• 대한기계학회논문집B
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• 제28권2호
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• pp.215-222
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• 2004

Synthesis of multi-walled carbon nanotubes on a nickel-nitrate-deposited substrate using an ethylene fueled inverse diffusion flame was illustrated. The deposition of nickel-nitrate particles on substrates was used for the smaller-diameter nanotubes than those formed in our previous studies. Also the effect of temperature variations on the size of formed nanotubes was investigated. The diameters of formed multi-walled carbon nanotubes were ranging from 15 to 100 nm in the several radial locations. In case of using a nickel-nitrate-deposited substrate, the smaller-diameter carbon nanotubes were synthesized than those in case of using the substrate with melted nickel-nitrate. In the formation region of carbon nanotubes, the diameter of formed nanotubes was tend to be decrease as the radial distance form the flame center was increased, that is the decreased substrate temperature.

• 한국재료학회지
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• 제9권2호
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• pp.144-148
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• 1999

We have studied the deposition characteristics of thick silicon dioxide film on Si substrate by $O_3$/TEOS APCVD(Atmospheric Pressure Chemical Vapor Deposition). The effect of deposition parameters such as the distance between showerhead and substrate, deposition temperature, TEOS flow rate and $O_3$/TEOS ratio on deposition rate, surface morphology, and properties of films as investigated. As deposition temperature increased, deposition rate decreased but the surface morphology and adhesion of film to substrate improved. As the distance between showerhead and substrate decreased, the deposition rate increased. Etching rate using the BOE increased as TEOS flow rate increased, but was independent of$ O_3$/TEOS ratio. Deposition rate of $5\mu\textrm{m}$/hour was obtained under the condition that the distance between showerhead and substrate was 5mm and the deposition temperature was $370^{\circ}C$.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.93-93
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• 2011

The Indium Zinc Tin Oxide (IZTO) and Indium Tin Oxide (ITO) thin films are grown on PI substrate at different substrate temperature by pulsed DC magnetron sputtering with a sintered ceramic target of IZTO (In2O3 70 wt.%, ZnO 15 wt.%, SnO2 15 wt.%) and ITO (In2O3 90wt.%, SnO2 10wt.%). The structural, electrical, and optical properties are investigated. The IZTO thin films deposited at low temperature showed relatively low electrical resistivity compared to ITO thin films deposited at low temperature. As a result, we could prepare the IZTO thin films with the resistivity as low as $5.6{\times}10^{-4}({\Omega}{\cdot}m)$. Both of the films deposited on PI substrate showed an average transmittance over 80% in visible range (400.800nm). Overall, IZTO thin film is a promising candidate as an alternative TCO material to ITO in flexible and OLED devices.

• Transactions on Electrical and Electronic Materials
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• 제6권3호
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• pp.106-109
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• 2005

We have investigated the generation of pretilt angle for a nematic liquid crystal (NLC) alignment with in-situ photoalignment method on polyimide (PI) surfaces using polymer films. Especially, we studied in-situ photoalignment changing heating temperature from $50^{\circ}C\;to\;120^{\circ}C$ on the polymer film. The LC aligning capabilities and pretilt angle on the polymer substrates were better than those on the glass substrate using in-situ photoalignment method. It is considered that this increase in pretilt angle may be attributed to the roughness of the micro-groove substrate induced by the in-situ photoalignment. As temperature of heated subtrate and UV exposure time increase, pretilt angle of the cell used polymer film increased. It is considered that the heating temperature of substrate is attributed to generate pretilt angle. Also, electro-optical performances of the in-situ photoaligned TN cell using the polymer substrate are almost the same as that of the TN cell using the glass substrate.

• 한국전기전자재료학회논문지
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• 제16권8호
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• pp.744-751
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• 2003

Co-Pd alloy thin films prepared by a DC-sputter that have self-organized nano structure(SONS), are promising for high-density information storage media in information era. We prepared the samples by varying Pd contents of 0~8.1 wt% at the substrate temperatures of room temperature (RT) and 200 $^{\circ}C$, respectively Microstructure and Pd contents of the Co$_{1-x}$ Pd$_{x}$ films are probed by a scanning electron microscope (SEM), a transmission electron microscope (TEM) and an energy dispersive spectrometer (EDS). We also investigated the saturation magnetization (Ms), remanence and coercivity of the Co$_{1-x}$ Pd$_{x}$ films. Surface roughness are measured by an atomic force microscope (AFM). We revealed that self-organized nano size Co-enriched phase and Pd-enriched phase existed with Pd contents at the substrate temperatures of RT and 20$0^{\circ}C$ through microstructure characterization. SONS helped to keep the saturation magnetization and enhance the perpendicular anisotropy with Pd contents. Out result implies that we may tune the perpendicular magnetic properties with keeping the saturation magnetization by varying substrate temperatures and Pd contents for high density magnetic recording.rding.

• 한국연소학회지
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• 제9권1호
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• pp.18-24
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• 2004

Synthesis of carbon nanomaterials on a metal substrate by an ethylene fueled inverse diffusion flame was illustrated. Two stainless steel plates coated with $Ni(NO_3){_2}$ were folded with each other and used as a catalytic metal substrate. Carbon nanotubes and nanofibers with diameters of 20 - 60nm were found on the substrate. From the TEM-EDS analyses, most of the nanomaterials turned out to be Nicatalyzed. Carbon nanotubes were formed on the substrate in the region ranging from about 1,400K to 900K. The formation mechanisms of nanotubes and nanofibers were similar. The synthesis temperature of the nanofibers was lower than that of the nanotubes. The higher synthesis temperature of nanotubes might enhance the activity of the catalyst metal and produce more condensed carbons. The accumulated graphite layers led to form compartments to release the compressive stress in the layers. The growth of carbon nanotubes was bamboo-shaped showing compartments in the inside hollow. The distances between those compartments represented the growth rate that depended on the synthesis temperature.

• 한국진공학회지
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• 제18권5호
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• pp.358-364
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• 2009

펄스레이저 증착법으로 박막의 결함 생성을 최소화하여 우수한 발광 특성을 가지는 ZnO 박막 성장에 대한 연구를 수행하였다. 이를 위하여 기판 온도를 $400^{\circ}C$에서 $850^{\circ}C$까지 변화시켜 박막을 증착한 후 엑스선 회절법, 원자힘 현미경, photoluminescence (PL) 등을 사용하여 박막의 특성 변화를 분석하였다. 그 결과 ZnO 박막은 기판 온도에 관계없이 (0001) 사파이어 기판에 c-축 배향성을 가지며 성장하였음을 확인하였고 기판온도 $600^{\circ}C$에서 가장 조밀한 박막이 형성되면서 박막에 응력이 거의 걸리지 않고 결정성도 우수함을 확인하였다. PL 분석 결과 역시 $600^{\circ}C$에서 증착된 ZnO 박막이 UV 발광 피크의 반치폭 및 결함에 의한 가시영역에서의 발광 등을 고려했을 때 가장 뛰어난 특성을 보여주었다. 이와 같은 결과는 ZnO 박막의 발광 특성이 박막의 구조적 특성과 매우 밀접한 관계가 있음을 나타내며 또한 기판 온도가 매우 중요한 역할을 함을 나타낸다. 결론적으로 기판 온도 $600^{\circ}C$에서 우수한 UV 발광 특성을 가지면서 결함에 의한 가시영역 발광이 거의 나타나지 않는 ZnO 박막을 성장시킬 수 있었고 이러한 박막은 UV 광소자에 응용될 수 있을 것으로 생각된다.

• 한국표면공학회지
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• 제34권5호
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• pp.481-485
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• 2001

We investigated the structural and electrical properties of the Ba ($Zr_{x}$ $T_{il-x}$ )$O_3$ (BZT thin films with a mole fraction of x=0.2 and thickness 150 nm for the application in MLCC (Multilayer Ceramic Capacitor). BZT films were prepared on $Pt/SiO_2$/Si substrate at various substrate temperatures by the RF-magnetron sputtering system. When the substrate temperature was above $500^{\circ}C$, we could obtain multi-crystalline BZT films oriented at (110), (111), and (200) directions. The crystallization of the film and high dielectric constant were observed with the increase of substrate temperature. Capacitance of the film deposited at high temperature is more sensitive to the applied voltage than that of the film deposited at low temperature. This paper reports surface morphology, dielectric constant, dissipation factor, and C-V characteristics for BZT films deposited at three different temperatures. The BZT film deposited at 40$0^{\circ}C$ shows stable electrical properties but a little small dielectric constant for MLCC application.

• ETRI Journal
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• 제32권2호
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• pp.195-203
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• 2010

A new vertical transition between a substrate integrated waveguide in a low-temperature co-fired ceramic substrate and an air-filled standard waveguide is proposed in this paper. A rectangular cavity resonator with closely spaced metallic vias is designed to connect the substrate integrated waveguide to the standard air-filled waveguide. Physical characteristics of an air-filled WR-22 to WR-22 transition are compared with those of the proposed transition. Simulation and experiment demonstrate that the proposed transition shows a -1.3 dB insertion loss and 6.2 GHz bandwidth with a 10 dB return loss for the back-to-back module. A 40 GHz low-temperature co-fired ceramic module with the proposed vertical transition is also implemented. The implemented module is very compact, measuring 57 mm ${\times}$ 28 mm ${\times}$ 3.3 mm.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2009년도 춘계학술대회 논문집
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• pp.85-87
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• 2009

Despite the success of $Cu(In,Ga)Se_2$ (CIGS) based PV technology now emerging in several industrial initiatives, concerns about the cost of In and Ga are often expressed. It is believed that the cost of those elements will eventually limit the cost reduction of this technology. one candidate to replace CIGS is $Cu_2ZnSnSe_4$ (CZTSe), fabricated by co-evaporation technique. Effects of substrate temperature of $Cu_2ZnSnSe_4$ absorber layer on the performance of thin films solar cells were investigated. As substrate temperature increased, the grain size of $Cu_2ZnSnSe_4$ films increased presumably. At a optimal condition of substrate temperature is $320^{\circ}C$, the solar cell shows a conversion efficiency of 1.79% with $V_{OC}$ of 0.213V, JSC of $16.91mA/cm^2$ and FF of 49.7%.