• 제목/요약/키워드: thermal evaporation

검색결과 779건 처리시간 0.029초

$CeO_2$ 단일 완충층을 이용한 SmBCO 초전도테이프 제조 (Fabrication of SmBCO coated conductors using $CeO_2$ single buffer layers)

  • 김태형;김호섭;하홍수;오상수;양주생;하동우;송규정;이남진;정예현;박경채
    • 한국초전도ㆍ저온공학회논문지
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    • 제8권3호
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    • pp.32-36
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    • 2006
  • Simplification of the buffer architecture in the fabrication of coated conductors is required because the deposition of multi-layers leads to a longer production time and a higher cost of coated conductors. In this study, a single layered buffer deposition of $CeO_2$ for low cost coated conductors has been tried using thermal evaporation technique. l00nm-thick $CeO_2$ layers deposited by thermal evaporation were found to act as a diffusion layer. $0.4{\mu}m$-thick SmBCO superconducting layers were deposited by thermal co-evaporation on the $CeO_2$ buffered Ni-W substrate. Critical current of $55.4 A/cm^2$ was obtained for the SmBCO coated conductors.

대기 분위기에서 열증발법에 의해 성장된 여러 가지 형상의 일차원 MgO 나노구조 (One-Dimensional MgO Nanostructures with Various Morphologies Grown by Thermal Evaporation Method under Atmospheric Environment)

  • 김남우;김진수;이근형
    • 한국재료학회지
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    • 제33권7호
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    • pp.279-284
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    • 2023
  • One-dimensional MgO nanostructures with various morphologies were synthesized by a thermal evaporation method. The synthesis process was carried out in air at atmospheric pressure, which made the process very simple. A mixed powder of magnesium and active carbon was used as the source powder. The morphologies of the MgO nanostructures were changed by varying the growth temperature. When the growth temperature was 700 ℃, untapered nanowires with smooth surfaces were grown. As the temperature increased to 850 ℃, 1,000 ℃ and 1,100 ℃, tapered nanobelts, tapered nanowires and then knotted nanowires were sequentially observed. X-ray diffraction analysis revealed that the MgO nanostructures had a cubic crystallographic structure. Energy dispersive X-ray analysis showed that the nanostructures were composed of Mg and O elements, indicating high purity MgO nanostructures. Fourier transform infrared spectra peaks showed the characteristic absorption of MgO. No catalyst particles were observed at the tips of the one-dimensional nanostructures, which suggested that the one-dimensional nanostructures were grown in a vapor-solid growth mechanism.

가열된 평판위에 매달려 있는 액적의 음향공진에 의한 열 및 물질 전달 촉진에 관한 연구 (Heat and Mass Transfer Enhancement of a pendant droplet on heated horizontal surface by acoustic resonance)

  • 문종훈;강병하
    • 대한설비공학회:학술대회논문집
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    • 대한설비공학회 2005년도 동계학술발표대회 논문집
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    • pp.335-340
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    • 2005
  • Nonlinear and forced oscillations of supported viscous droplet were focused in the present study. The droplet has a free contact line with solid plate and inviscid fluid. Natural frequencies of a pendant droplet have been investigated experimentally by imposing the acoustic wave while the frequency is being increased at a fixed amplitude. The evaporation was observed at atmosphere pressure. The droplet was recorded throughout the entire evaporation process and transient variations of the volume was measured. The evaporation process of oscillating droplet with thermofoil has been also observed to investigate analyzing the resonance effect on the thermal characteristics of droplet. It is found that a pendant droplet shows the resonant behaviors at each mode similar to the theoretical analysis. During imposing the acoustic wave, the pendant droplet makes a rotating motion in its longitudinal axis which is a new shape oscillation mode. The evaporation rate of a pendant droplet at resonant frequency is significantly enhanced.

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Thermal Evaporation법에 의해 제조된 WO3 박막과 NiO-WO3박막의 전기적 특성에 관한 연구 (A Study On the Electrical Characteristic of WO3 and NiO-WO3 Thin Films Prepared by Thermal Evaporation)

  • 나은영;나동명;박진성
    • 전기화학회지
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    • 제8권1호
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    • pp.32-36
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    • 2005
  • 본 연구는 $WO_3$ 박막과 $NiO-WO_3$ 박막을 고진공 저항가열식 thermal evaporation 법으로 (100) n형의 실리콘 단결정 기판 위에 증착시켰고, 막의 결정성 증진을 위하여 공기 중 $500^{\circ}C$에서 30분 동안 열처리하였다. 박막의 결정성 및 결정구조를 분석하기 위해서 X선 회절분석기를 사용하였고, 표면 및 단면 관찰을 위해서는 주사전자현미경을 이용하였다. 그리고 화학 조성 결합에너지는 XPS를 이용하였다. 순수 $WO_3$ 박막의 결정 크기는 $500^{\circ}C$에서 30분 동안 공기중 열처리에 의해서 $0.6{\mu}m$로 성장하였고 $WO_3$ 박막의 두께가 증가할수록 거의 변화 없이 일정하였다. 반면, NiO가 첨가된 $WO_3$ 박막 두께별 결정크기는 각각 $0.12{\mu}m,\;0.28{\mu}m,\;0.32{\mu}m$$0.43{\mu}m$로 순수 $WO_3$ 박막에 비해 치밀한 표면을 형성하였고, 최대 5배정도 성장이 억제되었다. 가스감도 측정은 대기 중에서의 센서 저항 값을 기준으로 측정가스 저항 값의 비율 $(R_{NOx}/R_{air})$로 가스감도를 나타내었다. 전기적 성질은 MFC로 NOx가스 5ppm을 일정히 유지시켰고, Multimeter로 계측하여 컴퓨터에 자동 계측되는 시스템을 사용하였다. 순수 $WO_3$박막보다는 $NiO-WO_3$ 박막이 우수한 NOx 감도특성을 보였고 센서의 작동온도는 $250^{\circ}C$에서 우수한 감도를 나타내었다.

진공 증발법에 의해 제조된 플립 칩 본딩용 솔더의 미세 구조분석 (Microstructure Characterization of the Solders Deposited by Thermal Evaporation for Flip Chip Bonding)

  • 이충식;김영호;권오경;한학수;주관종;김동구
    • 한국표면공학회지
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    • 제28권2호
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    • pp.67-76
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    • 1995
  • The microstructure of 95wt.%Pb/5wt.%Sn and 63wt.%Sn/37wt.%Pb solders for flip chip bonding process has been characterized. Solders were deposited by thermal evaporation and reflowed in the conventional furnace or by rapid thermal annealing(RTA) process. As-deposited films show columnar structure. The microstructure of furnace cooled 63Sn/37Pb solder shows typical lamellar form, but that of RTA treated solder has the structure showing an uniform dispersion of Pb-rich phase in Sn matrix. The grain size of 95Pb/5Sn solder reflowed in the furnace is about $5\mu\textrm{m}$, but the grain size of RTA treated solder is too small to be observed. The microstructure in 63Sn/37Pb solder bump shows the segregation of Pb phase in the Sn rich matrix regardless of reflowing method. The 63Sn/37Pb solder bump formed by RTA process shows more uniform microstructure. These result are related to the heat dissipation in the solder bump.

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Influence of coating and annealing on the luminescence of Ga2O3 nanowires

  • Kim, Hyunsu;Jin, Changhyun;Lee, Chongmu;Ko, Taegyung;Lee, Sangmin
    • Journal of Ceramic Processing Research
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    • 제13권spc1호
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    • pp.59-63
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    • 2012
  • Ga2O3-core/CdO-shell nanowires were synthesized by a two step process comprising thermal evaporation of GaN powders and sputter-deposition of CdO. Transmission electron microscopy (TEM) and X-ray diffraction (XRD) analyses revealed that the cores and the shells of the annealed coaxial nanowires were single crystal of monoclinic Ga2O3 and FCC CdO, respectively. As-synthesized Ga2O3 nanowires showed a broad emission band at approximately 460 nm in the blue region. The blue emission intensity of the Ga2O3 nanowires was slightly decreased by CdO coating, but it was significantly increased by subsequent thermal annealing in a reducing atmosphere. The major emission peak was also shifted from ~500 nm by annealing in a reducing atmosphere, which is attributed to the increases in the Cd interstitial and O vacancy concentrations in the cores.

감압증발법을 이용한 매립장 침출수 처리에 관한 연구 (A Study on Landfill Leachate Treatment by Reduced Pressure Evaporation.)

  • 문추연;은종극;이태호
    • 환경위생공학
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    • 제12권3호
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    • pp.73-79
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    • 1997
  • This research was intended as an investigation of applying Reduced Pressure Evaporation as efficient treatment method for landfill leachate. According to the variance of time, temperature, pressure and pH in experiments, the properties of leachate treatment are follows. The removal efficiencies of COD, NH$_{3}$-N, TOC, Conductivity and SS on the basis of reaction time was 96.4%-97.5%, -1.4%-53.7%, 81.7%-89.0%, 92.0%-95.3% and 99.86%-99.97%, respectively. When the pH of Influent was 7.5, the pH of effluent was increased to 10-11 with time elapse. It is concluded that the orgin of pH increase may be ammonia. When the properties of concentrate were investigated at the concentration ratio 90%(V/V), concentration difficiency represented in the ratio of experimental value/calculated value had following orders ; COD>TOC>NH$_{3}$-N>Conductivity>SS. Concentrate had good precipitation because of additive thermal treatment in the process. When evaporation experiments with pH adjustment of 4.0, 6.0, 7.5, 9.0 and 10.0 were performed ; Acidic evaporation experiments(pH 4.0, 6.0) showed low removal efficiency(81.6, 87.6%) of COD and high removal efficiency (97.5%. 84.6%) of NH$_{3}$-N at initial evaporation. Basic evaporation(pH 9.0, 10.0) showed high removal efficiency (97.2%, 98.9%) of COD and very low removal efficiency (-7.4%, -27.2%) of NH$_{3}$-N at initial evaporation.

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재생증발식 수냉각기의 냉각성능 해석 (Investigation on the Cooling Characteristics of a Regenerative Evaporation Water Cooler)

  • 최봉수;홍희기;이대영
    • 설비공학논문집
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    • 제18권5호
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    • pp.393-401
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    • 2006
  • The regenerative evaporation water cooler is devised and analysed in this study. The regenerative evaporation water cooler is composed of a sensible heat exchanger to cool the incoming air, followed by a latent heat exchanger to cool the water evaporatively with the cooled air flowing out of the sensible heat exchanger. By linearizing psychrometric characteristics, the heat and mass transfer in the regenerative evaporation water cooler is analyzed theoretically. The results show that the water can be cooled down even lower than the wet-bulb temperature of the inlet air. When the inlet air is $32^{\circ}C$ and 20% in relative humidity, and the inlet temperature of the water is $20^{\circ}C$, the regenerative evaporation water cooler provides a larger cooling capacity than the conventional evaporation water cooler if the effectiveness of the latent heat exchanger is higher than 0.6 and that of the sensible heat exchanger is higher than 0.5.

집적회로용 무전해도금 Cu배선재료의 열적 특성에 관한 연구 (Study on the Thermal Properties of the Electroless Copper Interconnect in Integrated Circuits)

  • 김정식;이은주
    • 마이크로전자및패키징학회지
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    • 제6권1호
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    • pp.31-37
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    • 1999
  • 본 연구에서는 집적회로의 배선공정에 적용될 무전해도금된 Cu박막의 열적 특성과 접착특성에 대하여 고찰하였다. 시편은 Si 기판에 MOCVD법으로 TaN 확산방지막을 증착시킨 후 그 위에 무전해도금법으로 Cu 막을 증착시켜 Cu/TaN/Si 구조의 다층박막을 제조하였다. 이렇게 제조된 Cu/TaN/Si 시편을 수소와 Ar 분위기에서 각각 열처리시킨 후 열처리온도에 따른 비저항을 측정함으로써 Cu박막의 열적 안정성을 분석하였다. Cu박막과 TaN확산방지막과의 접착특성을 분석하기 위하여 scratch test를 사용하였으며, TaN 확산방지막에 대한 무전해도금된 Cu배선막의 접착력은 일반적인 Thermal evaporation과 Sputturing 방법으로 증착된 Cu 박막의 경우와 비교함으로써 평가되었다. TaN 박막에 대한 Cu박막의 접착성을 평가하기 위해 scratch test를 행한 결과 무전해도금된 Cu박막의 경우 다른 방법으로 증착된 Cu 박막과 비슷한 접착특성을 나타내었으며, acoustic emission분석과 microscope 관찰 결과 sputtering이나 evaporation 방법으로 증착된 Cu박막 보다 무전해도금된 Cu박막이 상대 적으로 우수한 접착력을 나타내었다.

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비확산 액체질소 풀이 형성된 콘크리트 판의 열전도 모델 평가 (Evaluation of the Heat Conduction Model of Concrete Ground on Which LN2 Non-Spreading Pool Forms)

  • 김명배;;정경열;한용식;조성훈
    • 한국수소및신에너지학회논문집
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    • 제32권5호
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    • pp.365-373
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    • 2021
  • In this study, evaporation of LN2 non-spreading pool on concrete plate was dealt with experimentally. The thermophysical properties of concrete, which is a composite material, were obtained by minimizing the difference between the numerical analysis results obtained from the assumed properties and the results from experiments. The thermal energy required for evaporation of the liquid pool is supplied from the concrete plate and the wall of the container. As a result of the measurement, the thermal energy flowing in from the wall was negligible compared to the one supplied from the concrete plate. It was found that the measured evaporation rate of the liquid pool by the heat energy supplied through the concrete plate agrees well with the PTC model except for the initial section of the experiment. The validity of the semi-infinite assumption and the one-dimensional assumption, which are the main conditions of the PTC model, was also verified through experiments. The evaporation rate model in the non-spreading pool discussed in this study can provide a basic frame for the one in the spreading pool, which is a meaningful result considering that the spreading pool is very realistic compared to the non-spreading pool.