• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.229.1-229.1
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• 2014

Tactile sensors have widely been researched in the areas of electronics, robotic system and medical tools for extending to the form of bio inspired devices that generate feeling of touch mimicking those of humans. Recent efforts in adapting the tactile sensor have included the use of novel materials with both scalability and high sensitivity [1]. Graphene, a 2-D allotrope of carbon, is a prospective candidate for sensor technology, having strong mechanical properties [2] and flexibility, including recovery from mechanical stress. In addition, its truly 2-D nature allows the formation of continuous films that are intrinsically useful for realizing sensing functions. However, very few investigations have been carrier out to investigate sensing characteristics as a device form with the graphene subjected to strain/stress and pressure effects. In this study, we present a sensor of vertical forces based on single-layer graphene, with a working range that corresponds to the pressure of a gentle touch that can be perceived by humans. In spite of the low gauge factor that arises from the intrinsic electromechanical character of single-layer graphene, we achieve a resistance variation of about 30% in response to an applied vertical pressure of 5 kPa by introducing a pressure-amplifying structure in the sensor. In addition, we demonstrate a method to enhance the sensitivity of the sensor by applying resistive single-layer graphene.

• 한국정밀공학회지
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• 제31권8호
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• pp.683-688
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• 2014

This paper presents a high-performance flexible tactile sensor based on inorganic silicon flexible electronics. We created 100 nm-thick semiconducting silicon ribbons equally distributed with 1 mm spacing and $8{\times}8$ arrays to sense the pressure distribution with high-sensitivity and repeatability. The organic silicon rubber substrate was used as a spring material to achieve both of mechanical flexibility and robustness. A thin copper layer was deposited and patterned on top of the pressure sensing layer to create a flexible temperature sensing layer. The fabricated tactile sensor was tested through a series of experiments. The results showed that the tactile sensor is capable of measuring pressure and temperature simultaneously and independently with high precision.

• 제어로봇시스템학회논문지
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• 제21권6호
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• pp.583-588
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• 2015

Flexible tactile sensors can provide valuable feedback to intelligent robots regarding the environment around them. This is especially important when robots such as, service robots share a workspace with humans. This paper presents a contact force measurement algorithm of a flexible tactile sensor. This sensor is manufactured by a direct-writing technique, which is one 3D printing method, using multi-walled carbon nano-tubes. An analog signal processing circuit has been designed and implemented to reduce noise contained in the sensor output. In addition, a digital version of the Butterworth filter was implemented by software running on a microcontroller. Through various experiments, characteristics of the sensor system have been identified. Based on three traits, an algorithm to detect the contact and measure the contact force has been developed. The entire system showed a promising prospect to detect the contact over a large and curved area.

• 제어로봇시스템학회논문지
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• 제18권3호
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• pp.188-192
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• 2012

In this study, a carbon nanotube (CNT) flexible strain sensor was fabricated with CNT based epoxy and rubber composites for tactile sensing. The flexible strain sensor can be fabricated as a long fibrous sensor and it also may be able to measure large deformation and contact information on a structure. The long and flexible sensor can be considered to be a continuous sensor like a dendrite of a neuron in the human body and we named the sensor as a biomimetic artificial neuron. For the application of the neuron in biomimetic engineering, an ANMS (Artificial Neuron Matrix System) was developed by means of the array of the neurons with a signal processing system. Moreover, a strain positioning algorithm was also developed to find localized tactile information of the ANMS with Labview for the application of an artificial e-skin.

• JSTS:Journal of Semiconductor Technology and Science
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• 제5권1호
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• pp.11-16
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• 2005

This paper presents fabrication process and experimental results of two different types of flexible MEMS biosensors based on polymer/metal multilayer processing techniques. One type of a biosensor is a microelectrode array (MEA) for nerve signal monitoring through implanting the MEA into a living body, and another is a tactile sensor capable of being mounted on an arbitrary-shaped surface. The microelectrode array was fabricated and its electrical characteristics have been examined through in vivo and in vitro experiment. For sensitive skin, flexible tactile sensor array was fabricated and its sensitivity has been analyzed. Mechanical flexibility of these biosensors has been achieved by using a polymer, and it is verified by implanting a MEA to an animal and mounting the tactile sensor on an arbitrary-shaped surface.

• 제어로봇시스템학회논문지
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• 제17권2호
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• pp.131-134
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• 2011

In this study, we propose an optimal design and new fabrication method for a slim tactile sensor. Slim tactile sensor can detect 3-axial forces and has suitable flexibility for intelligent robot fingers. To amplify the contact signal, a unique table-shaped structure was attempted. A new layer-by-layer fabrication process for polymer micromachining that can make a 3D structure by using a sacrificial layer was proposed. A table-shaped epoxy sensing plate with four legs was built on top of a flexible polymer substrate. The plate can convert an applied force to a concentrated stress. Normal and shear forces can be detected by combining responses from metal strain gauges embedded in the polymer substrate. The optimal positions of the strain gauges are determined using the strain distribution obtained from finite element analysis.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2015년도 제46회 하계학술대회
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• pp.1229-1230
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• 2015

Monitoring of mechanical properties of tissues as well as direction/quantities of forces is considered as an essential way for disease diagnosis and haptic feedback systems. There are extensively increasing interests for measuring normal/shear force and touch feelings, especially for surgery systems. Highly sensitive and flexible tactile sensor is needed in palpation for detecting cancer cyst as well as real time pressure monitoring in minimally invasive surgery (MIS). Importantly, MEMS technique with miniaturized fabrication technique is essential for the on-chip integration with biopsy and biomedical grasper. Here, we propose the flexible tactile sensor with high sensitivity based on piezoresistive effect. We analyzed the sensitivity according to the pressure and directions and showed the ability of discrimination of the different materials surfaces, illustrating the feasibility of the flexible tactile sensor for biomedical grasper by mimicking human skin.

• 전자공학회논문지B
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• 제33B권2호
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• pp.10-19
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• 1996

This paper presents a finger-shaped multisensor system which can measure the tyep and position of a target surface by contactl. The multi-sensor system consists of a sphere-shpaed optical tactile sensor located at the finger tip and a force/torque sensor located at the joint of a finger. The optial tactile sensor determines the type and position of the target surface using the shape and position of the CCD image of the touching area generated by a contact between the sensor and the taget surface. The force/torque sensor also determines the position and surface normal vector by applying the distributionof forces and torques t the contact point to the equations of finger shape. The measurements on the position and surface normal vector at a contact point obtined by two individual sensors are fused using a statistical method. The integrated sensor system has 0.8mm error in position measurement and 1.31$^{\circ}$ error in normal vector measurement. The developed sensor system has many applications, such as autonomous compliance control, automatic grasping and recognition, etc.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 추계학술대회 논문집
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• pp.571-572
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• 2010

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2011년도 춘계학술대회 논문집
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• pp.1083-1084
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• 2011