Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2003.05c
- /
- Pages.79-82
- /
- 2003
Growth of a-Se:Te thick films for Hybrid X-ray sensor technology
Hybrid 형 X선 Sensor 기술을 위한 a-Se:Te 필름의 성장
- Cha, Byung-Youl (InJe University Biomedical Engineering) ;
- Park, Ji-Koon (InJe University Biomedical Engineering) ;
- Choi, Jang-Yong (InJe University Biomedical Engineering) ;
- Kang, Sang-Sik (InJe University Biomedical Engineering) ;
- Kim, Jae-Hyung (College of Biomedical Science and Engineering InJe University) ;
- Nam, Sang-Hee (College of Biomedical Science and Engineering InJe University)
- 차병열 (인제대학교 의용공학과) ;
- 박지군 (인제대학교 의용공학과) ;
- 최장용 (인제대학교 의용공학과) ;
- 강상식 (인제대학교 의용공학과) ;
- 김재형 (인제대학교 의료영상 연구소) ;
- 남상희 (인제대학교 의료영상 연구소)
- Published : 2003.05.16
Abstract
a-Se film is known as promising medical X-ray detector material but a-Se as dopanted Tellurium is not available in X-ray detectors. a-Se thick film was grown by vacuum thermal evaporator to