Korean Journal of Materials Research (한국재료학회지)

Materials Research Society of Korea (한국재료학회)
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Characteristics of Tin Oxide Thin Film Grown by Atomic Layer Deposition and Spin Coating Process as Electron Transport Layer for Perovskite Solar Cells

원자층 증착법과 용액 공정법으로 성장한 전자 수송층 산화주석 박막의 페로브스카이트 태양전지 특성

  • Ki Hyun Kim (Graduate School of Energy Science and Technology, Chungnam National University) ;
  • Sung Jin Chung (Department of Materials Science & Engineering, Chungnam National University) ;
  • Tae Youl Yang (Department of Materials Science & Engineering, Chungnam National University) ;
  • Jong Chul Lim (Graduate School of Energy Science and Technology, Chungnam National University) ;
  • Hyo Sik Chang (Graduate School of Energy Science and Technology, Chungnam National University)
  • 김기현 (충남대학교 에너지과학기술대학원) ;
  • 정성진 (충남대학교 신소재공학과) ;
  • 양태열 (충남대학교 신소재공학과) ;
  • 임종철 (충남대학교 에너지과학기술대학원) ;
  • 장효식 (충남대학교 에너지과학기술대학원)
  • Received : 2023.10.24
  • Accepted : 2023.10.26
  • Published : 2023.11.27
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Abstract

Recently, the electron transport layer (ETL) has become one of the key components for high-performance perovskite solar cell (PSC). This study is motivated by the nonreproducible performance of ETL made of spin coated SnO2 applied to a PSC. We made a comparative study between tin oxide deposited by atomic layer deposition (ALD) or spin coating to be used as an ETL in N-I-P PSC. 15 nm-thick Tin oxide thin films were deposited by ALD using tetrakisdimethylanmiotin (TDMASn) and using reactant ozone at 120 ℃. PSC using ALD SnO2 as ETL showed a maximum efficiency of 18.97 %, and PSC using spin coated SnO2 showed a maximum efficiency of 18.46 %. This is because the short circuit current (Jsc) of PSC using the ALD SnO2 layer was 0.75 mA/cm2 higher than that of the spin coated SnO2. This result can be attributed to the fact that the electron transfer distance from the perovskite is constant due to the thickness uniformity of ALD SnO2. Therefore ALD SnO2 is a candidate as a ETL for use in PSC vacuum deposition.

Keywords

Acknowledgement

This work was supported by research fund of Chungnam National University.

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