• 제목/요약/키워드: surface rougness

검색결과 8건 처리시간 0.03초

RF 스퍼터링법에 의한 SBN 박막의 표면형상 및 유전특성 (Surface Morphology and Dielectric Properties of SBN Thin Film by RF Sputtering Method)

  • 김진사;김충혁
    • 한국전기전자재료학회논문지
    • /
    • 제22권8호
    • /
    • pp.671-676
    • /
    • 2009
  • The $Sr_{0.7}Bi_{2.3}Nb_2O_9$(SBN) thin films are deposited on Pt-coated electrode(Pt/Ti/$SiO_2$/Si) using RF sputtering method at various deposition conditions. We investigated the effect of deposition condition on the surface morphology and dielectric properties of SBN thin films. The optimum of the rougness showed about 4.33 nm in 70/30 of Ar/$O_2$ ratio. The crystallinity and rougness of SBN thin films were increased with the increase of rf power. Also, Deposition rate of SBN thin films was about 4.17 nm/min in 70 W of rf power. The capacitance of SBN thin films were increased with the increase of Ar/$O_2$ ratio, rf power and deposition temperature respectively.

증착조건에 따른 SBN 세라믹 박막의 영향 (Influence of SBN Ceramic Thin Film with Deposition Conditions)

  • 김진사;조춘남;배덕권;신철기;최운식;송민종;소병문;김충혁
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2009년도 하계학술대회 논문집
    • /
    • pp.173-174
    • /
    • 2009
  • The SBN thin films are deposited on Pt-coated electrode(Pt/Ti/$SiO_2/Si$) using RF sputtering method at various deposition conditions. The optimum conditions of RF power and $Ar/O_2$ ratio were 60[W] and 70/30, respectively. Also, The surface rougness showed about 4.33[nm] in RF power 60[W] and $Ar/O_2$ ratio 70/30.

  • PDF

SBN 세라믹 박막의 구조 및 AFM 특성 (Structure and AFM Characteristics of SBN Ceramic Thin Film)

  • 김진사;최영일;오용철;신철기;박건호;김충혁
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2010년도 하계학술대회 논문집
    • /
    • pp.291-291
    • /
    • 2010
  • The SBN ceramic thin films are deposited on Pt-coated electrode(Pt/Ti/$SiO_2$/Si) using RF sputtering method at substrate temperature of 300[$^{\circ}C$]. The grain and crystallinity of SBN thin films were increased with the increase of annealing temperature. The crystallinity of SBN thin films were increased with increase of annealing temperature in the temperature range of 600~800[$^{\circ}C$]. the surface rougness showed about 20 [nm].

  • PDF

SBN 박막의 열처리온도에 따른 전기적인 특성 (Electrical Properties with Annealing Temperature of SBN Thin Film)

  • 김진사
    • 전기학회논문지
    • /
    • 제59권6호
    • /
    • pp.1083-1086
    • /
    • 2010
  • The $Sr_{0.7}Bi_{2.3}Nb_2O_9$ thin films were deposited on Si substrate using RF magnetron sputtering method. And the SBN thin films were annealed at 650~800$[^{\circ}C$]. The surface rougness showed about 0.42[nm] in annealed thin film at $650[^{\circ}C$]. The dielectric constant(150) of SBN thin film was obtained by annealing temperature above $700[^{\circ}C$]. The voltage dependence of dielectric loss showed a value within 0.02 in voltage ranges of -10~+10[V]. The dielectric constant characteristics showed a stable value with the increase of frequency. Also, the SBN thin films annealed at $750[^{\circ}C$] showed a fatigue-free characteristics up to $1.0\times10^8$ cycles.

증착온도에 따른 SBN 박막의 미세구조 및 특성 (Microstructure and Properties of SBN Thin film with Deposition Temperature)

  • 김진사;최운식;김충혁
    • 전기학회논문지
    • /
    • 제58권3호
    • /
    • pp.544-547
    • /
    • 2009
  • The $Sr_{0.7}Bi_{2.3}Nb_{2}O_{9}$(SBN) thin films are deposited on Pt-coated electrode(Pt/Ti/$SiO_2$/Si) using RF sputtering method at various deposition temperature. The optimum conditions of RF power and Ar/$O_2$ ratio were 60[W] and 70/30, respectively. Deposition rate of SBN thin films was about 4.17[nm/min]. The crystallinity of SBN thin films were increased with increase of deposition temperature in the temperature range of $100{\sim}400[^{\circ}C]$, the surface rougness showed about 4.33[nm]. The capacitance of SBN thin films were increased with the increase of deposition temperature.

WEAR PROPERTY OF PLASMA-SPRAYED COATING LAYERA IN Cr$_2$O$_3$

  • Pakr, J.M.;Lee, S.W.;Kim, Byong-Kee;Lee, Dong-Won
    • 한국표면공학회지
    • /
    • 제29권6호
    • /
    • pp.745-752
    • /
    • 1996
  • Wear property of plasma spray coating in $Cr_2O_3$ powder manufatured of spray dry method on the aluminum substrate was inspected for the application of piston-ring of automotive enginel. The plama spray coatings were varied with feed rate and particle size. Used the ball-on disc type tribometer, wear volume, friction, surface rougness were investigated. The delamination of the coating layer were observed with SEM. Also the cross-section of wear track were investigated, using optical microscopy. As a result of experiment, wear mechanism was addressed in the various coating process.

  • PDF

Innovations in Micro Metal Injection Molding Process by Lost Form Technology

  • Nishiyabu, Kazuaki;Kanoko, Yasuhiro;Tanaka, Shigeo
    • 한국분말야금학회:학술대회논문집
    • /
    • 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part 1
    • /
    • pp.43-44
    • /
    • 2006
  • The production method of micro sacrificial plastic mold insert metal injection molding, namely ${\mu}-SPiMIM$ process has been proposed to solve specific problems involving the miniaturization of MIM. Two types of sacrificial plastic molds (SP-mold) with fine structures were used: 1) PMMA resist, 2) PMMA mold injected into Ni-electroform, which is a typical LIGA (${\underline{L}}ithographie-{\underline{G}}alvanoformung-{\underline{A}}bformung$) process. Stainless steel 316L feedstock was injection-molded into the SP-molds with multi-pillar structures. This study focused on the effects of metal particle size and processing conditions on the shrinkage, transcription and surface roughness of sintered parts.

  • PDF

목형용(木型用) 춘양목(春陽木)의 절삭가공(切削加工) 특성(特性)에 관(關)한 연구(硏究)(제2보(第2報)) - 정면(正面)밀링 절삭(切削)에 의한 절삭저항(切削抵抗), 표면조도(表面粗度) 및 가공표면상태(加工表面狀態) - (Study on the Machinability of Pinus densiflora at Chunyang District for Wood Patterns - Cutting Force, Surface Roughness and Suface Phenomenon by Face Milling -)

  • 김정두
    • Journal of the Korean Wood Science and Technology
    • /
    • 제16권4호
    • /
    • pp.61-69
    • /
    • 1988
  • Recently the automization of wood manufacturing and the development of CNC machine tools becomes the center of interest. Cutting mechanism, tool wear and the roughness of machined surface have been studied. In the studies about wood for special uses, concrete data of cutting is desired. While Pinus densiflora is characterized that heartwood develops as age increases, Chunyang District has the characteristic of strength, red color, relatively regular chap and high heartwood - percentage. But there is no data about cutting this wood, Chunyang District. In this study face milling by sintered carbide tool was excuted to Chunyang District. Cutting force, Surface roughness and states were investigated with regard to cutting speed. Example results were as follows; 1) Mean cutting resistance against lateral component force and longitudinal component force decreased rapidly up to cutting speed of 155 m/min, and remains constant above this speed. 2) The surface roughness of cutting surface lowered as cutting speed increased, regardless of fiber formation. Radial rougness of fiber is larger than lineal surface roughness. 3) Increase in Cutting speed made machining mark restrained. Down-milling showed larger marks than up-milling.

  • PDF