• Title/Summary/Keyword: surface-enhanced Raman spectroscopy

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라만 분광법을 이용한 반도체 공정 중 표면 분석 (Surface analysis using Raman spectroscopy during semiconductor processing)

  • 최태민;유진욱;정은수;이채연;이화림;김동현;표성규
    • 한국표면공학회지
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    • 제57권2호
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    • pp.71-85
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    • 2024
  • This article provides an overview of Raman spectroscopy and its practical applications for surface analysis of semiconductor processes including real-time monitoring. Raman spectroscopy is a technique that uses the inelastic scattering of light to provide information on molecular structure and vibrations. Since its inception in 1928, Raman spectroscopy has undergone continuous development, and with the advent of SERS(Surface Enhanced Raman Spectroscopy), TERS(Tip Enhanced Raman Spectroscopy), and confocal Raman spectroscopy, it has proven to be highly advantageous in nano-scale analysis due to its high resolution, high sensitivity, and non-destructive nature. In the field of semiconductor processing, Raman spectroscopy is particularly useful for substrate stress and interface characterization, quality analysis of thin films, elucidation of etching process mechanisms, and detection of residues.

Determination of Ethanol in Blood Samples Using Partial Least Square Regression Applied to Surface Enhanced Raman Spectroscopy

  • Acikgoz, Gunes;Hamamci, Berna;Yildiz, Abdulkadir
    • Toxicological Research
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    • 제34권2호
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    • pp.127-132
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    • 2018
  • Alcohol consumption triggers toxic effect to organs and tissues in the human body. The risks are essentially thought to be related to ethanol content in alcoholic beverages. The identification of ethanol in blood samples requires rapid, minimal sample handling, and non-destructive analysis, such as Raman Spectroscopy. This study aims to apply Raman Spectroscopy for identification of ethanol in blood samples. Silver nanoparticles were synthesized to obtain Surface Enhanced Raman Spectroscopy (SERS) spectra of blood samples. The SERS spectra were used for Partial Least Square (PLS) for determining ethanol quantitatively. To apply PLS method, $920{\sim}820cm^{-1}$ band interval was chosen and the spectral changes of the observed concentrations statistically associated with each other. The blood samples were examined according to this model and the quantity of ethanol was determined as that: first a calibration method was established. A strong relationship was observed between known concentration values and the values obtained by PLS method ($R^2=1$). Second instead of then, quantities of ethanol in 40 blood samples were predicted according to the calibration method. Quantitative analysis of the ethanol in the blood was done by analyzing the data obtained by Raman spectroscopy and the PLS method.

Surface-enhanced Raman scattering (SERS) spectroscopy: a versatile spectroscopic and analytical technique used in nanoscience and nanotechnology

  • Sur, Ujjal Kumar
    • Advances in nano research
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    • 제1권2호
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    • pp.111-124
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    • 2013
  • Surface-enhanced Raman scattering (SERS) effect deals with the enhancement of the Raman scattering intensity by molecules in the presence of a nanostructured metallic surface. The first observation of surface-enhanced Raman spectra was in 1974, when Fleischmann and his group at the University of Southampton, reported the first high-quality Raman spectra of monolayer-adsorbed pyridine on an electrochemically roughened Ag electrode surface. Over the last thirty years, it has developed into a versatile spectroscopic and analytical technique due to the rapid and explosive progress of nanoscience and nanotechnology. This review article describes the recent development in field of surface-enhanced Raman scattering research, especially fabrication of various SERS active substrates, mechanism of SERS effect and its various applications in both surface sciences and analytical sciences.

Surface-enhanced Raman Spectroscopy of Ethephone Adsorbed on Silver Surface

  • Lee, Chul-Jae;Kim, Hee-Jin;Karim, Mohammad Rezaul;Lee, Mu-Sang
    • Bulletin of the Korean Chemical Society
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    • 제27권4호
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    • pp.545-548
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    • 2006
  • We investigated the Surface-enhanced Raman Spectroscopy (SERS) spectrum of ethephone (2-chloroethylphosphonic acid). We observed significant signals in the ordinary Raman spectrum for solid-state ethephone as well as when it was adsorbed on a colloidal silver surface, strong vibrational signals were obtained at a very low concentration. The SERS spectra were obtained by silver colloids that were prepared by the $\gamma$-irradiation method. The influence of pH and the influence of anion $(Cl^-,\;Br^-,\;I^-)$ on the adsorption orientation were investigated. Two different adsorption mechanisms were deduced, depending on the experimental conditions. The chlorine atom or the chlorine and two oxygen atoms were adsorbed on the colloidal silver surface. Among halide ions, $Br^-$ and $I^-$ were more strongly adsorbed on the colloidal silver surfaces. As a result, the adsorption of ethephone was less effective due to their steric hinderance.

Coating gold nanoparticles to a glass substrate by spin-coat method as a surface-enhanced raman spectroscopy (SERS) plasmonic sensor to detect molecular vibrations of bisphenol-a (BPA)

  • Eskandari, Vahid;Hadi, Amin;Sahbafar, Hossein
    • Advances in nano research
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    • 제13권5호
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    • pp.417-426
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    • 2022
  • Bisphenol A (BPA) is one of the chemicals used in monomer epoxy resins and polycarbonate plastics. The surface-enhanced Raman spectroscopy (SERS) method is precise for identifying biological materials and chemicals at considerably low concentrations. In the present article, the substrates coated with gold nanoparticles have been studied to identify BPA and control the diseases caused by this chemical. Gold nanoparticles were made by a simple chemical method and by applying gold salt and trisodium citrate dihydrate reductant and were coated on glass substrates by a spin-coat approach. Finally, using these SERS substrates as plasmonic sensors and Raman spectroscopy, the Raman signal enhancement of molecular vibrations of BPA was investigated. Then, the molecular vibrations of BPA in some consumer goods were identified by applying SERS substrates as plasmonic sensors and Raman spectroscopy. The fabricated gold nanoparticles are spherical and quasi-spherical nanoparticles that confirm the formation of gold nanoparticles by observing the plasmon resonance peak at 517 nm. Active SERS substrates have been coated with nanoparticles, which improve the Raman signal. The enhancement of the Raman signal is due to the resonance of the surface plasmons of the nanoparticles. Active SERS substrates, gold nanoparticles deposited on a glass substrate, were fabricated for the detection of BPA; a detection limit of 10-9 M and a relative standard deviation (RSD) equal to 4.17% were obtained for ten repeated measurements in the concentration of 10-9 M. Hence, the Raman results indicate that the active SERS substrates, gold nanoparticles for the detection of BPA along with the developed methods, show promising results for SERS-based studies and can lead to the development of microsensors. In Raman spectroscopy, SERS active substrate coated with gold nanoparticles are of interest, which is larger than gold particles due to the resonance of the surface plasmons of gold nanoparticles and the scattering of light from gold particles since the Raman signal amplifies the molecular vibrations of BPA. By decreasing the concentration of BPA deposited on the active SERS substrates, the Raman signal is also weakened due to the reduction of molecular vibrations. By increasing the surface roughness of the active SERS substrates, the Raman signal can be enhanced due to increased light scattering from rough centers, which are the same as the larger particles created throughout the deposition by the spin-coat method, and as a result, they enhance the signal by increasing the scattering of light. Then, the molecular vibrations of BPA were identified in some consumer goods by SERS substrates as plasmonic sensors and Raman spectroscopy.

Surface-enhanced Raman Spectroscopy of Benzimidazolic Fungicides: Benzimidazole and Thiabendazole

  • Kim, Mak-Soon;Kim, Min-Kyung;Lee, Chul-Jae;Jung, Young-Mee;Lee, Mu-Sang
    • Bulletin of the Korean Chemical Society
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    • 제30권12호
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    • pp.2930-2934
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    • 2009
  • Surface-enhanced Raman Scattering (SERS) spectroscopy is applied to the study of the adsorption of benzoimidazolic fungicides benzimidazole (BIZ) and thiabendazole (TBZ) on silver mirrors. The influence of pH on the adsorption mechanism was investigated. In case of BIZ, two different adsorption mechanisms are deduced depending on the experimental conditions: via the $\pi$ electrons of the ring in neutral conditions and through an ionic pairing of protonated nitrogen atom with the chloride adsorbed on the metal surface. The SERS spectra of TBZ revealed that most molecules were adsorbed on silver surface by the ${\pi}$ electrons in neutral and acidic conditions but in acid conditions, some molecules were adsorbed via the sulfur and nitrogen atoms tilted slightly to the surface.

Surface Enhanced Raman Spectroscopic Studies on Zn(Ⅱ) and Mn(Ⅲ) Tetrakis (4-N-Methyl Pyridyl) Porphyrins

  • Song, Ok-Keun;Yoon, Min-Joong;Kim, Dong-Ho
    • Bulletin of the Korean Chemical Society
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    • 제11권4호
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    • pp.286-290
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    • 1990
  • The surface enhanced Raman scatterings of Zn(Ⅱ) tetrakis (4-N-methyl pyridyl) porphyrins were studied in silver sol. Zn(Ⅱ) tetrakis (4-N-methyl pyridyl) porphyrin was found to be adsorbed on silver surface via flat-on geometry with some inhomogeneous distribution in the orientation of pyridyl groups. Both the selective enhancement of Raman modes depending on the mode character and the theoretical arguments of SERS are utilized to support the above conclusion. The surface induced substitution reaction of Mn(Ⅲ) tetrakis (4-N-methyl pyridyl) porphyrin chloride to Ag(Ⅱ) tetrakis (4-N-methyl pyridyl) porphyrin was detected via surface enhanced Raman spectrum.

Surface-enhanced Raman Spectroscopy of Quinomethionate Adsorbed on Silver Colloids

  • Kim, Mak-Soon;Kang, Jae-Soo;Park, Si-Bum;Lee, Mu-Sang
    • Bulletin of the Korean Chemical Society
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    • 제24권5호
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    • pp.633-637
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    • 2003
  • We have studied the surface-enhanced Raman spectroscopy (SERS) spectrum of quinomethionate (6-methyl-1,3-dithiolo[4,5-b]quinoxalin-2-one), which is an insecticide or fungicide used on vegetables and wheat. We observed no signals in the ordinary Raman spectra of solid-state quinomethionate, but when it was adsorbed on a colloidal silver surface, strong vibrational signals were obtained at a very low concentration. The SERS spectra were obtained by silver colloids prepared by the Creighton et al. method. The influence of pH and the aggregation inductors ($Cl^-,\;Br^-,\;I^-,\;F^-$) on the adsorption mechanism was investigated. Two different adsorption mechanisms were deduced, depending on the experimental conditions: The one N atom or two N atoms are chemisorbed on an Ag surface. An important contribution of the chemical mechanism was inferred when the one N atom was perpendicularly adsorbed on a surface. It is possible that quinomethionate can be detected to about $10^{-5}$ M.

Surface-Enhanced Raman Spectroscopic Studies of Oriented Monolayers on Electrode Surfaces

  • Yoon, Wan-Shik;Im, Jung-Hyuk;Kim, Jae-Ho
    • 분석과학
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    • 제8권4호
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    • pp.699-705
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    • 1995
  • Monolayers of hypericin, a photodynamic polycyclic quinoidal compound, were prepared at the air-water interface, and were transferred to metal substrates to form Langmuir-Blodgett (LB) monolayers. The structural characteristics of hypericin LB monolayers and self-assembled (SA) monolayers were investigated using surface-enhanced resonance Raman scattering (SERRS) spectroscopy. Both the spectroscopic data and the surface pressure - area (${\pi}-A$) isotherms suggest that hypericin forms ${\pi}-{\pi}$ aggregates that orient vertically to the subphase surface. Whereas the ordering and orientation of control was less effective in SA monolayers, a higher structural regularity was attained in LB systems. The effect of subphase on the structural integrity of the monolayer was also investigated.

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Feasibility Study for Detection of Turnip yellow mosaic virus (TYMV) Infection of Chinese Cabbage Plants Using Raman Spectroscopy

  • Kim, Saetbyeol;Lee, Sanguk;Chi, Hee-Youn;Kim, Mi-Kyeong;Kim, Jeong-Soo;Lee, Su-Heon;Chung, Hoeil
    • The Plant Pathology Journal
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    • 제29권1호
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    • pp.105-109
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    • 2013
  • Raman spectroscopy provides many advantages compared to other common analytical techniques due to its ability of rapid and accurate identification of unknown specimens as well as simple sample preparation. Here, we described potential of Raman spectroscopic technique as an efficient and high throughput method to detect plants infected by economically important viruses. To enhance the detection sensitivity of Raman measurement, surface enhanced Raman scattering (SERS) was employed. Spectra of extracts from healthy and Turnip yellow mosaic virus (TYMV) infected Chinese cabbage leaves were collected by mixing with gold (Au) nanoparticles. Our result showed that TYMV infected plants could be discriminated from non-infected healthy plants, suggesting the current method described here would be an alternative potential tool to screen virus-infection of plants in fields although it needs more studies to generalize the technique.