• 제목/요약/키워드: target materials

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RF 스퍼터링용 Hydroxyapatite 타겟의 제조 및 Hydroxyapatite/Ti-6Al-4V 합금 박막의 특성(I) (The Fabrication of Hydroxyapatite Targets and the Characteristics of Hydroxyapatite/Ti-6Al-4V Alloy Thin Films by RF Sputtering(I))

  • 정찬회;김명한
    • 한국재료학회지
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    • 제13권4호
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    • pp.205-212
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    • 2003
  • RF sputtering process was applied to produce thin hydroxyapatite[HA, Ca10($PO_4$)$_{6}$ $ (OH)_2$films on Ti-6Al-4V alloy substrates. To make a 101.6 mm dia.${\times}$5 mm HA target, the commercial HA powder was first calcinated for 3h at $200^{\circ}C$. A certain amount of the calcinated HA powder was pressed under a pressure of 20,000 psi by the cold isostatic press(CIP) and the pressed HA target was sintered for 6 h at $1,200^{\circ}C$. The effects of different heat treating conditions on the bonding strength between HA thin films and Ti-6Al-4V alloy substrates were studied. Before deposition, the alloy substrates were annealed for 1 h at $850^{\circ}C$ under $3.0${\times}$10^{-3}$ Xtorr, and after deposition, the hydroxyapatite/Ti-6Al-4V alloy thin films were annealed for 1 h at 400, 600 and $800^{\circ}C$ under the atmosphere, respectively. Experimental results represented that the HA thin films on the annealed substrates had higher hardness than non-heat treated substrates before the deposition.

건축자재의 산화티타늄 코팅을 통한 휘발성 유기화합물 분해 (Destruction of Volatile Organic Compounds Using Photocatalyst-Coated Construction Materials)

  • 조완근;전희동
    • 한국환경과학회지
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    • 제14권8호
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    • pp.785-792
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    • 2005
  • In order to reduce roadside and indoor air pollution for volatile organic compounds VOC), it may be necessary to apply photocatalyst-coated construction materials. This study evaluated the technical feasibility of the application of $TiO_2$ photocatalysis for the removal of VOC present in roadside or indoor air. The photocatalytic removal of five target VOC was investigated: benzene, toluene, ethyl benzene and o,m,p-xylenes. Variables tested for the current study included ultraviolet(UV) light intensity coating materials, relative humidity (RH), and input concentrations. Prior to performing the parameter tests, adsorption of VOC onto the current experiment was surveyed, and no adsorption was observed. Stronger UV intensity provided higher photocatalytic destruction(PCD) efficiency of the target compounds. For higher humidity, higher PCD efficiency was observed. The PCD efficiency depended on coating material. Contrary to certain previous findings, lower PCD efficiencies were observed for the experimental condition of higher input concentrations. The current findings suggested that the four parameters tested in the present study should be considered for the application of photocatalyst-coated construction materials in cleaning VOC of roadside or indoor air.

Catalytic growth of single wall carbon nanotubes by laser vaporization and its purification and The carbon nanotube growth on the Si substrate by CVD method

  • Lee, Sung won;Jung in Sohn;Lee, Seonghoon
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2000년도 제18회 학술발표회 논문개요집
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    • pp.213-213
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    • 2000
  • Direct laser vaporization of transition-metal(Co, Ni)/graphite composite pellet produced single wall carbon naotubes(SWNT) in the condensing vapor in a heated flow cylinder-type tube furnace, Transition metal/graphite composite pellet target was made by mixing graphite, Co, and Ni in 98:1:1 atomic weight ratios, pressing the mixed powder, and curing it. The target was placed in a tube furnace maintained at 1200$^{\circ}C$ and Ar inert collision gas continuously flowed into the tube. The 2nd harmonic, 532nm wavelength light from Nd-YAG laser was used to vaporize the tube. The carbon nanotubes produced by the laser vaporization were accumulated on quartz tube wall. The raw carbon nanotube materials were purified with surfactants(Triton X-100) in a ultrasonicator. These carbon nanotubes were analyzed using SEM, XRD, and Raman spectroscopic method. The carbon nanotube growth on the Ni-patterned Si substrate was investigated by the CVD process. Transition-metal, Ni and CH4 gas were used as a catalyst and a reactant gas, respectively. The structure and the phonon frequencies of the carbon nanotubes formed on the patterned Si substrate were measured by SEM and Raman spectrometer.

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DC, RF 마그네트론 코스퍼터링법으로 증착한 ZTO/GZO 투명전도성막의 열처리 조건이 박막의 물성에 미치는 영향 (Effect of Annealing on the Electrical Property and Water Permeability of ZTO/GZO Double-layered TCO Films Deposited by DC, RF Magnetron Co-sputtering)

  • 오성훈;강세원;이건환;정우석;송풍근
    • 한국표면공학회지
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    • 제45권3호
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    • pp.117-122
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    • 2012
  • ZTO/GZO double layered films were prepared on unheated non-alkali glass substrates. ZTO films were deposited by RF/DC hybrid magnetron co-sputtering using ZnO (RF) target and $SnO_2$ (DC) targets, and then GZO films were deposited by DC magnetron sputtering using an GZO ($Ga_2O_3$:5.57 wt%) target. These films were post-annealed at temperature of 200, $300^{\circ}C$ in air and vacuum ambient for 30 min. In the case of post-annealing in air, ZTO/GZO double layer showed relatively low resistivity change, compared to GZO single layer. Furthermore, ZTO/GZO double layer revealed low WVTR, compared to GZO single layer. Therefore, it can be confirmed that ZTO film doing a role with barrier for water or oxygen diffusion.

Failure and Phase Transformation Mechanism of Multi-Layered Nitride Coating for Liquid Metal Injection Casting Mold

  • Jeon, Changwoo;Lee, Juho;Park, Eun Soo
    • 한국재료학회지
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    • 제31권6호
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    • pp.331-338
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    • 2021
  • Ti-Al-Si target and Cr-Si target are sputtered alternately to develop a multi-layered nitride coating on a steel mold to improve die-casting lifetime. Prior to the multi-layer deposition, a CrN layer is developed as a buffer layer on the mold to suppress the diffusion of reactive elements and enhance the cohesive strength of the multi-layer deposition. Approximately 50 nm CrSiN and TiAlSiN layers are deposited layer by layer, and form about three ㎛-thickness of multi-layered coating. From the observation of the uncoated and coated steel molds after the acceleration experiment of liquid metal injection casting, the uncoated mold is severely eroded by the adhesion of molten metallic glass. On the other hand, the multi-layer coating on the mold prevents element diffusion from the metallic glass and mold erosion during the experiment. The multi-layer structure of the coating transforms the nano-composite structured coating during the acceleration test. Since the nano-composite structure disrupts element diffusion to molten metallic glass, despite microstructure changes, the coating is not eroded by the 1,050 ℃ molten metallic glass.

High Functional $GdB_2C_3O_{7-x}$ Thin Films Fabricated by Pulsed Laser Deposition

  • Song, S.H.;Ko, K.P.;Song, K.J.;Moon, S.H.;Yoo, S.I.
    • 한국초전도ㆍ저온공학회논문지
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    • 제8권4호
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    • pp.15-18
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    • 2006
  • REBCO coated conductors (RE: rare earth elements) have recently drawn great attention since they are known to possess stronger flux pinning centers in high magnetic fields compared with YBCO coated conductors. In this study, $GdBa_2Cu_3O_{7-d}(GdBCO)$ was selected to investigate the influence of the distance between target and substrate and substrate temperature on the superconducting properties of GdBCO films on the $SrTiO_3(100)$ substrate. Samples were fabricated by pulsed laser deposition (PLD) with a Nd:YAG laser (355nm). Under a given oxygen pressure of 800mTorr, we changed the distance between target and substrate from 5.5cm to 7.0cm and the substrate temperature from $750^{\circ}C\;to\;850^{\circ}C$. The crystallinity and texture of GdBCO films were analyzed by X-ray diffraction (XRD), and the surface morphology was observed by the scanning electron microscopy (SEM). Tc and Jc values were measured by the four point probe method. High quality GdBCO films with Tc of 89.7K and Jc over $1MA/cm^2$ at 77 K in self field were successfully fabricated by optimizing processing parameters. The detailed processing conditions, microstructure and superconducting properties will be presented for a discussion.

Failure analysis of damaged tungsten monoblock components of upper divertor outer target in EAST fusion device

  • Kang Wang;Ya Xi;Xiang Zan;Dahuan Zhu;Laima Luo;Rui Ding;Yucheng Wu
    • Nuclear Engineering and Technology
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    • 제56권6호
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    • pp.2307-2316
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    • 2024
  • A melting failure of W monoblock components of the upper divertor outer target in EAST occurred during the plasma campaigns in 2019. The failure characters and microstructure evolution of the failed W monoblock have been well investigated on one string (W436 string). Near the strike point region where heat flux density is highest, macroscopic cracks and severe surface damage such as dimensional change, melting and solidification are visible in several W monoblocks. At the same time, debonding, melting and migration of Cu/CuCrZr cooling tube components introduced fatal damage to the structure and function. The heat-induced microstructure evolution in the rest part has been examined via hardness tests and metallography. From the heat flux surface to the cooling tube, hardness increased gradually and the recrystallized grains could be found in the region with the highest temperature, while recrystallization grains also appear in some W monoblocks near the cooling tube area. The detailed microstructure has been investigated by metallography and EBSD. Such cases in EAST provide experiences on the extreme condition of accidental loss of coolant or higher discharge power in future devices.

대향식 스퍼터링법으로 증착된 ITO 양극 위에 제작된 OLED 성능 (Performance of OLED Fabricated on the ITO Deposited by Facing Target Sputtering)

  • 윤철;김상호
    • 한국표면공학회지
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    • 제41권5호
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    • pp.199-204
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    • 2008
  • Indium tin oxide (ITO) has been commonly used as an anode for organic light emitting diode (OLED), because of its relatively high work function, high transmittance, and low resistance. The ITO was mostly deposited by capacitive type DC or RF sputtering. In this study we introduced a new facing target sputtering method. On applying this new sputtering method, the effect of fundamental deposition parameters such as substrate heating and post etching were investigated in relation to the resultant I-V-L characteristics of OLED. Three kinds of ITOs deposited at room temperature, at $400^{\circ}C$ and at $400^{\circ}C$ with after surface modification by $O_2$ plasma etching were compared. The OLED on ITO deposited with substrate heating and followed by etching showed better I-V-L characteristics, which starts to emit light at 4 volts and has luminescence of $65\;cd/m^2$ at 9 volts. The better I-V-L characteristics were ascribed to the relevant surface roughness with uniform micro-extrusions and to the equi-axed micromorphology of ITO surface.

유방촬영장치의 타깃에 따른 에너지스펙트럼 및 팬텀영상화질 (The energy spectrum and phantom image quality according to mammography target-filter combinations)

  • 장세영;오왕균;박종배;진계환
    • 한국방사선학회논문지
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    • 제7권1호
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    • pp.51-55
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    • 2013
  • 엑스선의 에너지가 높으면 엑스선이 피사체(object)를 통과하여 영상의 대조도를 떨어뜨리고 엑스선의 에너지가 낮으면 영상의 대조도는 증가시키지만 엑스선이 피사체에 흡수되어 환자의 피폭선량을 증가시킨다. 그러므로 적정한 엑스선 에너지는 영상의 질과 피폭선량에 영향을 미치는 매우 중요한 요소이다. 본 논문에서는 새로운 양극물질을 사용하는 유방촬영 장치의 도입에 따라 방사선 선질이 다양해진 유방촬영장치의 영상품질관리와 환자선량관리을 위하여 유방촬영장치의 타겟 물질에 따른 에너지스펙트럼을 시뮬레이션하고 팬텀 영상의 화질을 비교하였다.

Feasibility of Indium Tin Oxide (ITO) Swarf Particles to Transparent Conductive Oxide (TCO)

  • Hong, Sung-Jei;Yang, DuckJoo;Cha, Seung Jae;Lee, Jae-Yong;Han, Jeong-In
    • Current Photovoltaic Research
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    • 제3권2호
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    • pp.50-53
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    • 2015
  • Indium (In) is widely used for transparent electrodes of photovoltaics as a form of indium tin oxide (ITO) due to its superior characteristics of environmental stability, relatively low electrical resistivity and high transparency to visible light. However, In has been worn off in proportion to growth the In related market, and it leads to raise of price. Although In is obtained from ITO target scarps, much harmful elements are used for the recycling process. To decrease of harmful elements, ITO swarf particles obtained from target scraps was characterized whether it is feasible to transparent conductive oxide (TCO). The ITO swarf was crushed with milling process, and it was mixed with new ITO nanoparticles. The mixed particles were well dispersed into ink solvent to make-up an ink, and it was well coated onto glass substrate. After heat-treatment at $400^{\circ}C$ under $N_2$ rich environments, optical transmittance at 550 nm and sheet resistance of the ITO ink coated layer was 71.6% and $524.67{\Omega}/{\square}$, respectively. Therefore, it was concluded that the ITO swarf was feasible to TCO of touch screen panel.