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http://dx.doi.org/10.5302/J.ICROS.2006.12.1.085

A Micro-Flow Sensor With Multiple Temperature Sensing Elements for Wide Range Flow Velocity Measurement  

Chung Wan-Young (동서대학교 인터넷공학부)
Kim Tae-Yong (동서대학교 인터넷공학부)
Seo Yong-Su (동서대학교 전자공학과)
Publication Information
Journal of Institute of Control, Robotics and Systems / v.12, no.1, 2006 , pp. 85-92 More about this Journal
Abstract
A new silicon micro flow sensor with multiple temperature sensing elements was proposed and fabricated in considering wide range flow velocity measuring device. Thermal mass flow sensor measures the asymmetry of temperature profile around the heater which is modulated by the fluid flow. A micro mass flow sensor was normally composed of a central heater and a pair of temperature sensing elements around it. A new 2-D wide range micro flow sensor structure with three pairs of temperature sensing elements and a central heater was proposed and numerically simulated by Finite Difference Formulation to confirm the feasibility of the wide flow range sensor structure. To confirm the simulation result, the new flow sensor was fabricated on silicon substrate and the basic flow sensing properties of the sensor were measured.
Keywords
micro flow sensor; silicon sensor; wide flow range; mass flow sensor; FDM simulation;
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  • Reference
1 W. J. Tomkins et al., Interfacing sensors to the IBM PC, Prentice-Hall, Inc., chap. 7, pp. 183-224, 1998
2 F. Mayer, A. Haberli, H. Jacobs, G. Ofner, O. Paul, H. Baltes, 'Single-chip CMOS anemometer,' Proceedings of the IEDM, 7-10 December 1997   DOI
3 J. P. Holman, Heat Transfer in S1 Units (7th ed), McGRAW-HILL, 1992
4 C. A. J. Fletcher, Computational for Fluid Dynamics, I Fundamental and General Techniques (2nd. ed), Springer-Verlag, 1993
5 김태용, 자바 애플릿 프로그래밍, (도서출판)에이포미디어, 2004
6 R. Kersjes, W. Mokwa, 'A fast liquid flow sensor with thermal by oxide-filled trenches,' Sensors and Actuators A, vol. 46/47, pp. 373-379, 1995   DOI   ScienceOn
7 M. Richter, A. Park, J. Naundorf, M. Eberl, H. Leeuwis, P. Woias, A. Steckenborn, 'A chemical microanalysis system as a microfluid system demonstrator,' Transducer' 97, Cicago, 16-19 June 1997, pp. 303-306   DOI
8 정완영, '유체흐름 감지 디바이스 및 그 제조방법,' 특허출원 10-2003-44639(출원일 2003.7.2)
9 W.-Y. Chung, J.-W. Lim, and D.-D. Lee, 'Studies on thermal properties of a micro gas sensing element array with central single heater,' Sensors and Actuators B, vol. 83, pp. 281-284, March 2002   DOI   ScienceOn
10 W.-Y. Chung, et al., 'Thermal and gas-sensing properties of planar-type micro gas sensor,' Sensors and Actuators B, vol. 64(1-3), pp. 118-123, June 2000   DOI   ScienceOn
11 W.-Y. Chung, 'Design and fabrication of micro gas sensors with a metal oxide sensing layer,' Ph.D thesis in Kyushu Univ., Japan, 1998
12 E. Yoon, K. D. Wise, 'An integrated mass flow sensor with on-chip CMOS interface circuitry,' IEEE Trans. Electron Devices, vol. 39(6), pp. 1376-1386, 1992   DOI   ScienceOn
13 L. Castaner, V. Jimenez, M. Dominguez, F. Masana, 'Using microsystems technology for flow sensoring in home appliances,' IEEE Circuits and Devices, January 1997, pp. 14-18   DOI
14 M. Elwenspoek, 'Thermal flow micro sensors,' Proc. of IEEE Semiconductor Conference, vol. 2, pp. 423-435, October 1999   DOI