• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.354.2-354.2
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• 2014

최근 반도체 산업의 발전에 따라 반도체 소자 내 배선재료로 사용되던 Aluminium (Al)의 대체물로 Copper (Cu)가 사용되고 있다. Cu는 Al보다 우수한 전도성과 비용이 저렴하다는 장점이 있으나 반도체 기판과의 확산으로 이를 해결해야만 하는 문제점이 있다. 이는 Si와 Cu사이에 확산방지막을 사용하여 해결할 수 있는데 Hafnium Nitride (HfN) 박막은 다른 물질과 비교해 고온에서의 안정성과 낮은 비저항을 가지고 있어 주목을 받고 있다. 본 연구에서는 rf magnetron sputter 방법으로 박막 증착 시에 인가하는 rf power가 박막의 표면 특성에 어떠한 영향을 미치는지 nano-indenter를 사용해 surface hardness와 elastic modulus의 변화를 중심으로 알아보았다. 시료는 rf magnetron sputter로 증착 시 인가하는 plasma power를 60W와 80W로 달리하여 증착하였다. 증착가스는 Ar과 $N_2$를 조절하여 사용하였고 총 유량을 40 sccm 으로 고정하였으며, 이 때 압력은 3mTorr로 유지하였다. 실험결과 plasma power를 80W로 인가하여 증착한 시료의 surface hardness (18.48 GPa)가 60W로 증착한 시료의 surface hardness (12.03 GPa)보다 큰 값을 나타내었다. 이와 마찬가지로 80W로 증착한 시료의 elastic modulus(187.16 GPa)도 60W로 증착한 시료의 탄성계수 (141.15 GPa)보다 큰 값을 나타내었다. 이는 증착 시 인가하는 plasma power의 크기가 증가하면 박막표면에 compressive stress가 생성되어 박막의 surface hardness와 elastic modulus가 상대적으로 높게 측정되는 것으로 생각된다.

• Journal of Surface Science and Engineering
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• v.38 no.2
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• pp.60-64
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• 2005

The ICP-CVD (inductively coupled plasma chemical vapor deposition) process was applied to the deposition of $TiB_2$ films. For plasma generation, 13.56 MHz r.f. power was supplied to 2-turn Cu coil placed inside chamber. And the gas mixture of $TiCl_4,\;BCl_3,\;H_2$ and Ar was used for $TiB_2$ deposition. $TiB_2$ films with high hardness (<40 GPa) were obtained at extremely low deposition temperature $(250^{\circ}C)$, and the films hardness increased with ICP power and gas flow ratio of $TiCl_4/BCl_3$. The film structure was changed from (100) preferred orientation to random orientation with increasing RF power. It is supposed that the enhanced hardness of films was caused by a strong Ti-B chemical bonding of stoichiometric $TiB_2$ films and film densification induced by high density plasma.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.7 no.1
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• pp.67-74
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• 2008

In this paper, the surface characteristics of the AIP-TiN coated of the SKH51 and SKD11 steels under various deposition times are presented with emphasis on the comparison of the two materials. The micro-particle, the surface roughness, the micro-hardness, the coated layer thickness, the atomic distribution of Ti, N and Fe elements and the adhesion are measured for various deposition times. It has been shown that the micro-particle, the surface roughness, the coated layer thickness and the atomic distribution of Ti, N and Fe elements are similar for the two cases regardless of the test deposition time from 10 to 180 minutes. However, it has been shown that the micro-hardness and the adhesion of the SKH51 steel are higher than the SKD11 steel, indicating that they are much affected by the hardness of the material to be coated.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.3
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• pp.100-108
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• 2004

Contamination of environment induces the shortage of drinkables. In this trend, the leakage of water that occurs by breakage or erosion of rubber valve seats is serious problem. Rubber is apt to cause breakage between two materials when they contact with each other. The possible way to avoid leakage of water by damage and breakdown of rubber is to replace that with metal. Because of this reason, nowadays, rubber is being substituted with metal as valve seat materials for water works. In tribology, a severe from of wear is characterized by local, macroscopic material transfer, removal, or formation of surface protrusions when two solid surfaces experience relative sliding under load. One of the major problems in sliding of metals is galling due to bad surface quality. Experimentally, there are various elements which influence on incipient galling, such as hardness, surface roughness, temperature, load, velocity and external environments. This paper is aimed at verifying the galling tendencies according to hardness, surface roughness, load and velocity and showing how much effect the factors have on the galling tendencies.

• Laser Solutions
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• v.18 no.2
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• pp.1-4
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• 2015

This study is related to the surface hardening treatment to spheroidal graphite cast iron for die by using high power diode laser. Laser device used in this experiment is capable of real-time laser power control. This is because the infrared temperature sensor (two color pyrometer) attached to the optical system measures the surface temperature of specimen and adjusts the laser power in real time. The surface treatment was carried out with the change of heat treatment temperature at the beam travel speed 3 mm/sec. Hardened width and depth was measured and hardened zone was analyzed by micro vickers hardness test in order to research the optimum condition of heat treatment. The changes in microstructure of the hardened zone also was examined. As a result of hardness measurement and observations on microstructure of hardened zone, hardness increased over three times as compared with base metal because the martensite was formed on the matrix structure.

• Journal of Surface Science and Engineering
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• v.47 no.6
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• pp.293-296
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• 2014

Fe-Ni has been of great interest because it is known as one of low thermal expansion alloys as various application areas. This alloy was fabricated by electroforming process, and effect of heat treatment on thermal expansion and hardness was investigated. Nano-crystalline structure of 13.3 - 63.5 nm in size was observed in the as-deposited alloy. To investigate the effect of heat treatment on grain growth and mechanical/thermal properties, we conducted hardness and coefficient of thermal expansion (CTE). From this, we confirmed these properties were varied by heat treatment. In this nano-crystalline alloy, we could observe abnormal behavior in thermal expansion between $350-400^{\circ}C$. Additionally, an abrupt change in hardness has also been observed. However, once the grains grow up to micro-sized the mechanical and thermal properties mentioned above were stabilized similar to those of bulk alloys due to heat treatment.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.34 no.1
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• pp.16-20
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• 2021

In this study, we tried finding new materials to improve the stain resistance properties of polymer insulating materials. Using the filtered vacuum arc source (FVAS) with a graphite target source, DLC thin films were deposited on silicon and polymer insulator substrates depending on their thickness to confirm the surface properties, physical properties, and structural properties of the thin films. Subsequently, the possibility of using a DLC thin film as a protective coating material for polymer insulators was confirmed. DLC thin films manufactured in accordance with the thickness of various thin films exhibited a very smooth and uniform surface. As the thin film thickness increased, the surface roughness value decreased and the contact angle value increased. In addition, the elastic modulus and hardness of the DLC thin film slightly increased, and the maximum values of elastic modulus and hardness were 214.5 GPa and 19.8 GPa, respectively. In addition, the DLC thin film showed a very low leakage current value, thereby exhibiting electrical insulation properties.

• Journal of Surface Science and Engineering
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• v.57 no.2
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• pp.105-114
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• 2024

Tempering behavior and mechanical properties in AISI H13 steel, quenched and tempered from 300 ℃ to 700 ℃ for different tempering time (1, 2, 5, 10, 20 hr) were quantitatively investigated by scanning electron microscopy (SEM), x-ray diffractometer (XRD), impact test machine, rockwell apparatus, ball-on-disk tester. Under the condition that the tempering time is 2 hours, the hardness increases slightly as the tempering temperature increases, but decreases rapidly when the tempering temperature exceeds 500 ℃, while the impact energy increases in proportion to the tempering temperature. Friction tests were conducted in dry condition with a load of 30 N, and the friction coefficient and wear rate according to tempering conditions were measured to prove the correlation with hardness and microstructure. In addition, primary tempering from 300 ℃ to 700 ℃ was performed at various times to establish a kinetic model to predict hardness under specific tempering conditions.

• Journal of the Korean Wood Science and Technology
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• v.36 no.6
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• pp.121-129
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• 2008

Environmental friendly UV-curable coatings, having excellent hardness, gloss, mar and chemical resistance, are commonly used for the wooden flooring coatings. Especially epoxy acrylate oligomers are chosen for the wooden flooring coatings, due to their thermal stability and fast curing. In this study, we investigated the effect of the acrylate functionality on the thermal stability and surface hardness. The thermal degradations of monomers, oligomer, photoinitiator and formulated coatings with different acrylate functionality were measured using a thermogravimetric analysis (TGA). And the surface hardness was also measured with a pendulum hardness tester to compare relationship between the thermal stability and the physical property. The cured coatings became thermally stable by crosslinking during UV-curing. Both the thermal stability and surface hardness of cured coatings were improved with increasing acrylate functionality.

• Journal of Surface Science and Engineering
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• v.38 no.5
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• pp.202-206
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• 2005

Nitriding treatments were conducted on tool steel (SKD 61) at a temperature of $500^{\circ}C$ for 5 hr using high vacuum direct current (DC) plasma, with ammonia and argon as source gases. The structural and compositional changes produced in the nitrided layers by applying different ratios of Ar to $NH_{3}\;(n_{Ar}/n_{NH3}) were investigated using glancing x-ray diffraction (GXRD), optical microscopy, atomic force microscopy (AFM), micro-Vickers hardness testing, and pin-on-disc type tribometer. Nitriding case depths of around of $50{\mu}m$ were produced, varying slightly with different ratios of $n_{Ar}/n_{NH3}. It was found that the specimen surface hardness was 1150 Hv with $n_{Ar}/n_{NH3}=1, increasing to a maximum value of 1500 Hv with $n_{Ar}/n_{NH3}=5. With a further increase in ratio to $n_{Ar}/n_{NH3}=10, the surface hardness of the specimen reduced slightly to a value of 1370 Hv. These phenomena were caused by changes of the crystallographic structure of the nitride layers, i.e the $\gamma'-Fe_{4}N$ phase only was observed in the sample treated with $n_{Ar}/n_{NH3}$=1, and the intensity of the $\gamma'-Fe_{4}N$ phase were reduced but new phase of $\varepsilon'-Fe_{3}N$, which was known as a high hardness, with increasing $n_{Ar}/n_{NH3}. Also, the relative weight loss of counterface of the pin-on-disc with unnitrided steel was 0.2. And that of nitrided steel at a gas mixture ($n_{Ar}/n_{NH3}) of 1, 5, 7, and 10 was 0.4, 0.7, 0.6, and 0.5 mg, respectively. This means that the wear resistance of the nitrided samples could be increased by a factor of 2 at least than that of unnitrided steel.