• 반도체디스플레이기술학회지
• /
• 제19권1호
• /
• pp.17-22
• /
• 2020

Recently, the decrease in thin film thickness has been actively studied by changing several physical elements such as the increase in revolution velocity of lower substrate equipped with AC or DC motor. In this paper, we propose a novel spin coater control system that changes AC or DC motor and common use software with limitation of velocity and position control into step motor and LABVIEW software based on GUI to control revolution velocity and position more precisely. By determining six input values of rotation velocity 1, 5, 10, 25, 50, 100 PPS, we fabricated six samples using coating target, TA(tantalum) on silicon substrate and measured their thin film thickness by SEM. Hence, this research can be applied to inferring thin film thickness of tantalum regarding any value of revolution velocity without additional experiments and for linear reference model via property analysis of thin film thickness using other thin-film materials.

• 제어로봇시스템학회논문지
• /
• 제14권4호
• /
• pp.336-341
• /
• 2008

Recently, research on a flat panel display(FPD) has focused on organic light-emitting display(OLED) which has wide angle of view, high contrast ratio and low power consumption. ITO(Indium-Tin-Oxide) films are the most widely used material as a transparent electrode of OLED and also in many other display devices like LCD or PDP. The performance and efficiency of OLED is related to the surface condition of ITO coated glass substrate. The typical surface defect of glass substrate is measured for electric characteristics and physical condition for transmittance and roughness. Since ITO coated glass substrate can be destroyed for inspection about surface roughness, sheet resistance, film thickness and transmittance, precise fabrication condition should be made based on the estimated relationship. In this paper, ITO films were prepared on the commercial glass substrate by the Ion-Plating method changing the partial pressure of gas(Ar, 02) and the chamber temperature between $200^{\circ}C$ and $300^{\circ}C$. The characteristics of films were examined by the 4-point probe, supersonic thickness measurement, transmittance measurement and AFM. We estimated the relationship between processing parameters(Ar gas, O2 gas, Temperature) and properties of ITO films (Sheet Resistance, Film Thickness, Transmittance, Surface Roughness).

• Composites Research
• /
• 제22권3호
• /
• pp.9-17
• /
• 2009

본 논문에서는 분자동력학 방법을 이용하여 Ag 필름/Cu기판에 대한 나노인덴테이션 특성을 파악하였다. 필름의 강성과 경도는 필름의 두께에 관계되어있으며, 임계범위 내에서, 그래인 크기가 증기하면 강성과 경도도 증가하는 것을 확인하였다. 5nm 두께 이하의 Ag필름/Cu기판의 강성과 경도는 벌크 Ag의 경우에 비해 낮은 값을 나타내었다. 특히 4nm 두께 이하의 Ag필름/Cu기판의 인덴테이션에 있어서, 전위 집적과 불일치 전위사이의 상호작용에 의해 계면상에서 꽃모양의 전위 루프가 발생 하였다. 이는 인덴테이션 하중과 변위 커브에서 하중이 저하되는 것과 관계있는 것으로 사료되고 있다.

• 한국진공학회지
• /
• 제16권2호
• /
• pp.105-109
• /
• 2007

본 논문에서는 AZO 박막 두께 변화에 따른 구조적, 전기적, 광학적 특성의 영향에 대하여 연구하기 위하여 폴리카보네이트(PC : polycarbonate) 기판 위에 DC 스퍼터링법으로 증착시간을 변화시켜 박막의 두께를 조절하였다. 박막의 두께는 100 nm에서 500 nm까지 100 nm단위로 실험하였으며, 제작된 AZO 박막의 비저항 특성은 four point probe system를 이용하여 측정하였고, 박막의 입자크기, 표면상태를 Environment Secondary Electron Microscopy (ESEM)으로 관찰하였다. 또한 AZO 박막의 결정상태를 조사하기 위하여 High Resolution X-Ray Diffractometer (HR-XRD)를 이용하였고 광학적 투과도는 UV-visible spectrophotometer를 이용하여 분석하였다. 실험 결과 모든 박막에서 90% 이상의 광투과도를 보였으며 400 nm과 500 nm 두께의 AZO 박막에서는 $4.5{\times}10^{-3}\;{\Omega}-cm$의 비저항과 3.61 eV의 광밴드갭 에너지를 보였다.

• 한국세라믹학회지
• /
• 제32권4호
• /
• pp.441-447
• /
• 1995

Ba0.65Sr0.35TiO3 (BST) thin films were deposited on Pt/SiO2/Si(100) substrate by rf magnetron sputtering. The substrate temperature changed from 35$0^{\circ}C$ to 55$0^{\circ}C$ and crystalline BST thin films were deposited above 45$0^{\circ}C$. Most of the films had (111) preferred orientation regardless of deposition temperature, but the films changed to (100) preferred orientation as gas pressure increased. The dielectric constant increased with increasing substrate temperature and film thickness, and ranged from 100 to 600 at room temperature. The leakage current increased as substrate temperature increased or as film thickness decreased.

• Structural Engineering and Mechanics
• /
• 제57권4호
• /
• pp.703-716
• /
• 2016

In this paper, we have investigated shear horizontal wave propagation in a layered structure, consisting of granular macromorphic rock (Dionysos Marble) substrate underlying a viscoelastic layer of finite thickness. SH waves characteristics are affected by the material properties of both substrate and the coating. The effects of microstructural parameter "characteristic length" of the substrate, along with heterogeneity, internal friction and thickness of viscoelastic layer are studied on the dispersion curves. Dispersion equation for SH wave is derived. Real and damping phase velocities of SH waves are studied against dimensionless wave number, for different combinations of various parameters involved in the problem.

• Current Optics and Photonics
• /
• 제1권6호
• /
• pp.637-641
• /
• 2017

We present dielectric constant measurements of thin films using THz metamaterials fabricated on a quartz substrate. The resonance shifts of the metamaterials exhibit saturation behavior with increasing film thickness. The saturation frequency shift varies with the real part of the dielectric constant, from which the numerical expression for the particular metamaterial design was extracted. We first performed finite-difference time-domain simulations to find an explicit relationship between the saturated frequency shift and the dielectric constant of a thin film, which was confirmed by the experimental results from conventional techniques. In particular, the quartz substrate enables us to determine their values more accurately, because of its low substrate index. As a result, we extracted the dielectric constants of various films whose values have not been addressed previously without precise control of the film thickness.

• Journal of Mechanical Science and Technology
• /
• 제19권10호
• /
• pp.1910-1918
• /
• 2005

Characterizing electrochemical polymerization of polypyrrole film on a substrate depends on many parameters. Among them, potential difference and cumulative charges play important role. The level of potential difference affects the quality of the polypyrrole. On the contrary, cumulative charge affects the thickness of the polypyrrole. The substrate surface is adjusted physically and chemically by treating with sandblasting and the addition of thiol for surface adhesion improvement. Experimental results show that the sandblasted and thiol treated substrate provides better. adhesion than non-sandblasted and non-thiol treated substrate.

• Corrosion Science and Technology
• /
• 제9권4호
• /
• pp.143-146
• /
• 2010

For the issue of flaking of the hot-dip galvanizing coating during drawing, the microcosmic characteristics of the coatings have been analyzed and experiments have been done to investigate the influence of coating thickness, Al content and steel substrate strength on its flaking-resistance. The results show that the fact of flaking is that the coating partially flaked off at the position far away from interface of steel substrate and coating, and not entirely flaked off from steel substrate because of poor adhesion. The flaking-resistance of coating decreases with the increasing of coating thickness and steel substrate strength, and increases with the increasing of Al content in coating at the same experimental conditions.

• 한국표면공학회지
• /
• 제37권3호
• /
• pp.158-163
• /
• 2004

ITO thin film was deposited on the glass by RF magnetron sputtering. Dependance of the process parameters such as thickness, target-to-substrate distance, substrate temperature and oxygen partial pressure on the transmittance and electrical resistance of ITO film were investigated. The deposition conditions for getting better optical and electrical ITO characteristics were the 1800-$2300\AA$ thickness, 65mm substrate-to-target distance, $350^{\circ}C$ substrate temperature and 8% oxygen partial pressure. At these conditions, the transmittance and sheet resistance of the ITO film were 83.3% and 77.86Ω/$\square$, respectively.