• 제목/요약/키워드: target materials

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Composite target으로 증착된 Ti-silicide의 형성에 관한 연구(I) (The Study of Formation of Ti-silicide deposited with composite target(I))

  • 최진석;강성건;황유상;백수현;김영남;정재경;문환구;심태언;이종길
    • 한국재료학회지
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    • 제1권3호
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    • pp.168-174
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    • 1991
  • Ti-Silicides를 single-Si wafer와 그 위에 oxide를 성장시킨 기판위에 composite target($TiSi_{2.6}$)을 sputtering함으로써 증착시켰다. 증착된 비정질 상태의 Ti-silicide는 급속 열처리(RTA)방법으로 $600^{\circ}C$에서 $850^{\circ}C$가지 20초간 처리하였다. RTA온도가 $800^{\circ}C$가 되어서야 비로소 안정한 $TiSi_2$가 형성되었으며, 그 때의 비저항 값은 $27~29{\mu}\Omega-cm$로 Ti-metal reactive방법에 의한 $TiSi_2$보다 약간 높은 값으로 드러났다. X-ray로 상천이를 조사한 결과 역시 $750^{\circ}C$가지 C49 $TiSi_2$가 형성되고, $800^{\circ}C$가 되어서야 안정한 C54 $TiSi_2$로의 상천이가 일어남을 나타내고 있다. 또한 완전히 형성된 Ti-silicide의 조성비는 x-ray photoelectron spectroscopy(XPS)결과에서 Ti : Si이 1 : 2로 드러났으며, 그 동안 reactive 시켰을 때 $TiSi_2$의 단점으로 지적되어 왔던 형성 완료된 $TiSi_2$의 surface roughness는 $17{\pm}1mm$이내로 매우 우수한 값으로 판명되어, device에 대한 응용 가능성을 높이고 있다.

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Controlling the surface energy and electrical properties of carbon films deposited using unbalanced facing target magnetron sputtering plasmas

  • Javid, Amjed;Kumar, Manish;Yoon, Seok Young;Lee, Jung Heon;Han, Jeon Geon
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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    • pp.231.1-231.1
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    • 2015
  • Surface energy, being an important material parameter to control its interactions with the other surfaces plays a key role in bio-related application. Carbon films are found very promising due to their characteristics such as wear and corrosion resistant, high hardness, inert, low resistivity and biocompatibility. The present work deals with the deposition of carbon films using unbalanced facing target magnetron sputtering technique. The discharge characteristics were studied using optical emission spectroscopy and correlated with the film properties. Surface energy was investigated through contact angle measurement. The ID/IG ratio as calculated from Raman spectroscopy data increases with the increase in power density due to the higher number of sp2 clusters embedded in the amorphous matrix. The deposited films were smooth and homogeneous as observed by Atomic force microscopy having RMS roughness in the range of 1.74 to 2.25 nm. It is observed that electrical resistivity and surface energy varies in direct proportionality with operating pressure and has inverse relation with power density. The surface energy results clearly exhibited that these films can have promising applications in cell cultivation.

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산업안전보건법 특별관리물질의 추가 지정방법 및 후보물질 권고에 관한 연구 (A Study on the Recommendation of the Candidate Substances and Methods for an Additional Designation of Special Management Materials in Occupational Safety and Health Act(OSHA))

  • 이권섭;홍문기;이혜진;변상훈;박정선
    • 한국산업보건학회지
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    • 제24권1호
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    • pp.91-102
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    • 2014
  • Objectives: This study was performed in order to devise a procedure for supplementing the Special Management Materials in the Occupational Safety and Health Act and recommend candidate materials. The results are expected to be used as fundamental data for classification and criteria necessary to manage Special Management Materials in workplaces. Also, they are expected to be used as a basis for selecting target materials to nominate as additional Special Management Material. Methods: We investigated the selection standards for candidates and review ranges of data sources to nominate Special Management Materials. The substances classified as GHS(Globally Harmonized System of classification and labeling of chemicals) category 1A(known to have carcinogenic potential and reproductive toxicity for humans) or 1B(presumed to have carcinogenic potential and reproductive toxicity for humans) carcinogens and reproductive toxicants among the Controlled Hazardous Substances of the Regulation on Occupational Safety and Health Standards and substances with OELs(Occupational Exposure Limits) were inspected as the candidates for Special Management Materials. Conclusions: A seven-step procedure for selecting candidates to designate as Special Management Materials was suggested, including the setting of target chemicals for evaluation, classification of CMR(Carcinogens, Mutagens or Reproductive toxicants) by GHS classification and criteria, suggestion and selection of the candidates, and more. This study recommends 58 chemicals as qualified candidates to supplement the Special Management Materials.

RELIABILITY-BASED DESIGN OPTIMIZATION OF AUTOMOTIVE SUSPENSION SYSTEMS

  • Chun, H.H.;Kwon, S.J.;Tak, T.
    • International Journal of Automotive Technology
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    • 제8권6호
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    • pp.713-722
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    • 2007
  • Design variables for suspension systems cannot always be realized in the actual suspension systems due to tolerances in manufacturing and assembly processes. In order to deal with these tolerances, design variables associated with kinematic configuration and compliance characteristics of suspensions are treated as random variables. The reliability of a design target with respect to a design variable is defined as the probability that the design target is in the acceptable design range for all possible values of the design variable. To compute reliability, the limit state, which is the boundary between the acceptable and unacceptable design, is expressed mathematically by a limit state function with value greater than 0 for acceptable design, and less than 0 for unacceptable design. Through reliability analysis, the acceptable range of design variables that satisfy a reliability target is specified. Furthermore, through sensitivity analysis, a general procedure for optimization of the design target with respect to the design variables has been established.

Optimal Target Reliability of Bridges Based on Minimum Life-Cycle Cost Consideration

  • Wang, Junjie;Lee, J-C
    • Computational Structural Engineering : An International Journal
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    • 제2권1호
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    • pp.11-17
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    • 2002
  • Cost-effectiveness in design is considered for determining the target reliability of concrete bridges under seismic actions. This objective can be achieved based on the economic optimization of the expected life-cycle cost of a bridge, which includes initial cost, direct losses, and indirect losses of a bridge due to strong earthquakes over its lifetime. A separating factor is defined to consider the redundancy of a transportation network. The Park-Ang damage model is employed to define the damage of a bridge under seismic action, and a Monte Carlo method based on the DRAIN-2DX program is developed to assess the failure probability of a bridge. The results for an example bridge analyzed in this paper show that the optimal target failure probability depends on the traffic volume carried by the bridge and is between 1.0×10/sup -3/ to 3.0×10/sup -3/ over a life of 50 years.

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대면적 마그네트론 스퍼터링 증착장비의 수냉시스템 방열성능 해석 (Cooling Performance Analysis of Water-Cooled Large Area Magnetron Sputtering System)

  • 김경진
    • 반도체디스플레이기술학회지
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    • 제9권2호
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    • pp.111-116
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    • 2010
  • In a large area magnetron sputtering system, which is under the influence of high heat load from the plasma, it is necessary to use the effective water cooling in order to maintain the proper deposition performance and the economic use of target materials. A series of three-dimensional numerical simulations are carried out on the simplified model of the large area magnetron sputtering system with the cooling plate that includes the U-shaped water channel. The analysis is focused on the effects of water channel geometry, cooling water flowrate, thermal conductivity of target material, and the degree of target erosion on the cooling performance of cooling plate, which is represented by the temperature distribution of target material.

Thermal study of a scanning beam in granular flow target

  • Ping Lin;Yuanshuai Qin;Changwei Hao;Yuan Tian ;Jiangfeng Wan ;Huan Jia ;Lei Yang ;Wenshan Duan ;Han-Jie Cai ;Sheng Zhang
    • Nuclear Engineering and Technology
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    • 제54권11호
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    • pp.4310-4321
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    • 2022
  • The concept of dense granular-flow target (DGT) for the China Initiative Accelerator Driven Subcritical system (CiADS) is an attractive choice for high heat removal ability, low chemical toxicity, and radiotoxicity. A wobbling hollow beam is proposed to enhance the homogeneity of temperature rise of flowing particles in beam-target coupling zone. In this paper, the design procedure of target and beam parameters was discussed firstly. Then we simulated the heat deposition and transfer of the scanning beam in DGT to study the effect of beam parameters. The results show the flux density of proton beam plays a crucial role in the distribution of temperature rise while the contributions from scanning frequency heat transfer are also obvious. Moreover, heat transfer in transversal directions is insignificant, resulting in a low heat flux towards the sidewalls of DGT. This work not only contributes to the design of DGT, but also beneficial for understanding the beam-target coupling in porous materials.

Laser Ablation법에 의한 ZrVFe 합금 나노분말 제조 (Preparation of ZrVFe Nano Powders by Laser Ablation)

  • 길대섭;서용재;장희동;이재천;송창빈;김원백
    • 한국재료학회지
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    • 제15권4호
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    • pp.257-262
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    • 2005
  • Nano-sized ZrVFe alloy powders were prepared by the ablation of powder compact in alcobol using a Nd-YAG pulsed Laser. The $Zr_{57}V_{35.}8Fe_{7.2}$ alloy commercially designated as ST707 has long been known as the ideal solution for various vacuum applications. The target for the ablation was sintered pellets of $Zr_{57}V_{35.}8Fe_{7.2}$ alloy powder. The alloy was prepared by arc melting and Hydride-DeHydride method. The ablated powders were mostly circular having fairly large size distribution smaller than 200 nm in all cases. The X-ray diffraction study revealed that the ablated alloy retained the crystal structure of the target alloy. Nevertheless, Fe and V contents in the ablated powder were lower than those in the target alloy. This was believed to result from the high vapour pressures of Fe and V compared to that of Zr. The size of the powders ablated at high energy fluence tends to decrease due at least partly to the breakdown of previously made ones.