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http://dx.doi.org/10.7736/KSPE.2014.31.8.683

High-Performance Multimodal Flexible Tactile Sensor Capable of Measuring Pressure and Temperature Simultaneously  

Jang, Jin-Seok (Division of Physical Metrology, KRISS)
Kang, Tae-Hyung (Division of Physical Metrology, KRISS)
Song, Han-Wook (Division of Physical Metrology, KRISS)
Park, Yon-Kyu (Division of Physical Metrology, KRISS)
Kim, Min-Seok (Division of Physical Metrology, KRISS)
Publication Information
Journal of the Korean Society for Precision Engineering / v.31, no.8, 2014 , pp. 683-688 More about this Journal
Abstract
This paper presents a high-performance flexible tactile sensor based on inorganic silicon flexible electronics. We created 100 nm-thick semiconducting silicon ribbons equally distributed with 1 mm spacing and $8{\times}8$ arrays to sense the pressure distribution with high-sensitivity and repeatability. The organic silicon rubber substrate was used as a spring material to achieve both of mechanical flexibility and robustness. A thin copper layer was deposited and patterned on top of the pressure sensing layer to create a flexible temperature sensing layer. The fabricated tactile sensor was tested through a series of experiments. The results showed that the tactile sensor is capable of measuring pressure and temperature simultaneously and independently with high precision.
Keywords
Strain Gauge; Micro Electro Mechanical System; Spatial Resolution; Flexible Tactile Sensor; Artificial Electronic Skin;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
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