• Title/Summary/Keyword: surface particle velocity

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Variation of Cone Crack Shape and Impact Damage According to Impact Velocity in Ceramic Materials (세라믹에서 충격속도에 따른 충격손상 및 콘크랙 형상의 변화)

  • Oh, Sang-Yeob;Shin, Hyung-Seop;Suh, Chang-Min
    • Proceedings of the KSME Conference
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    • 2001.06a
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    • pp.383-388
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    • 2001
  • Effects of particle property variation of cone crack shape according to impact velocity in silicon carbide materials were investigated. The damage induced by spherical impact having different material and size was different according to materials. The size of ring cracks induced on the surface of specimen increased with increase of impact velocity within elastic contact conditions. The impact of steel particle produced larger ring cracks than that of SiC particle. In case of high impact velocity, the impact of SiC particle produced radial cracks by the elastic-plastic deformation at impact regions. Also percussion cone was formed from the back surface of specimen when particle size become large and its impact velocity exceeded a critical value. Increasing impact velocity, zenithal angle of cone cracks in SiC material was linearly decreasing not effect of impact particle size. An empirical equation, $\theta=\theta_{st}-\upsilon_p(180-\theta_{st})(\rho_p/\rho_s)^{1/2}/415$, was obtained from the test data as a function of quasi-static zenithal angle of cone crack($\theta_{st}$), the density of impact particle(${\rho}_p$) and specimen(${\rho}_s$). Applying this equation to the another materials, the variation of zenithal angle of cone crack could be predicted from the particle impact velocity.

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Measurement of Particle Deposition Velocity Toward a Vertical Wafer Surface (수직 웨이퍼상의 입자 침착속도의 측정)

  • Bae, G.N.;Lee, C.S.;Park, S.O.;Ahn, K.H.
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.7 no.3
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    • pp.521-527
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    • 1995
  • The average particle deposition velocity toward a vertical wafer surface in a vertical airflow chamber was measured by a wafer surface scanner(PMS Model SAS-3600). Polystyrene latex(PSL) spheres with diameters between 0.3 and $0.8{\mu}m$ were used. To examine the effect of the airflow velocity on the deposition velocity, experiments were conducted for three vertical airflow velocities ; 20, 30, 50cm/s. Experimental data of particle deposition velocity were compared with those given by prediction model suggested by Liu and Ahn(1987).

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Numerical Simulation of Particle Deposition on a Wafer Surface (웨이퍼 표면상의 입자침착에 관한 수치 시뮬레이션)

  • 명현국;박은성
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.17 no.9
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    • pp.2315-2328
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    • 1993
  • The turbulence effect of particle deposition on a horizontal free-standing wafer in a vertical flow has been studied numerically by using the low-Reynolds-number k-.epsilon. turbulence model. For both the upper and lower surfaces of the wafer, predictions are made of the averaged particle deposition velocity and its radial distribution. Thus, it is now possible to obtain local information about the particle deposition on a free-standing wafer. The present result indicates that the particle deposition velocity on the lower surface of wafer is comparable to that on the upper one in the diffusion controlled deposition region in which the particle sizes are smaller than $0.1{\mu}m$. And it is found in this region that, compared to the laminar flow case, the averaged deposition velocity under the turbulent flow is about two times higher, and also that the local deposition velocity at the center of wafer is high equivalent to that the wafer edge.

Variation of Cone Crack Shape in Ceramic Materials According to Spherical Impact Velocity (입자충격속도에 따른 세라믹재료의 콘크랙 형상 변화)

  • O, Sang-Yeop;Sin, Hyeong-Seop;Seo, Chang-Min
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.26 no.2
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    • pp.380-386
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    • 2002
  • Damage behaviors induced in silicon carbide by an impact of particle having different material and size were investigated. Especially, the influence of the impact velocity of particle on the cone crack shape developed was mainly discussed. The damage induced by spherical impact was different depending on the material and size of particles. Ring cracks on the surface of specimen were multiplied by increasing the impact velocity of particle. The steel particle impact produced larger ring cracks than that of SiC particle. In the case of high velocity impact of SiC particle, radial cracks were produced due to the inelastic deformation at the impact site. In the case of the larger particle impact, the damage morphology developed was similar to the case of smaller particle one, but a percussion cone was farmed from the back surface of specimen when the impact velocity exceeded a critical value. The zenithal angle of cone cracks developed into SiC material decreased monotonically with increasing of the particle impact velocity. The size and material of particle influenced more or less on the extent of cone crack shape. An empirical equation, $\theta$= $\theta$$\sub$st/, v$\sub$p/(90-$\theta$$\sub$st/)/500 R$\^$0.3/($\rho$$_1$/$\rho$$_2$)$\^$$\frac{1}{2}$/, was obtained as a function of impact velocity of the particle, based on the quasi-static zenithal angle of cone crack. It is expected that the empirical equation will be helpful to the computational simulation of residual strength in ceramic components damaged by the particle impact.

Measurement of Particle Deposition Velocity toward a Horizontal Semiconductor Wafer Using a Wafer Surface Scanner (Wafer Surface Scanner를 이용한 반도체 웨이퍼상의 입자 침착속도의 측정)

  • Bae, G.N.;Park, S.O.;Lee, C.S.;Myong, H.K.;Shin, H.T.
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.5 no.2
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    • pp.130-140
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    • 1993
  • Average particle deposition velocity toward a horizontal semiconductor wafer in vertical airflow is measured by a wafer surface scanner(PMS SAS-3600). Use of wafer surface scanner requires very short exposure time normally ranging from 10 to 30 minutes, and hence makes repetition of experiment much easier. Polystyrene latex (PSL) spheres of diameter between 0.2 and $1.0{\mu}m$ are used. The present range of particle sizes is very important in controlling particle deposition on a wafer surface in industrial applications. For the present experiment, convection, diffusion, and sedimentation comprise important agents for deposition mechanisms. To investigate confidence interval of experimental data, mean and standard deviation of average deposition velocities are obtained from more than ten data set for each PSL sphere size. It is found that the distribution of mean of average deposition velocities from the measurement agrees well with the predictions of Liu and Ahn(1987) and Emi et al.(1989).

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Characteristic analysis and design of a precise manipulation device using surface acoustic wave (표면탄성파를 이용한 이송장치의 IDT 형상 변화에 따른 특성 연구)

  • Eom, Jinwoo;Park, No-Cheol;Park, Young-Pil
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2014.10a
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    • pp.79-83
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    • 2014
  • In this paper, SAW devices are fabricated using various IDT shape(Single/Double) to check an effect of the IDT on SAW device. And based on theory of a particle velocity moved by SAW and IDT, a particle velocity is measured and calculated. Depend on insert power, a particle velocity using Single-IDT SAW device is about two times bigger than Double-IDT SAW device and it's almost same with a theoretical different.

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Analysis on Particle Deposition on a Heated Rotating Disk (가열되는 회전원판으로의 입자 침착 해석)

  • Yu, Gyeong-Hun
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.26 no.2
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    • pp.245-252
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    • 2002
  • Numerical analysis was conducted to characterize particle deposition on a horizontal rotating disk with thermophorectic effect under laminar flow field. The particle transport mechanisms considered were convection, Brownian diffusion, gravitational settling and thermophoresis. The averaged particle deposition velocities and their radial distributions for the upper surface of the disk were calculated from the particle concentration equation in a Eulerian frame of reference for rotating speeds of 0∼1000rpm and temperature differences of 0∼5K. It was observed from the numerical results that the rotation effect of disk increased the averaged deposition velocities, and enhanced the uniformity of local deposition velocities on the upper surface compared with those of the disk at rest. It was also shown that the heating of the disk with ΔT=5K decreased deposition velocity over a fairly broad range of particle sizes. Finally, an approximate deposition velocity model for the rotating disk was suggested. The comparison of the present numerical results with the results of the approximate model and the available experimental results showed relatively good agreement between them.

Effect of Particle Shape for Powder Flow on Hopper Surface (호퍼 표면에서의 분말 유동에 대한 입자 형상의 영향)

  • Kang, Min-Chang;Bang, Sang-Wook;Park, Junyoung
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.21 no.9
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    • pp.28-34
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    • 2022
  • The flow at the top surface of the hopper is of particular industrial interest. Previously, the velocity distribution inside the hopper was predicted using the simple, void and spot models, which are equations for the particle flow field. However, because these equations cannot predict the velocity distribution at the top surface, a new equation has been recently proposed. This study employed the discrete element method with the changed shape of the particles. Based on the results, the shape of the particle had no effect on the discharge angle and shape of the velocity distribution; however, it greatly affected the size of the velocity distribution and bed thickness of the flowing particles. Therefore, in the future, it is necessary to modify the theoretical equation by considering the shape of the particles.

Particle Velocity Equation for Korean Surface Blasting Type (노천발파 표준공법의 진동예상식)

  • 양형식;김원범;최미진;장선종
    • Explosives and Blasting
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    • v.22 no.3
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    • pp.27-33
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    • 2004
  • Particle Velocity Equations were suggested in this paper for Korean surface blasting types, which were developed by Korean Society for Explosive Engineers (KSEE). Standard charges per delay for types and distances also were determined. USBM equation which was adopted by MOCT (Korean Ministry of Construction and Transportation) shows many problems for Korean situations.

Particle deposition on a rotating disk in application to vapor deposition process (VAD) (VAD공정 관련 회전하는 원판으로의 입자 부착)

  • Song, Chang-Geol;Hwang, Jeong-Ho
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.22 no.1
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    • pp.61-69
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    • 1998
  • Vapor Axial Deposition (VAD), one of optical fiber preform fabrication processes, is performed by deposition of submicron-size silica particles that are synthesized by combustion of raw chemical materials. In this study, flow field is assumed to be a forced uniform flow perpendicularly impinging on a rotating disk. Similarity solutions obtained in our previous study are utilized to solve the particle transport equation. The particles are approximated to be in a polydisperse state that satisfies a lognormal size distribution. A moment model is used in order to predict distributions of particle number density and size simultaneously. Deposition of the particles on the disk is examined considering convection, Brownian diffusion, thermophoresis, and coagulation with variations of the forced flow velocity and the disk rotating velocity. The deposition rate and the efficiency directly increase as the flow velocity increases, resulting from that the increase of the forced flow velocity causes thinner thermal and diffusion boundary layer thicknesses and thus causes the increase of thermophoretic drift and Brownian diffusion of the particles toward the disk. However, the increase of the disk rotating speed does not result in the direct increase of the deposition rate and the deposition efficiency. Slower flow velocity causes extension of the time scale for coagulation and thus yields larger mean particle size and its geometric standard deviation at the deposition surface. In the case of coagulation starting farther from the deposition surface, coagulation effects increases, resulting in the increase of the particle size and the decrease of the deposition rate at the surface.