• 제목/요약/키워드: superconducting thin films

검색결과 258건 처리시간 0.023초

죠셉슨 소자구현을 위한 YBCO다층 박막 제작 및 특성 (Fabrication and Charactreization of YBCO Multi-layer Thin Films for Josephson device)

  • 이현수;박재윤;박상현;이동훈;박홍재;김영주
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2002년도 학술대회 논문집 전문대학교육위원
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    • pp.49-51
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    • 2002
  • In this thesis, Josephson junction using high-Tc superconducting multi-layer thin film has been fabricated by on-axis RF magnetron sputtering method. And, the characterizations were performed by X-ray diffraction, SEM and the measuring system of critical current density. The physical properties of multi-layer superconducting thin films were also analyzed with the measured results. To fabricate the multi-layer superconducting thin films, the optimum partial pressure of Argon and Oxgen and the temperature of substrate were measured. Also, YBaCuO thin film was grown on MgO and $SrTiO_3$ substrates by rf-sputtering and LGO thin film of 30 A was epitaxially grown on the YBaCuO thin film as a josephson junction with the same condition. The schottky barrier at the contact surface between YBaCuO/LGO and YBaCuO/Au and the energy gap of 0.5 ${\sim}$ 0.6 mV in Nb were observed from the dI/dV-V of YBaCuO/LGO/Au/Nb and YBaCuO/Au/Nb.

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PLD법을 이용한 다양한 온도에서의 $FeSe_x$ 초전도 박막 성장 (Growth of $FeSe_x$ Superconducting Thin Films at Various Temperatures by PLD Technique)

  • 정순길;이남훈;강원남;황태종;김동호
    • Progress in Superconductivity
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    • 제13권2호
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    • pp.117-121
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    • 2011
  • We have fabricated $FeSe_x$ superconducting thin films at much different substrate temperatures of 430 and $610^{\circ}C$ on $Al_2O_3$(0001) substrates by using a pulsed laser deposition (PLD) technique. Superconducting transitions for both films were shown around 10 K, but their transition width and growth directions of grains were different. We found that superconducting tetragonal FeSe phases and non-superconducting hexagonal FeSe phases were coexisted in the sample grown at the low temperature of $430^{\circ}C$, whereas the hexagonal FeSe phase was decreased with increasing fabrication temperatures.

레이저 공정을 이용한 초전도 통신소자 제작과 고주파특성 연구 (Study on the synthesis and the frequency response of HTS microwave device fabricated by pulsed laser deposition)

  • 박주형;정영식;이상렬
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1997년도 추계학술대회 논문집 학회본부
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    • pp.288-290
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    • 1997
  • Pulsed laser ablation has been used to fabricate superconducting $YBa_2Cu_3O_{7-x}$(YBCO) thin films on MgO substrates. The epitaxial YBCO thin films were grown at $750^{\circ}C$ and oxygen partial pressure of 200 mTorr. The electrical property and the characteristics of the YBCO thin films have been studied by R-T measurement. scanning electron microscopy (SEM) and X-ray diffraction (XRD). A microstrip line resonator has been fabricated using YBCO superconducting thin films by photolithography and wet-etch process. The resonator has linear microstrip line separated by a gap of 0.278 mm. We observed a fundamental resonance peak at the frequency of 10.007 GHz.

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Off-Axis RF 마그네트론 스퍼터링에 의한 $YBa_2Cu_3O_{7-x}$ 고온 초전도 박막의 제조 (Fabrication of High-Tc Superconducting $YBa_2Cu_3O_{7-x}$ Thin Films by Off-Axis RF Magnetron Sputtering)

  • 성건용;서정대;강광용;장순호
    • 한국세라믹학회지
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    • 제28권3호
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    • pp.243-251
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    • 1991
  • High-Tc YBa2Cu3O7-x superconducting thin films have been prepared by single-target off-axis RF magnetron sputtering. Optimal ratio of Y : Ba : Cu of the single-target was determined as 1 : 1.65 : 3.35 in order to obtain the stoichiometric films. Tc, crystalline phase, and microstructures of the surface and cross-section of the ex-situ YBa2Cu3O7-x thin films on MgO(100) had a Tc, zero of 80K, and the films on LaAlO3/Si had a Tc, on-set of 90 K and a Tc, zero of 70 K.

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Bi 고온 초전도 박막의 부착 공정 (Sticking processing of Bi high $T_c$ superconducting thin films)

  • 천민우;김태곤;박용필
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 춘계학술대회 논문집
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    • pp.94-97
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    • 2005
  • Bismuth high Tc superconducting thin films are fabricated via a co-deposition process by an ion beam sputtering with an ultra low growth rate, and sticking processing of the respective elements are evaluated. The sticking processing of bismuth element in bismuth high Tc superconducting thin film formation was observed to show a unique temperature dependence; it was almost a constant value of 0.49 below about $730^{\circ}C$ and decreased linearly over about $730^{\circ}C$. This temperature dependence can be elucidated from the evaporation and sublimation rates of bismuth oxide, $Bi_2O_3$, from the film surface. It is considered that the liquid phase of the bismuth oxide plays an important role in the bismuth phase formation in the co-deposition process.

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이온 빔 스퍼터법으로 제작한 BiSrCaCuO 초전도 박막의 상안정 영역 (Phase Stability Region of BiSrCaCuO Superconduction Thin Films Fabricated by Ion Beam Sputtering Method)

  • 양승호;박노봉;박용필
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 제5회 학술대회 논문집 일렉트렛트 및 응용기술연구회
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    • pp.49-52
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    • 2003
  • BiSrCaCuO superconducting thin films have been fabricated by co-deposition using IBS(Ion Beam Sputtering) method. Despite setting the composition of thin film Bi2212 or Bi2223, in both cased, Bi2201, Bi2212 and Bi2223 phase were appeared. It was confirmed the obtained field of stabilizing phase was represented in the diagonal direction of the right below end in the Arrhenius plot of temperature of the substrate and $PO_3$ and it was distributed in the reeone.

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IBS법으로 제작한 BSCCO 박막의 상안정 영역 (BSCCO Thin Films Fabricated by ion Beam Sputtering Method)

  • 양승호;양동복;박용필
    • 한국정보통신학회:학술대회논문집
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    • 한국해양정보통신학회 2003년도 춘계종합학술대회
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    • pp.538-541
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    • 2003
  • BSCCO superconducting thin films have been fabricated by co-deposition using IBS(Ion Beam Sputtering) method. Despite setting the composition of thin film Bi2212 or Bi2223, in both cases, Bi2201, Bi2212 and Bi2223 phase were appeared. It was confirmed the obtained field of stabilizing phase was represented in the diagonal direction of the right below end in the Arrhenius plot of temperature of the substrate and PO$_3$, and it was distributed in the rezone. The XRD peak of the generated film continuously changed according to the substrate temperature.

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펄스 레이저 증착법에 의한 YBCO 박막증착과 이중모드 공진기의 제작 (Fabrication of Novel Dual Mode Resonator Using Superconducting Thin Film Grown by Pulsed Laser Deposition)

  • 박주형;이상렬;안달
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1998년도 하계학술대회 논문집 D
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    • pp.1546-1548
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    • 1998
  • Dual mode ring resonators(DMRR) have been fabricated using laser ablated $YBa_2Cu_3O_{7-x}$ superconducting thin films. The transition temperature of YBCO thin films were 85 - 88 K and the film thicknesses were about 5,000 $\AA$. Dual mode ring resonators were patterned by standard photolithography process and wet-etching. Then two-layer metal thin films (Ti/Ag) have been deposited for the ground plane on the back side of substrate by e-beam and thermal evaporation. The input/output feedline angles of each resonator were $60^{\circ}$, $100^{\circ}$, $180^{\circ}$. A network analyzer was used for testing the performance of the resonators in the frequency range of 6-13 GHz at 77 K.

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4원타깃 RF마그네트론 스퍼터링법을 이용한 Bi계 고온 초전도체 박막의 제작 (Fabrication of Bi-based High-Tc superconducting thin films by 4-target RF magnetron sputtering methods)

  • 이현수;강형곤;임성훈;한병성
    • E2M - 전기 전자와 첨단 소재
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    • 제10권9호
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    • pp.869-875
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    • 1997
  • Bi based superconducting thin films were fabricated by 4-target RF magnetron sputtering using the method of controlling the on-off time. These thin films showed better crystal structures. The ratio of Cu/Bi decreased but the critical temperature increased with increasing the temperature of the substrate. High temperature phase low temperature of the substrate. High temperature phase low temperature phase and semiconducting phase can be formed by controlling the on-off time of the shutter respectively.

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초전도 한류기용 YBCO 박막 전류 Path Pattern 개발 (Development of new current path pattern of YBCO thin films for Superconducting fault current limiters)

  • 이방욱;강성종;박권배;오일성
    • Progress in Superconductivity
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    • 제6권2호
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    • pp.113-117
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    • 2005
  • In this study, electromagnetic analysis of current paths including meander pattern, spiral pattern, and bi-spiral pattern were performed and in order to verity the analysis results, experiments tests including quench test, and insulation tests were performed. In addition, bubble corner concepts were introduced to enhance insulation reliability. From our study, bi-spiral pattern of YBCO thin films were rather effective for quench and insulation than the other patterns. So this current path pattern was adopted for YBCO thin films in order to develop 6.6 kV resistive fault current limiters. Finally YBCO thin films were connected in series and parallel to enhance capacity, and the test results of current limiting characteristics of 6.6kV resistive SFCL were successful. The Progress in Superconductivity is published every six month and serves as a channel for publications on superconductivity and related topics. The author(s) are required to submit THREE copies of the manuscripts along with original figures directly to the Editor.

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