Browse > Article

The Research via Linear of Tantalum Thin Film Thickness Depending on Revolution Velocity of Spin Coater  

Kim, Seung Wook (Gumi University, School of Mechanical Engineering)
Publication Information
Journal of the Semiconductor & Display Technology / v.19, no.1, 2020 , pp. 17-22 More about this Journal
Abstract
Recently, the decrease in thin film thickness has been actively studied by changing several physical elements such as the increase in revolution velocity of lower substrate equipped with AC or DC motor. In this paper, we propose a novel spin coater control system that changes AC or DC motor and common use software with limitation of velocity and position control into step motor and LABVIEW software based on GUI to control revolution velocity and position more precisely. By determining six input values of rotation velocity 1, 5, 10, 25, 50, 100 PPS, we fabricated six samples using coating target, TA(tantalum) on silicon substrate and measured their thin film thickness by SEM. Hence, this research can be applied to inferring thin film thickness of tantalum regarding any value of revolution velocity without additional experiments and for linear reference model via property analysis of thin film thickness using other thin-film materials.
Keywords
Spin Coater; Linear; Regression Analysis; Curve Fitting; PPS(Pulse Per Second);
Citations & Related Records
연도 인용수 순위
  • Reference
1 Kim, S. W., Heo, G. S., Lee, S. R., "The research via linear model of tantalum thin film thickness depending on revolution velocity of spin coater," International Symposium on Green Manufacturing and Applications (ISGMA 2016), pp229/277
2 Kim, J. E., Kim, J. H., Hong, S. C., Cho, H.K., Ahn, J.H., "Mechanical Stability Evaluation of Thin Film with Spincoater," Journal of the Semiconductor & Display Technology, Vol. 15, No. 1. March 2016,pp 6-11.
3 Jeong, J. I., Yang, J. H., "Trend and Prospect of Thin Film Processing Technology," Journal of the Korean Magnetics Society, Volume 21, Number 5, October , 2011.
4 Tyona, M. D., "A theoritical study on spin coating technique," Advances in Materials Research, Vol. 2, No. 4 (2013) 195-208, 2013.   DOI
5 Mouhamad,Y., Mokarian-Tabari,P., Clarke, N., Jones, R. A. L., and Geoghegan, M., "Dynamics of polymer film formation during spin coating," J. Appl. Phys. 116, 123513 (2014).   DOI
6 Sahu, N., Parija, B., Panigrahi, S., "Fundamental understanding and modeling of spin coating process," Indian J.Phys. 83(4) 493-502 (2009).   DOI
7 Tyona, M. D., "A comprehensive study of spin coating as a thin film deposition technique and spin coating equipment," Advances in Materials Research, Vol. 2, No. 4 (2013) 181-193.   DOI
8 Bianchi, R. F., Panssiera, M. F., Lima, J. P. H., Yagura, L., Andrade, A. M., "Spin coater based on burshless dc motor of hard disk drivers," Progress in Organic Coatings Volume 57,Issue 1, 2006, pp 33-36.   DOI
9 Yim, K. G., Kim, M. S., Kim, G. S., Choi, H. Y., Jeon, S. M., Cho, M. Y., Kim, H. G., Lee, D. Y., Kim, J. S., Kim, J. S., Lee, J. I., Leem, J. Y., "Effects of Thickness on Structural and Optical Properties of ZnO Thin Films Fabricated by Spin Coating Method," Journal of the korean Vacuum Society volume 19 Issue 4 / Page.281-286 / 2010 / 1225-8822(pISSN)   DOI