대한방사선기술학회지:방사선기술과학
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• 제35권2호
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• pp.157-164
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• 2012

본 논문의 목적은 쐐기필터를 사용한 방사선조사면에서 다양한 조직전자밀도가 선량분포에 미치는 영향을 분석하고자 함이다. 구성된 물질에 따라 밀도가 다른 고체 팬텀, 코르크팬텀, 그리고 공기층에서 동적쐐기필터와 금속쐐기필터를 이용하여 선량분포의 변형정도를 평가하였다. 본 실험에서는 매질 내 삽입이 용이하고 우수한 선량특성을 가지고 있는 레디오크로믹 필름(Gafchromic EBT2, International Speciality Products, NJ)을 사용하였다. 선형가속기 6 MV 광자선을 이용해서 $10{\times}10cm^2$ 조사면에 400 MU를 조사하였다. 필름의 선량분포는 선량 분석프로그램을 이용하여 조사면 내 영역과 반음영 영역을 분석하였다. 조직의 밀도가 같을 때 동적쐐기필터와 금속 쐐기필터의 선량분포는 금속 쐐기필터 선량이 동적쐐기필터 선량보다 높게 나타났다. 조직전자밀도가 다른 부위에 쐐기필터의 종류에 따른 선량분포는 고체팬텀과 코르크 팬텀에서 2% 이내 차이를 나타내고 있었다. 그러나 공기층에서 선량분포는 고체팬텀이나 코르크 팬텀의 선량분포와 큰 차이를 보이고 있다. 공기층에서 쐐기필터의 선량분포는 쐐기 사용 효과가 나타나지 않고 있다. 쐐기필터의 두꺼운 부분과 얇은 부분 밖에서 반음영의 크기는 1 cm에서 2 cm 정도 크게 두꺼운 부분에서 크게 나타났다. 그리고 금속 쐐기필터에서 반음영이 동적쐐기필터 보다 평균 6.4%정도 높게 반음영이 나타났다. 본 실험을 통해 공기층과 같이 조직전자밀도 현저히 작은 매질에서는 쐐기필터의 효과가 크게 떨어지는 것과 불균질 물질에 따라 흡수되는 선량분포가 크게 변형되는 것을 알 수 있었다. 따라서 조직전자밀도의 차이가 큰 부위의 방사선치료계획 시 쐐기필터의 적용에 따른 적절한 보정이 이루어져야 한다.

• 한국세라믹학회지
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• 제40권2호
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• pp.206-211
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• 2003

Sol-gel 공정으로 제조된 YMnO$_3$박막의 결정상과 강유전특성에 미치는 기판종류와 버퍼층의 영향에 대하여 고찰하였다. Si(1OO) 기판위에는 hexagonal YMnO$_3$이 형성되었으나 Pt(111)/TiO$_2$/SiO$_2$/Si 기판위에는 hexagonal과 orthorhombic YMnO$_3$이 함께 형성되었다. 기판위에 미리 $Y_2$O$_3$버퍼층을 형성시킨 경우에는 Si(100)와 Pt(111)/TiO$_2$/SiO$_2$/Si 두가지 기판 모두 단일 hexagonal YMnO$_3$이 성장하였으며, 특히 c-축 배향성이 향상되었다. 박막내에 hexagonal과 orthorhombic YMnO$_3$이 혼재된 시편보다는 hexagonal 단일상이 형성된 시편이, 또한 단일상 시편중에서도 c-축 우선배향성이 좋은 시편이 그렇지 않은 시편에 비해 누설전류밀도 특성이 우수하였다. YMnO$_3$박막의 잔류분극값은 Si(100)기판을 사용했을 경우, 버퍼층 없이 제조된 시편은 0.14, 버퍼층이 삽입된 시편은 0.24$\mu$C/$ extrm{cm}^2$의 값을 나타내었다 한편 Pt(111)/TiO$_2$/SiO$_2$/Si 기판의 경우, 버퍼층 없이 형성된 YMnO$_3$시편은 이력곡선을 보여주지 못하였고, 버퍼층이 삽입된 시편은 1.14$\mu$C/$\textrm{cm}^2$의 잔류분극값을 나타내었다. 이상의 연구를 통하여 기판의 종류와 $Y_2$O$_3$버퍼층 삽입으로 YMnO$_3$박막의 결정상과 배향성을 제어함으로서 박막시편의 누설전류밀도 특성 및 강유전특성을 제어할 수 있음을 확인하였다.