Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2011.02a
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- Pages.93-93
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- 2011
Study on IZTO and ITO Films Deposited on PI Substrate by Pulsed DC Magnetron Sputtering System
- Ko, Yoon-Duk (Samsung Mobile Display) ;
- Kim, Joo-Yeob (Samsung Mobile Display) ;
- Joung, Hong-Chan (Samsung Mobile Display) ;
- Lee, Chang-Hun (Graduate School of NID Fusion Technology) ;
- Bae, Jung-Ae (Graduate School of NID Fusion Technology) ;
- Choi, Byung-Hyun (Korea Institute of Ceramic Engineering and Technology) ;
- Ji, Mi-Jung (Korea Institute of Ceramic Engineering and Technology) ;
- Kim, Young-Sung (Graduate School of NID Fusion Technology)
- Published : 2011.02.09
Abstract
The Indium Zinc Tin Oxide (IZTO) and Indium Tin Oxide (ITO) thin films are grown on PI substrate at different substrate temperature by pulsed DC magnetron sputtering with a sintered ceramic target of IZTO (In2O3 70 wt.%, ZnO 15 wt.%, SnO2 15 wt.%) and ITO (In2O3 90wt.%, SnO2 10wt.%). The structural, electrical, and optical properties are investigated. The IZTO thin films deposited at low temperature showed relatively low electrical resistivity compared to ITO thin films deposited at low temperature. As a result, we could prepare the IZTO thin films with the resistivity as low as