• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.318-318
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• 2012

A graphene layer is most important materials in resent year to enhance the electrical properties of semiconductor device due to high mobility, flexibility, strong mechanical resistance and transparency[1,2]. The resistance switching memory with the graphene layer have been reported for next generation nonvolatile memory device[3,4]. Also, the graphene layer is able to improve the electrical properties of memory device because of the high mobility and current density. In this study, the resistance switching memory device with metal-oxide nano-particles embedded in polyimide layer on the graphene mono-layer were fabricated. At first, the graphene layer was deposited $SiO_2$/Si substrate by using chemical vapor deposition. Then, a biphenyl-tetracarboxylic dianhydride-phenylene diamine poly-amic-acid was spin coated on the deposited metal layer on the graphene mono-layer. Then the samples were cured at $400^{\circ}C$ for 1 hour in $N_2$ atmosphere after drying at $135^{\circ}C$ for 30 min through rapid thermal annealing. The deposition of aluminum layer with thickness of 200 nm was done by a thermal evaporator. The electrical properties of device were measured at room temperature using an HP4156a precision semiconductor parameter analyzer and an Agilent 81101A pulse generator. We will discuss the switching mechanism of memory device with metal-oxide nano-particles on the graphene mono-layer.

• Proceedings of the KSME Conference
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• 2001.11b
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• pp.268-273
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• 2001

A fundamental study on the harvest-type ice storage system applied ice making method in-water and its temperature characteristics in ice storage system was performed experimentally of the charge and discharge of cold. This paper is concerned with the development of a new method for making and separating ice and saving floated ice by installing an evaporation plate at in-water within a storage tank. In a conventional harvest-type ice storage system, a tank saves ice by separating a formed ice from an installed evaporation plate, which is located above an ice storage tank as an ice storage system. A new harvest-type method shows very good heat transfer efficiency than a convectional method. It is because the evaporation panel is directly contacted with water in a storage tank. Also, at a conventional system a circulating pump, a circulating water distributor and a piping are installed, but these components are not necessary in a new method. In this study two kinds of ice storage systems are experimentally investigated to study the thermal characteristics of ice storage tanks.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.15 no.1
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• pp.1-8
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• 2003

An analytical and experimental study of the thermal performance of axial heat pipe with axial groove is conducted to determine the optimal mass of working fluid for the maximum heat transport capacity of heat pipe with axial grooves. Generally, the mass of working fluid has been fully charged by considering only a geometrical shape of axial grooves embedded in a heat pipe. When the heat pipe is operated in a steady state, the meniscus re-cession phenomena of working fluid is occurred in the evaporator region. In this work, the optimal mass of working fluid was obtained from the axial variation of capillary pressure, the radius of curvature and wetting angle of meniscus of liquid-vapor interface. Experimental results were also obtained by varying the mass of working fluid within a heat pipe, and presented for the maximum heat transport capacity corresponding to the operating temperature and the elevation of heat pipe. Finally, the analytical results of the optimal mass of working fluid were compared with those of the experimental mass of working fluid.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.28 no.10
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• pp.408-413
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• 2016

The objective of this study is to investigate the performance of a heat recovery heat pump dryer using a R245fa refrigerant experimentally. In this study, the main components of the heat pump dryer were an evaporator, a compressor, a condenser, and an expansion valve. As a result, when the amount of refrigerant varied from 15 kg to 16 kg, the hot air outlet temperature in the condenser and the heat transfer rate were almost kept constant. Therefore, the amount of refrigerant at 16 kg was considered to be a suitable amount in the heat pump. As the air inlet velocity varied from 0.5 m/s to 1.5 m/s, the highest temperature in the condenser could be obtained when the air inlet velocity was 0.5 m/s. The heat transfer rate, system (COP), and hot air outlet temperature were 5.6 kW, 3.4, and $102.5^{\circ}C$, respectively, when the bypass ratio and water temperature were 0% and $60^{\circ}C$.

• Solar Energy
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• v.19 no.3
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• pp.101-113
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• 1999

Thermodynamic performance of a simple Rankine cycle, regenerative Rankine cycle, and Kalina cycle for Ocean thermal Energy Conversion(OTEC) is evaluated under the same condition with various working fluids. The evaporator and condenser are modeled by a UA and LMTD method while the turbine and pump are modeled by considering isentropic efficiencies. As for the working fluids, R22, R134a, R32, propylene, ammonia are used for the Rankine cycles while ammonia/water and R32/R134a mixtures are used for Kalina cycle. Calculated results show that newly developed fluids such non-ozone depleting refrigerants as R134a and R32 perform as well as R22 and ammonia. The regenerative Rankine cycle showed a 1.2 to 2.8% increase in energy efficiency as compared to the simple Rankine cycle while the Kalina cycle with ammonia/water mixture showed a 1.8% increase in energy efficiency. The efficiency of the Kalina cycle with R32/R134a mixtures is the same as that of a simple Rankine cycle using R22. Therefore, the regenerative Rankine cycle turns out to be best choice for OTEC applications.

• Proceedings of the KSME Conference
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• 2004.04a
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• pp.1400-1405
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• 2004

Experimental study is performed to investigate the effect of heat load and operating temperature on the thermal performance of a heat pipe with screen mesh wick. The heat pipe was designed in 200 screen meshes, 500mm length and 12.7mm O.D tube of copper, water as working fluid(4.8g) and nitrogen as non-condensible gas(NCG). The heat pipe used in this study has evaporator, condenser and adiabatic section, respectively. Experimental data of axial wall temperature distribution is presented for heat transport capacity, the temperature of cooling water of condenser, inclination angle, and operating temperature. For the results from this study, it is found that, for the same charging mass of working fluid, the initial operating temperature and the overall wall temperatures of heat pipe are higher for NCG charging mass of $5.0{\times}10^{-6}kg$ and $3.4{\times}10^{-6}kg$, than that of $1.0{\times}10^{-6}kg$.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.24 no.12
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• pp.823-829
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• 2012

In this study, the performance of mobile air conditioner(MAC) systems to which the refrigerants R134a and R1234yf were used was evaluated to compare the characteristic of automotive refrigeration cycles with refrigerant. The experimental setup of a MAC consists of an belt driven compressor, a condenser, an evaporator and a block type thermal expansion valve. The drop-in test on MAC were carried out under variable compressor speed from 800 to 2500 rpm. Performance test by using R1234yf and R134a in the same system revealed low the charge amount and mass flow rates for using R1234yf, that is, up to 10% and 17%, respectively. The compressor discharge temperature of R1234yf is $8^{\circ}C$ lower than that of R134a. The cooling capacity with R1234yf system decreased by 4~7% compared with R134a system. In addition, The COP of R1234yf system is lower 3~4% than that of R134a system.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05c
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• pp.79-82
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• 2003

a-Se film is known as promising medical X-ray detector material but a-Se as dopanted Tellurium is not available in X-ray detectors. a-Se thick film was grown by vacuum thermal evaporator to $3{\mu}m$ thickness. The characteristics of thick films were analyzed by XRD, U-V Meter, and SEM measurements. Te composition is 0.1, 0.3, 0.5, 0.7g. This paper is fundmental data for phosphor layer's essential parameter that selenium have absorption wavelength along to various Te concentration rate.

• Transactions on Electrical and Electronic Materials
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• v.13 no.1
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• pp.27-30
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• 2012

This paper proposes a micro gas sensor for measuring $H_2S$ gas. This is based on a $SnO_2$-CuO multi-layer thin film. The sensor has a silicon diaphragm, micro heater, and sensing layers. The micro heater is embedded in the sensing layer in order to increase the temperature to an operating temperature. The $SnO_2$-CuO multi layer film is prepared by the alternating deposition method and thermal oxidation which uses an electron beam evaporator and a thermal furnace. To determine the effect of the number of layers, five sets of films are prepared, each with different number of layers. The sensitivities are measured by applying $H_2S$ gas. It has a concentration of 1 ppm at an operating temperature of $270^{\circ}C$. At the same total thickness, the sensitivity of the sensor with multi sensing layers was improved, compared to the sensor with one sensing layer. The sensitivity of the sensor with five layers to 1 ppm of $H_2S$ gas is approximately 68%. This is approximately 12% more than that of a sensor with one-layer.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.241.1-241.1
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• 2013

최근 고집적화된 금속-산화막 반도체 metal oxide semiconductor (MOS) 소자는 크기가 점점 작아짐에 따라 얇은 산화막과 다양한 High-K 물질과 전극에 대하여 연구되고 있다. 이러한 소자의 열적 안정성과 균일성을 얻기 위해 다양한 열처리 방법이 사용되고 있으며, 일반적인 열처리 방법으로는 conventional thermal annealing (CTA)과 rapid thermal annealing (RTA)이 많이 이용되고 있다. 본 실험에서는 microwave radiation에 의한 열처리로 소자의 특성을 개선시킬 수 있다는 사실을 확인하였고, 상대적으로 $100^{\circ}C$ 이하의 저온에서도 공정이 이루어지기 때문에 열에 의한 소자 특성의 열화를 억제할 수 있으며, 또한 짧은 처리 시간 및 공정의 단순화로 비용을 효과적으로 절감할 수 있다. 본 실험에서는 metal-oxide-silicon (MOS) 구조의 capacitor를 제작한 다음, 기존의 CTA나 RTA 처리가 아닌 microwave radiation을 실시하여 MOS capacitor의 전기적인 특성에 미치는 microwave radiation 효과를 평가하였다. 본 실험은 p-type Si 기판에 wet oxidation으로 300 nm 성장된 SiO2 산화막 위에 titanium/aluminium (Ti/Al) 금속 전극을 E-beam evaporator로 형성하여 capacitance-voltage (C-V) 특성 및 current-voltage (I-V) 특성을 평가하였다. 그 결과, microwave 처리를 통해 flat band voltage와 hysteresis 등이 개선되는 것을 확인하였고, microwave radiation 파워와 처리 시간을 최적화하였다. 또한 일반적인 CTA 열처리 소자와 비교하여 유사한 전기적 특성을 확인하였다. 이와 같은 microwave radiation 처리는 매우 낮은 온도에서 공정이 이루어짐에도 불구하고 시료 내에서의 microwave 에너지의 흡수가 CTA나 RTA 공정에서의 열에너지 흡수보다 훨씬 효율적으로 이루어지며, 결과적으로 산화막과 실리콘 기판의 계면 특성 개선에 매우 효과적이라는 것을 나타낸다. 따라서, microwave radiation 처리는 향후 저온공정을 요구하는 nano-scale MOSFET의 제작 및 저온 공정이 필수적인 display 소자 제작의 해결책으로 기대한다.