• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.53-53
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• 2011

As the dimension of Cu interconnects has continued to reduce, its resistivity is expected to increase at the nanoscale due to increased surface and grain boundary scattering of electrons. To suppress increase of the resistivity in nanoscale interconnects, alloying Cu with other metal elements such as Al, Mn, and Ag is being considered to increase the mean free path of the drifting electrons. The formation of Al alloy with a slight amount of Cu broadly studied in the past. The study of Cu alloy including a very small Al fraction, by contrast, recently began. The formation of Cu-Al alloy is limited in wet chemical bath and was mainly conducted for fundamental studies by sputtering or evaporation system. However, these deposition methods have a limitation in production environment due to poor step coverage in nanoscale Cu metallization. In this work, gap-filling of Cu-Al alloy was conducted by cyclic MOCVD (metal organic chemical vapor deposition), followed by thermal annealing for alloying, which prevented an unwanted chemical reaction between Cu and Al precursors. To achieve filling the Cu-Al alloy into sub-100nm trench without overhang and void formation, furthermore, hydrogen plasma pretreatment of the trench pattern with Ru barrier layer was conducted in order to suppress of Cu nucleation and growth near the entrance area of the nano-scale trench by minimizing adsorption of metal precursors. As a result, superconformal gap-fill of Cu-Al alloy could be achieved successfully in the high aspect ration nanoscale trenches. Examined morphology, microstructure, chemical composition, and electrical properties of superfilled Cu-Al alloy will be discussed in detail.

• 공업화학
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• 제30권5호
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• pp.523-529
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• 2019

본 연구에서는 최근 반도체 및 display 산업이 발달함에 따라 문제가 되고 있는 휘발성 유기화합물의 전처리에 관해 조사하였다. 일반적인 VOCs 처리 설비인 직접연소장치에 사용되는 농축기는 display 제조 공정 내 배출가스에 의해 쉽게 오염되어 성능저하를 일으키며 결과적으로 VOCs의 처리 효율을 떨어뜨린다. 배출가스 성분 분석 결과 고비점, 고점도, 고분자량의 Alcohol류 및 Oil 성분이 다량 검출되었다. 이에 전처리 설비 내 열교환기를 이용하여 농축기 성능저하 물질을 응축시켜 처리하고자 하였고, 대부분의 물질을 90% 이상 처리하였다. 또한 열교환기에서 재 비산되는 고분자 Oil 등은 후처리 설비로 Grease Filter를 장착하여 대부분 처리할 수 있는 것으로 확인되었다.

• The Korean Journal of Pain
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• 제36권4호
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• pp.441-449
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• 2023

Background: Hypertonic saline is used for treating chronic pain; however, clinical studies that aid in optimizing therapeutic protocols are lacking. We aimed to determine the concentration of intrathecally injected hypertonic saline at which the effect reaches its peak as well as the underlying γ-aminobutyric acid (GABA) receptor-related antinociceptive mechanism. Methods: Spinal nerve ligation (SNL; left L5 and L6) was performed to induce neuropathic pain in rats weighing 250-300 g. Experiment 1: one week after implanting the intrathecal catheter, 60 rats were assigned randomly to intrathecal injection with 0.45%, 0.9%, 2.5%, 5%, 10%, and 20% NaCl, followed by behavioral testing at baseline and after 30 minutes, 2 hours, 1 day, and 1 week to determine the minimal concentration which produced maximal analgesia. Experiment 2: after determining the optimal intrathecal hypertonic saline concentration, 60 rats were randomly divided into four groups: Sham, hypertonic saline without pretreatment, and hypertonic saline after pretreatment with one of two GABA receptor antagonists (GABA_A [bicuculline], or GABA_B [phaclofen]). Behavioral tests were performed at weeks 1 and 3 following each treatment. Results: Hypertonic saline at concentrations greater than 5% alleviated SNL-induced mechanical allodynia and had a significant therapeutic effect, while showing a partial time- and dose-dependent antinociceptive effect on thermal and cold hyperalgesia. However, pretreatment with GABA receptor antagonists inhibited the antinociceptive effect of 5% NaCl. Conclusions: This study indicates that the optimal concentration of hypertonic saline for controlling mechanical allodynia in neuropathic pain is 5%, and that its analgesic effect is related to GABA_A and GABA_B receptors.

• 한국미생물·생명공학회지
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• 제43권1호
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• pp.9-15
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• 2015

본 연구는 해조류, 꼬시래기를 발효하여 에탄올을 생산하였다. 최적 전처리 조건은 12% (w/v) 해조류 슬러리, 270 mM 황산, 121도 60분동안 실시하였다. 열산가수분해 후에, 꼬시래기 가수분해산물에 16 U/ml의 혼합효소 Viscozyme L과 Celluclast 1.5 L를 이용하여 효소당화를 수행하였다. 50.4 g/l의총단당류의농도는, 120 g dw/l 꼬시래기 슬러리로부터 열산가수분해와효소당화에 의해 총 탄수화물 60 g/l의 전환율 84.2%를 나타내었다. 꼬시래기 가수분해산물은 분리당화발효(SHF)로 에탄올 생산을 위한 기질로 사용하였다. 고농도 galactose로 순치한 Candida lusitaniae ATCC42720에 의한 에탄올 생산은 0.43의 에탄올 수율(Y_EtOH)인 22.0 g/l를 생산하였다. 특정 당에 순치한 효모는 혼합당의 흡수에 유용하며, 그 결과 해조류가수분해산물배지로부터 높은 에탄올 수율을 나타내었다.

• 대한정형도수물리치료학회지
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• 제12권1호
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• pp.37-43
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• 2006

PURPOSE: Previous studies have documented the lack of ultrasound's non-thermal effects on nerve conduction using frequencies of 1 MHz and 870 kHz. The purpose of this study was to determine the biophysical effects of continuous ultrasound on median local forearm temperature and motor nerve conduction velocities using frequencies of 3.0 MHz. SUBJECTS: Twelve healthy subjects (6 males, 6 females, age $22.30{\pm}2.41$ yrs, weight $61.33{\pm}10.16$ kg, height $167.58{\pm}8.04$ cm) without a history of neurological or musculoskeletal injury to their dominant arm volunteered for this study. METHODS AND MATERIALS: Each subject received a total of five treatments, one each at .0, 0.5, 1.0, 1.5, 2.0 W/$cm^2$ of 3 MHz continuous ultrasound on the anterior surface of the middle area of dominant forearm for 10 minutes. Dependent measures for forearm local temperature and median motor nerve conduction velocity (MNCV) were taken pretreatment and immediately post-treatment. One-way ANOVA were used for each dependent measure. RESULTS: The posttreatment forearm local temperature were differed significantly (p<0.001) between intensities of ultrasound. The posttreatment forearm local temperature of the ultrasound treated with 1.0 w/$cm^2$, 1.5 w/$cm^2$ and 2.0 w/$cm^2$ were significantly higher than 0.5 w/$cm^2$ and 0.0 w/$cm^2$ of ultrasound (p<0.05). The posttreatment median MNCV were differed significantly from the respective pretreatment velocities (p<0.001). The MNCV of the ultrasound treated with 0.0 w/$cm^2$ and 0.5 w/$cm^2$ were significantly (p<0.05) slower than that observed pretreatment, while the three ultrasound intensities produced significantly increased posttreatment MNCV: 1.0 w/$cm^2$ and 1.5 w/$cm^2$ and 2.0 W/$cm^2$. The posttreatment MNCV at 2.0 w/$cm^2$ and 1.5 w/$cm^2$ was significantly faster than that at 0 w/$cm^2$, 0.5 w/$cm^2$ and 1.0 w/$cm^2$ (p<0.05), the MNCV at 1.0 w/$cm^2$ was significantly faster than that associated with 0 w/$cm^2$ and 0.5 w/$cm^2$ of ultrasound (p<0.05). CONCLUSIONS: The decreased median motor forearm local temperature and MNCV of the ultrasound treated with 0.0 w/$cm^2$ and 0.5 w/$cm^2$ were attributed to the cooling effect by ultrasound transmission gel. Local forearm temperature and nerve conduction velocity were directly related to the intensity of ultrasound. Alterations in MNCV from ultrasound on healthy nerves appeared to be related to temperature changes induced by thermal effects of ultrasound.

• 생명과학회지
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• 제26권8호
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• pp.976-982
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• 2016

해조류는 성장이 빠르고, 낮은 경작지 사용, 높은 이산화탄소 흡수 및 식량자원과 경쟁하지 않는 장점이 있다. 따라서 리그닌이 없는 해조류 사용은 바이오에탄올 생산을 위한 3세대 바이오매스로 주목받고 있다. 산 촉매 열가수분해 전처리법은 해조류로부터 높은 단당을 획득할 수 있는 경제적인 방법 중 하나이다. 고온 전처리 조건들에서 3,6-anhydrogalactoe는 저해물질인 HMF로 전환되는데, 이 저해물질은 세포 성장과 에탄올 생산을 저해한다. 따라서 바이오에탄올을 생산하기 위해 해조류의 탄수화물을 분해할 때는 높은 단당 수율과 낮은 저해물질 생성을 하는 효과적인 전처리 방법이 필요하다. 혼합 당을 이용한 에탄올 발효의 효율을 향상시키기 위해, 고농도 당에 순치한 효모는 혼합 당의 사용을 통해 해조류를 이용한 바이오 에탄올의 생산을 가능하게 한다.

• 한국축산식품학회지
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• 제35권4호
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• pp.441-448
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• 2015

Blanching beef for use in home meal replacements (HMR) is an important process that determines the final quality of the beef after the cooking process. Thermal pretreatment also minimizes the change in quality during the main cooking process or storage. In this study, beef samples were washed and sliced, then treated by immersion in boiling water (1-10 min), steaming (1-10 min), or pan-frying in oil (30-240 s). The color after each thermal treatment showed higher L* and b* values and lower a* values compared with the raw beef, except for the pan-frying thermal treatment. The total color difference (∆E) and pH value were significantly increased by panfrying (p<0.05). There was no significant difference in the shear force of the beef samples, except for the sample pan-fried for 210 s. The nutritional content of beef was measured as the moisture, protein, fat, and ash contents, which were 69.96, 16.64, 3.49, and 1.13%, respectively, in raw beef. After thermal treatment, the crude protein and fat contents were increased, whereas the moisture and ash contents decreased. The mineral content, including Na, Mg, Fe, and Ca was highest after pan-frying. The heat treatment decreased microorganisms in all the samples. The total bacteria count in raw beef was 4.5-4.7 Log CFU/g, whereas the bacteria count decreased to 2.2-2.8 Log CFU/g after blanching. Thermophilic bacteria, coliform, mold, and yeast not detected in any thermally treated sample.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 하계학술대회 논문집 D
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• pp.1839-1842
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• 1999

We have synthesized carbon nanotubes by thermal chemical vapor deposition of $C_2H_2$ on transition metal-coated silicon substrates. Carbon nanotubes are uniformly synthesized on a large area of the plain Si substrates, different from Previously reported porous Si substrates. It is observed that surface modification of transition metals deposited on substrates by either etching with dipping in a HF solution and/or $NH_3$ pretreatment is a crucial step for the nanotube growth prior to the reaction of $C_2H_2$ gas. We will demonstrate that the diameters of carbon naotubes can be controlled by applying the different transition metals.

• 한국결정성장학회지
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• 제23권6호
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• pp.296-301
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• 2013

Carbon coils could be synthesized using $C_2H_2/H_2$ as source gases and $SF_6$ as an incorporated additive gas under the thermal chemical vapor deposition system. A 304-type stainless steel was used as a substrate with nickel powders as the catalyst. The surface of the substrate was pretreated using a sand paper or a mechanical drill to enhance the production yield of the carbon coils. The characteristics of the deposited carbon nanomaterials on the substrates were investigated according to the surface state on the stainless steel substrate. The protrusion induced by the grooves on the substrate surface could enhance the formation of the carbon nanomaterials having the coils geometries. The cause for the enhancement of the carbon coils formation by the grooves was suggested and discussed with the surface energies for the interaction between as-growing carbon elements. Finally, we could obtain the massive production yield of the carbon coils by the surface pretreatment using SiC sand papers on the several tens grooved stainless steel substrate.

• 한국재료학회지
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• 제12권6호
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• pp.458-463
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• 2002

Carbon nanotubes were synthesized at various conditions using Ni-catalytic thermal chemical vapor deposition method and their characteristic properties were investigated by SEM, TEM and Raman spectroscopy. Carbon nanotubes were formed on very fine Ni-catalytic particles. The carbon nanotubes synthesized by thermal decomposition of acetylene at $700^{\circ}C$ had a coiled shape, while those synthesized at $850^{\circ}C$ showed a curved and Y-shape having a bamboo-like morphology. It was found that the carbon nanotube was also made on the fine Ni-catalytic particles formed on the surface of 100~400nm sized large ones after pretreatment with $NH_3$.ber composites show the high dielectric constant and large conduction loss which is increased with anisotropy of fiber arrangement. It is, therefore, proposed that the glass and carbon fiber composites can be used as the impedance transformer (surface layer) and microwave reflector, respectively. By inserting the foam core or honeycomb core (which can be treated as an air layer) between glass and carbon fiber composites, microwave absorption above 10 dB (90% absorbance) in 4-12 GHz can be obtained. The proposed fiber composites laminates with sandwitch structure have high potential as lightweight and high strength microwave absorbers.