• 제목/요약/키워드: surface roughness measurement

검색결과 456건 처리시간 0.049초

PLD 법으로 제작한 $In_2O_3-ZnO$ 박막의 광학적 및 전기적 특성 (A Study on he Optical and Electrical Properties of $In_2O_3-ZnO$ Thin Films Fabricated by Pulsed Laser Deposition)

  • 신현호;한정우;강성준;윤영섭
    • 대한전자공학회논문지SD
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    • 제45권7호
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    • pp.32-36
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    • 2008
  • 본 연구에서는 펄스 레이저 법으로 200 mTorr 의 산소 분압에서 기판 온도를 $200^{\circ}C$ 에서 $600^{\circ}C$ 까지 변화시켜 가며, quartz 기판 위에 $In_2O_3-ZnO$ 박막을 제작하여 광학적 및 전기적 특성을 조사하였다. XRD 측정을 통해 $In_2O_3-ZnO$ 박막이 다결정 상태인 것을 알 수 있었으며, 기판 온도가 $500^{\circ}C$로 증가함에 따라 $35.5^{\circ}$ 부근의 $In_2O_3$ (400) 피크는 감소한 반면 $30.6^{\circ}$ 부근의 $In_2O_3$ (222) 피크는 증가했다. 박막의 표면을 AFM 으로 조사한 결과, round type 의 결정립들이 관찰되었으며 표면 거칠기 값은 $500^{\circ}C$에서 제작한 박막에서 가장 낮은 값 (6.15 nm) 을 나타내었다. 모든 $In_2O_3-ZnO$ 박막이 가시광 영역에서 평균 82% 이상의 투과율을 보였다. 또, $500^{\circ}C$에서 제작한 $In_2O_3-ZnO$ 박막에서 가장 높은 캐리어 농도 ($2.46{\times}10^{20}cm^{-3}$) 값과 가장 낮은 비저항 ($1.36{\times}10^{-3}{\Omega}cm$) 값을 나타내었다.

거친 바다표면의 마이크로파 반사 계산을 위한 이론적 모델 정확도 검증 (Accuracy Verification of Theoretical Models for Estimating Microwave Reflection from Rough Sea Surfaces)

  • 박신명;오이석
    • 한국전자파학회논문지
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    • 제28권10호
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    • pp.788-793
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    • 2017
  • 본 논문에서는 거친 바다표면의 마이크로파 반사를 계산할 수 있는 이론적 모델의 정확도를 검증한다. 우선 Pierson-Moskowitz 해양 스펙트럼을 이용하여 거친 바다표면을 생성하였다. 생성된 바다표면의 유의파고와 유효높이(root-mean square height)값을 추정하여 풍속에 따른 유의파고, 유효높이 관계식을 유도하였고, 다른 측정 데이터들과 비교하였다. 수치해석적 방법을 이용하여 다양한 거칠기 조건(풍속)에서 생성된 바다표면의 반사계수를 계산하였고, 기존에 반사계수를 계산하기 위해 사용하는 이론적 모델인 Ament 모델, PO(Physical Optics) 모델, GO(Geometrical Optics) 모델, B-M(Brown-Miller) 모델과 비교하였다. 비교적 거칠기가 매우 낮은 경우($kh_{rms}$<0.4, k는 파수, $h_{rms}$는 RMS 높이) 외에는 Ament 모델은 정확하지 않았다. 또한 거칠기가 크지 않은 바다($kh_{rms}$<10)에서는 PO, GO, B-M 모델들의 정확도가 보장되지만, 풍속이 높아 거칠기가 높은 바다($kh_{rms}$>10)에서는 입사각이 $70^{\circ}$ 이하에서는 PO 모델과 GO 모델이 수치해석결과와 비교적 잘 일치하였으며, $80^{\circ}$ 이상에서는 B-M 모델이 수치해석 결과와 비교적 잘 일치함을 보였다.

열가소성 폴리머 필름의 나노 응착 및 마찰 거동에 대한 온도의 영향 (The Effect of Temperature on the Nano-scale Adhesion and Friction Behaviors of Thermoplastic Polymer Films)

  • 김광섭;안등태구;김경웅
    • Tribology and Lubricants
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    • 제23권6호
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    • pp.288-297
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    • 2007
  • Adhesion and friction tests were carried out in order to investigate the effect of temperature on the tribological characteristics of poly (methylmethacrylate) (PMMA) film using AFM. The pull-off and friction forces on the PMMA film were measured under a high vacuum condition (below $1{\times}10^{-4}$ Pa) as the temperature of the PMMA film was increased from 300 K to 420 K (heating) and decreased to 300K (cooling). Friction tests were also conducted in both high vacuum and air conditions at room temperature. When the temperature was 420 K, which is 25 K higher than the glass transition temperature $(T_g)$ of PMMA, the PMMA film surface became deformable. Subsequently, the pull-off force was proportional to the maximum applied load during the pull-off force measurement. In contrast, when the temperature was under 395 K, the pull-off force showed no correlation to the maximum applied load. The friction force began to increase when the temperature rose above 370 K, which is 25 K lower than the $T_g$ of PMMA, and rapidly increased at 420 K. Decrease of the PMMA film stiffness and plastic deformation of the PMMA film were observed at 420 K in force-displacement curves. After the heating to 420 K, the fiction coefficient was measured under the air condition at room temperature and was found to be lower than that measured before the heating. Additionally, the RMS roughness increased as a result of the heating.

Optimal Condition of Hydroxyapatite Powder Plasma Spray on Ti6Al4V Alloy for Implant Applications

  • Ahn, Hyo-Sok;Lee, Yong-Keun
    • 한국재료학회지
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    • 제22권4호
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    • pp.211-214
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    • 2012
  • Optimal conditions for HA plasma spray-coating on Ti6Al4V alloy were investigated in order to obtain enhanced bone-bonding ability with Ti6Al4V alloy. The properties of plasma spray coated film were analyzed by SEM, XRD, surface roughness measurement, and adhesion strength test because the film's transformed phase and crystallinity were known to be influential to bone-bonding ability withTi6Al4V alloy. The films were formed by a plasma spray coating technique with various combinations of plasma power, spray distance, and auxiliary He gas pressure. The film properties were analyzed in order to determine the optimal spray coating parameters with which we will able to achieve enhanced bone-bonding ability with Ti6Al4V alloy. The most influential coating parameter was found to be the plasma spray distance to the specimen from the spray gun nozzle. Additionally, it was observed that a relatively higher film crystallinity can be obtained with lower auxiliary gas pressure. Moderate adhesion strength can be achievable at minimal plasma power. That is, adhesion strength is minimally dependent on the plasma power. The combination of shorter spray distance, lower auxiliary gas pressure, and moderate spray power can be recommended as the optimal spray conditions. In this study, optimal plasma spray coated films were formed with spray distance of 70 mm, plasma current of 800 A, and auxiliary gas pressure of 60 psi.

화강풍화암에 시공된 부분현장타설말뚝의 IGM이론의 적용성 (Applicability of IGM theory Partial Drilled Shaft constructed on Granite Rocks)

  • 안태봉
    • 한국철도학회논문집
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    • 제16권5호
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    • pp.379-385
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    • 2013
  • 본 연구에서는 IGM 구간에서 주면마찰력을 활용하여 지지력을 확보하기 위해 선단부에만 부분적으로 현장타설말뚝을 시험시공하고 IGM 이론의 적용성을 분석하였다. 시험시공 현장의 지반조사와, 교란여부, 거칠기 상태를 측정하여 IGM 이론 적용을 위한 지반특성을 점성, 비교란, 매끄러운 상태로 분석하였다. 또한, 정재하시험 및 하중전이시험을 통해 허용지지력과 심도별 주면마찰력을 산정한 결과, 주면마찰력은 심도가 깊어질수록, 기준침하량이 클수록 증가하는 것으로 평가되었으며, 심도와 매우 높은 상관성을 보였다. 일축압축강도($q_u$)는 점성 IGM에서 가장 중요한 변수이나, 화강풍화암 구간에서 직접 측정이 불가능하므로 정재하시험 및 하중전이시험 결과와 N값을 이용하여 $q_u$값을 얻을 수 있었다.

매염제 처리가 대나무잎과 솔잎 추출물로 염색한 직물의 물성 및 태에 미치는 영향 (The Effect of Mordant on the Mechanical Properties and Primary Hand Values of Fabrics Dyed with Bamboo and Pine Leaf Extracts)

  • 이정순;우효정;정고은
    • 한국의류산업학회지
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    • 제14권4호
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    • pp.648-659
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    • 2012
  • This research categorizes fundamental data needed to develop eco-friendly fabrics treated with bamboo leaf & pine leaf extracts. The effect of mordant on those fabrics was analyzed through the measurement of mechanical properties and the estimation of primary hand values for cotton and silk fabrics dyed with bamboo leaf and pine leaf extracts that were later treated with various mordants. When cotton was dyed with bamboo leaves and pine leaves extracts, EM, WT, 2HB, 2HG, 2HG5, LC, T, and W increased however, RT, SMD, and RC decreased compared to raw cotton fabric. The B, G, and MIU increased after mordant treatment to the dyed cotton and resulted in a stiffer and rougher cotton's hand. EM, WT, RT, MIU, WC, T, and W increased (in terms of silk); however, LT, B, 2HB, G, 2HG, 2HG5, MMD, SMD, and LC decreased compared to raw silk fabric. Similar to the dyed cotton, mordant treatment increased the MIU and LC of dyed silk subsequently, the hand became stiffer and rougher. A greater tannin adsorption results in an increased mechanical property and the primary hand value. For both fabrics, mordant treatment made its smoothness drop. However, the scale of drop for cotton was significant, while the scale of the drop for silk was minor. In terms of type of mordant, femordant and natural-mordant treatment influenced the tensile, shear, surface properties of fabrics, and primary hand values more than Cu-mordant and synthetic-mordant in addition, this increased the stiffness, hardness, and roughness of fabrics.

Hetero-epitaxial ZnO 버퍼층이 As-doped ZnO 박막의 증착조건에 미치는 영향 (Effect of the hetero-epitaxial ZnO buffer layer for the formation of As-doped ZnO thin films)

  • 이홍찬;최원국;심광보;오영제
    • 센서학회지
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    • 제15권3호
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    • pp.216-221
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    • 2006
  • ZnO thin films prepared by PLD method exhibit an excellent optical property, but may have some problems such as incomplete surface roughness and crystallinity. In this study, undoped ZnO buffer layers were deposited on (0001) sapphire substrates by ultra high vacuum pulse laser deposition (UHV-PLD) and molecular beam epitaxy (MBE) methods, respectively. After post annealing of ZnO buffer layer, undoped ZnO thin films were deposited under different oxygen pressure ($35{\sim}350$ mtorr) conditions. The Arsenic-doped (1, 3 wt%) ZnO thin layers were deposited on the buffer layer of undoped ZnO by UHV-PLD method. The optical property of the ZnO thin films was analyzed by photoluminescence (PL) measurement. The ${\theta}-2{\theta}$ XRD analysis exhibited a strong (002)-peak, which indicates c-axis preferred orientation. Field emission-scanning electron microscope (FE-SEM) revealed that microstructures of the ZnO thin films were varied by oxygen partial pressure, Arsenic doping concentration, and deposition method of the undoped ZnO buffer layer. The denser and smoother films were obtained when employing MBE-buffer layer under lower oxygen partial pressure. It was also found that higher Arsenic concentration gave the enhanced growing of columnar structure of the ZnO thin films.

$CeO_2$박막의 결정성 및 전기적 특성에 미치는 sputtering시 산소분압비의 영향 (Effects of oxygen partial pressure during sputtering on texture and electrical properties of $CeO_2$ thin films)

    • 한국진공학회지
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    • 제10권1호
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    • pp.51-56
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    • 2001
  • MFISFET(Metal-ferroelectric-insulator-semiconductor-field effect transistor)에의 적용을 위한 절연체로서 CeO$_2$ 박막을 r.f. magnetron sputtering법에 의해 제조하였다. 스퍼터링시 증착개스는 Ar과 $O_2$를 사용하였으며 산소분압비에 따른 $CeO_2$박막의 결정성 및 전기적 특성에 미치는 영향을 평가하였다. p형-Si(100)기판 위에 $600^{\circ}C$에서 증착된 $CeO_2$ 박막들은(200)방향으로 우선방향성을 가지고 성장하였으며 Ar만으로 증착된 박막의 우선방향성은 증가하였으나 상대적으로 많은 하전입자와 표면 거칠기로 인해 C-V특성에서 큰 이력특성을 보였고 산소분압비가 증가함에 따라 양호한 특성을 보였다. 이것은 이동가능한 이온전하의 감소에 기인한다고 할 수 있다. Ce:O의 비는 모든 박막에서 1:2.22~2.42를 보여 산소과잉의 조성을 나타냈으며 산소분압비에 따라 제조된 박막들의 누설전류값은 100 kV/cm의 전계에서 $10^{-7}$~$10^{-8}$A의 차수를 보였다.

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Electrical Properties and Microstructures in Ti Films Deposited by TFT dc Sputtering

  • Han, Chang-Suk;Jeon, Seung-Jin
    • 한국재료학회지
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    • 제26권4호
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    • pp.207-211
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    • 2016
  • Ti films were deposited on glass substrates under various preparation conditions in a chamber of two-facing-target type dc sputtering; after deposition, the electric resistivity values were measured using a conventional four-probe method. Crystallographic orientations and microstructures, including the texture and columnar structure, were also investigated for the Ti films. The morphological features, including the columnar structures and surface roughness, are well explained on the basis of Thornton's zone model. The electric resistivity and the thermal coefficient of the resistivity vary with the sputtering gas pressure. The minimum value of resistivity was around 0.4 Pa for both the $0.5{\mu}m$ and $3.0{\mu}m$ thick films; the apparent tendencies are almost the same for the two films, with a small difference in resistivity because of the different film thicknesses. The films deposited at high gas pressures show higher resistivities. The maximum of TCR is also around 0.4 Pa, which is the same as that obtained from the relationship between the resistivity and the gas pressure. The lattice spacing also decreases with increasing sputtering gas pressure for both the $0.5{\mu}m$ and $3.0{\mu}m$ thick films. Because they are strongly related to the sputtering gas pressures for Ti films that have a crystallographic anisotropy that is different from cubic symmetry, these changes are well explained on the basis of the film microstructures. It is shown that resistivity measurement can serve as a promising monitor for microstructures in sputtered Ti films.

PES 기판위에 제작한 Ga-doped ZnO 박막의 전기적 및 광학적 특성 (Electrical and Optical Properties of the Ga-doped ZnO Thin Films Deposited on PES (Polyethersulfon) Substrate)

  • 정윤근;정양희;강성준
    • 한국정보통신학회논문지
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    • 제15권7호
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    • pp.1559-1563
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    • 2011
  • 본 연구에서는 고주파 마그네트론 스퍼터링 (RF magnetron sputtering) 법으로 기판 온도 ($50{\sim}200^{\circ}C$)에 따른 GZO(Ga : 5 wt%) 박막을 PES (polyethersulfon) 플라스틱 기판위에 제작하여, 광학적 및 전기적 특성을 조사하였다. XRD 측정을 통해 공정 조건에 관계없이 모든 GZO 박막이 c축으로 우선 성장함을 확인할 수 있었다. 박막의 표면을 AFM 으로 조사한 결과, 표면 거칠기 값은 기판 온도 $200^{\circ}C$ 에서 제작한 박막에서 가장 낮은 값 (0.196 nm) 을 나타내었다. 투과도 측정 결과, GZO 박막은 약 80% 이상의 투과율을 보였고, 기판 온도가 증가할수록 에너지 밴드 갭이 증가하는 Burstein-Moss 효과를 관찰할 수 있었다. Hall 측정 결과, 기판 온도 $200^{\circ}C$에서 제작한 GZO 박막에서 가장 낮은 비저항 $6.93{\times}10-4\;{\Omega}{\cdot}cm$ 값과 가장 높은 캐리어 농도 $7.04{\times}1020/cm^3$ 값을 나타내었다.