Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Surface Morphology and Dielectric Properties of SBN Thin Film by RF Sputtering Method

RF 스퍼터링법에 의한 SBN 박막의 표면형상 및 유전특성

  • 김진사 (조선이공대학 메카트로닉스과) ;
  • 김충혁 (광운대학교 교양학부)
  • Published : 2009.08.01
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Abstract

The $Sr_{0.7}Bi_{2.3}Nb_2O_9$(SBN) thin films are deposited on Pt-coated electrode(Pt/Ti/$SiO_2$/Si) using RF sputtering method at various deposition conditions. We investigated the effect of deposition condition on the surface morphology and dielectric properties of SBN thin films. The optimum of the rougness showed about 4.33 nm in 70/30 of Ar/$O_2$ ratio. The crystallinity and rougness of SBN thin films were increased with the increase of rf power. Also, Deposition rate of SBN thin films was about 4.17 nm/min in 70 W of rf power. The capacitance of SBN thin films were increased with the increase of Ar/$O_2$ ratio, rf power and deposition temperature respectively.

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References

  1. Y. Chang, Z. Yang, L. Wei, and B. Liu, 'Effects of AETiO3 additons on phase structure, microstructure and electrical properties of (K0.5Na0.5)NbO3 ceramics', Materials Science and Engineering A, Vol. 427, p. 301, 2006 https://doi.org/10.1016/j.msea.2006.04.092
  2. D. Song, 'Effects of rf power on surface morphological, structural and electrical properties of aluminium-doped zinc oxide films by magnetron sputtering', Applied Surface Science, Vol. 254, No. 1, p. 113, 2008 https://doi.org/10.1016/j.apsusc.2007.07.105
  3. C. Bedoya, C. Muller, F. Jacob, Y. Gagou, M.-A. Fremy, and E. Elkaim, 'Magnetic- field-induced orientation in Co-doped SrBi2 Ta2O9 ferroelectric oxide', J. Phys.: Condens. Matter., Vol. 14, No. 45, p. 11849, 2002 https://doi.org/10.1088/0953-8984/14/45/326
  4. K. Saito, M. Mitsuya, N. Nukaga, I. Yamaji, T. Akai, and H. Funakubo, 'Method of distinguishing SrBi_2 Ta2O_9 phase from fluorite phase using x-ray diffraction reciprocal space mapping', Jpn. J. Appl. Phys., Vol. 39, Pt. 1, No. 9B, p. 5489, 2000 https://doi.org/10.1143/JJAP.39.5489
  5. D. Bao, N. Wakiya, K. Shinozaki, and N. Mizutani, 'Ferroelectric properties of sandwich structured (Bi, La)_4Ti_3 O_{12}/Pb(Zr, Ti)O_3/(Bi, La)_4Ti_3O_{12} thin films on Pt/Ti/SiO_2/Si substrates', J. Phys. D: Appl. Phys., Vol. 35, No. 3, p. L1, 2002 https://doi.org/10.1088/0022-3727/35/3/101
  6. Y. Abe, M. Kawamura, and K. Sasaki, 'Dielectric properties of SrTiO_3 capacitor using TiN bottom electrode and effects of SrTiO_3 film thickness', J. Appl. Phys., Vol. 36, p. 5175, 1997 https://doi.org/10.1143/JJAP.36.5175
  7. 김진사, 최운식, 'Ar/O_2비에 따른 Sr_{0.7}Bi_{2.3} Nb_2O_9 박막의 구조 및 영향', 반도체및디스플레이장비학회지, 8권, 2호, p. 12, 2009
  8. M. L. Cui, X. M. Wu, L. J. Zhuge, and Y. D. Meng, 'Effects of annealing temperature on the structure and photoluminescence properties of ZnO films', Vacuum, Vol. 81, No. 28, p. 897, 2007
  9. N.-H. Cho and S.-H. Nam, 'Preparation of strontium titanate thin film on Si substrate by radio frequency magnetron sputtering', J. Vac. Sci. Technol., A, Vol. 10, No. 1, p. 87, 1992 https://doi.org/10.1116/1.578071
  10. Peng. C. J., 'Processing/Structure/Property Relationships of Barium Strontium Titanate Thin Films for Dynamic Random Access Memory Application', U. M. I Dissertation services, A Bell & Howell Compony, p. 27, 1994
  11. T. Kato, H. Sugiyama, M. Noda, and M. Okuyama, 'Low- temperature preparation of Sr_2(Ta1-x, Nb_x)_2O_7 thin films by pulsed laser deposition and its electrical properties', Jpn. J. Appl. Phys., Vol. 39, Pt. 1, No. 9B, p. 5517, 2000 https://doi.org/10.1143/JJAP.39.5517
  12. T. S. Kim, C. H. Kim, and M. H. Oh, 'Electrical properties of radio frequency magnetron-sputtered (BaSr)TiO_3 thin films on indium tin oxide-coated glass substrate', J. Vac. Sci. Technol. A, Vol. 12, No. 2, p. 529, 1994 https://doi.org/10.1116/1.579163
  13. T. Hioki, M. Akiyama, T. Ueda, Y. Onozuka, Y. Hara, and K. Suuki, 'Measurement of electic-field-induced displacements in (Pb, La)/TiO_3 thin films using scanning probe microscopy preparation of Pb(Zr, Ti)O_3 thin films on glass substrates', Jpn. J. Appl. Phys., Vol. 39, Pt. 1, No. 9B, p. 5408, 2000 https://doi.org/10.1143/JJAP.39.5408
  14. 김진사, 최운식, 김충혁, '증착온도에 따른 SBN 박막의 미세구조 및 특성', 전기학회논문지, 58권, 3호, p. 546, 2009
  15. 오수영, 김응권, 이태용, 'RF 마그네트론 스퍼터링법으로 증착한 ZnO 박막의 증착온도에 따른 구조 및 전기적 특성', 전기전자재료학회논문지, 20권, 11호, p. 966, 2007