• Journal of Institute of Control, Robotics and Systems
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• v.12 no.1
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• pp.85-92
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• 2006

A new silicon micro flow sensor with multiple temperature sensing elements was proposed and fabricated in considering wide range flow velocity measuring device. Thermal mass flow sensor measures the asymmetry of temperature profile around the heater which is modulated by the fluid flow. A micro mass flow sensor was normally composed of a central heater and a pair of temperature sensing elements around it. A new 2-D wide range micro flow sensor structure with three pairs of temperature sensing elements and a central heater was proposed and numerically simulated by Finite Difference Formulation to confirm the feasibility of the wide flow range sensor structure. To confirm the simulation result, the new flow sensor was fabricated on silicon substrate and the basic flow sensing properties of the sensor were measured.

• Journal of Sensor Science and Technology
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• v.31 no.3
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• pp.163-167
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• 2022

In this study, we investigated a carbon nanotube (CNT) film sensor to detect hazardous and noxious substances distributed in seawater. The response change of the sensor was studied according to environmental temperature, and its temperature coefficient of resistance (TCR, α) was measured. The temperature of the CNT film (~50 ㎛) was in the range of 20-50 ℃, and αCNT was calculated to be -0.0011 %/ ℃. We experimentally confirmed that the CNT film had a smaller TCR value than that of the conventional sensor. Therefore, we investigated the response change of the CNT sensor according to temperature. The CNT sensor showed a relatively small error of approximately 2.3 % up to 30 ℃, which is within the temperature range of the seawater of the Korean Peninsula. However, when the temperature exceeded 40 ℃, the error in the CNT sensor increased by more than 5.2 %. We fabricated a metal oxide (ITO, indium-tin-oxide) film and compared its performance with that of the CNT sensor. The ITO sensor showed an error of >12.5 % at 30 ℃, indicating that in terms of the stability of the sensor to temperature, the CNT film sensor has superior performance.

• Progress in Superconductivity and Cryogenics
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• v.14 no.4
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• pp.46-49
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• 2012

The selection of the temperature sensor in the cryogenic system depends on the temperature range, shape and accuracy. The accuracy of the temperature sensor is essential to improve the reliability of experiment. We have developed the variable temperature cryostat using a two-stage cryocooler. In order to reduce heat load, thermal shield is installed at the first stage with MLI (Multiple layer insulation). We have also developed the sensor holder calibrating more than twenty sensors at the same time for saving time and money. The system can calibrate sensor at variable temperature by controlling electric heater. In this paper, we present design and fabrication of variable temperature cryostat and representative result of Cernox sensor calibration.

• Journal of Sensor Science and Technology
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• v.31 no.6
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• pp.428-432
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• 2022

In this study, we describe the improvement of the resolution of a paper-based sensor by fabricating a high-concentration ninhydrin part using a low-temperature drying method to detect proline with high resolution. In the conventional paper-based sensor for detecting proline, the ninhydrin part is fabricated at room temperature, and in this process, the ninhydrin solution spreads around the ninhydrin part. Therefore, the concentration of the ninhydrin part becomes lower than that of the applied solution, lowering the resolution of the sensor. The proposed paper-based sensor better improved the sensitivity of the sensor compared to the existing sensor by fabricating a high-concentration ninhydrin part through drying the ninhydrin solution using a low-temperature drying method. Owing to the experiment, the intensity of the green color of the paper-based sensor with the integrated ninhydrin part fabricated at 10 ℃ is approximately 20% lower than the paper-based sensor with an integrated ninhydrin part fabricated at room temperature, indicating better sensor resolution. Therefore, the paper-based sensor with an integrated ninhydrin part fabricated at a high concentration could be useful for diagnosing drought.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07a
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• pp.147-150
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• 2003

In this paper, We fabricated a high temperature pressure sensor using SBD(silicon- direct-bonding) wafer of $Si/SiO_2$/Si-sub structure. This sensor was very sensitive because the piezoresistor is fabricated by single crystal silicon of the first layer of SDB wafer. Also, it was possible to operate the sensor at high temperature over $120^{\circ}C$ which is the temperature limitation of general silicon sensor because the piezoresistor was dielectric isolation from silicon substrate using silicon dioxide of the second layer. The sensitivity of this sensor is very high as the measured result of D2200 shows $183.6\;{\mu}V/V{\cdot}kPa$. Also, the output characteristic of linearity was very good. This sensor was available at high temperature as $300^{\circ}C$.

• Journal of Sensor Science and Technology
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• v.13 no.3
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• pp.175-181
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• 2004

A pressure sensor for high temperature was fabricated by using a SDB(Silicon-Direct-Bonding) wafer with a Si/$SiO_{2}$/ Si structure. High pressure sensitivity was shown from the sensor using a single crystal silicon of the first layer as a piezoresistive layer. It also was made feasible to use under the high temperature as of over $120^{\circ}C$, which is generally known as the critical temperature for the general silicon sensor, by isolating the piezoresistive layer dielectrically and thermally from the silicon substrate with a silicon dioxide layer of the second layer. The pressure sensor fabricated in this research showed very high sensitivity as of $183.6{\mu}V/V{\cdot}kPa$, and its characteristics also showed an excellent linearity with low hysteresis. This sensor was usable up to the high temperature range of $300^{\circ}C$.

• Journal of Power System Engineering
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• v.10 no.4
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• pp.43-49
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• 2006

Nowadays, the thermal environments of classrooms are usually adjusted by the ceiling type air-conditioning system with a temperature sensor installed on inlet of an air-conditioner. However, it is not clear that the conventional temperature sensor position is proper to satisfy both thermal comport and energy saving in summer especially. Therefore, this study is aimed at finding out the best position of the temperature sensor on the purpose of the comfort thermal environment and energy saving. The different 5 positions for the temperature sensor are supposed in this paper to analyze thermal environment by CFD. From the analysis through the CFD simulations, the best position of the temperature sensor satisfying for both comfort thermal environment and energy saving is obtained.

• JSTS:Journal of Semiconductor Technology and Science
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• v.17 no.1
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• pp.29-34
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• 2017

A CMOS-based temperature sensor is proposed for low-voltage and low-power on-chip thermal monitoring applications. The proposed temperature sensor converts a proportional to absolute temperature (PTAT) current to a PTAT frequency using an integrator and hysteresis comparator. In addition, it operates in the subthreshold region, allowing reduced power consumption. The proposed temperature sensor was fabricated in a standard 90 nm CMOS technology. Measurement results of the proposed temperature sensor show a temperature error of between -0.81 and $+0.94^{\circ}C$ in the temperature range of 0 to $70^{\circ}C$ after one-point calibration at $30^{\circ}C$, with a temperature coefficient of $218Hz/^{\circ}C$. Moreover, the measured energy of the proposed temperature sensor is 36 pJ per conversion, the lowest compared to prior works.

• Journal of the Korea institute for structural maintenance and inspection
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• v.7 no.3
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• pp.133-138
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• 2003

As concrete structures are heated, thermal strain can be developed. Because of the boundary conditions, the thermal stress may be arisen. Thermal strain and temperature were measured simultaneously using an optical fiber sensor. Fiber Bragg Grating Sensor(FBG sensor) was used in the measurement. Because it can measure the strains more than two points with one line, it was possible to measure both thermal strain and temperature with one line. To compare data measured by FBG sensor, strain and temperature were measured using strain gauge and thermocouple. The FBG sensor could measure the strain under the temperature greater than $60^{\circ}C$ but strain gauge couldn't. Both the FBG temperature sensor and thermocouple could measure the temperature and the results are related each other linearly.

• Fire Science and Engineering
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• v.28 no.1
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• pp.26-30
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• 2014

A Compensation-type fire detector (CFD) is operated with two functions of a differential-temperature detector and as a fixed-temperature detector. The differential-temperature detector observes a rate of temperature increase, and the fixed-temperature detector measures a given fixed temperature. The differential-temperature detector does not observe the outbreak of fire in slowly increasing temperature conditions, whereas the fixed-temperature detector is not able to observe the outbreak of fire in conditions under predetermined temperature level. We developed a CFD to compensate for weaknesses of both detectors. To compensate for the disadvantages, a sensor of the sensor metal-insulator-transition critical-temperature sensor was used. Temperature coefficient of resistance is the sensitivity for sensor. At $55^{\circ}C$, temperature coefficient of resistance of metal-insulator-transition critical-temperature sensor was 14.15%. Temperature coefficient of resistance of thermistor was about 0.5%. This CFD was operated as two ways that fixed-temperature detector and differential-temperature detector in one sensor.