Deposition Of Films by High Density Plasma Assisted Chemical Vapor Deposition |
Lee S. H.
(Plasma Surface Engineering Lab., School of Materials Science and Engineering, Seoul National University)
Nam K. H. (Plasma Surface Engineering Lab., School of Materials Science and Engineering, Seoul National University) Hong S. C. (LG Production Engineering Research Center, LG Electronics) Lee J. J. (Plasma Surface Engineering Lab., School of Materials Science and Engineering, Seoul National University) |
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