Journal of the Korean institute of surface engineering (한국표면공학회지)
- Volume 28 Issue 2
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- Pages.67-76
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- 1995
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
Microstructure Characterization of the Solders Deposited by Thermal Evaporation for Flip Chip Bonding
진공 증발법에 의해 제조된 플립 칩 본딩용 솔더의 미세 구조분석
Abstract
The microstructure of 95wt.%Pb/5wt.%Sn and 63wt.%Sn/37wt.%Pb solders for flip chip bonding process has been characterized. Solders were deposited by thermal evaporation and reflowed in the conventional furnace or by rapid thermal annealing(RTA) process. As-deposited films show columnar structure. The microstructure of furnace cooled 63Sn/37Pb solder shows typical lamellar form, but that of RTA treated solder has the structure showing an uniform dispersion of Pb-rich phase in Sn matrix. The grain size of 95Pb/5Sn solder reflowed in the furnace is about
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