• 제목/요약/키워드: sub-micro pattern

검색결과 38건 처리시간 0.029초

수직응력과 압입이론에 기반한 나노스케일 기계가공에서의 크기효과 분석 (Analysis of Size Effect of Nano Scale Machining Based on Normal Stress and Indentation Theories)

  • 전은채;이윤희;제태진
    • 한국기계가공학회지
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    • 제17권6호
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    • pp.1-6
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    • 2018
  • Recently nano meter size pattern (sub-micro scale) can be machined mechanically using a diamond tool. Many studies have found a 'size effect' which referred to a specific cutting energy increase with the decrease in the uncut chip thickness at micro scale machining. A new analysis method was suggested in order to observe 'size effect' in nano scale machining and to verify the cause of the 'size effect' in this study. The diamond tool was indented to a vertical depth of 1,000nm depth in order to simplify the stress state and the normal force was measured continuously. The tip rounding was measured quantitatively by AFM. Based on the measurements and theoretical analysis, it was verified that the main cause of the 'size effect' in nano scale machining is geometrically necessary dislocations, one of the intrinsic material characteristics. st before tool failure.

국소환경 모델을 이용한 초미세먼지(PM2.5) 노출 기여율 평가 (Evaluation of PM2.5 Exposure Contribution Using a Microenvironmental Model)

  • 신지훈;최영태;김동준;민기홍;우재민;김동준;신정현;조만수;성경화;이종대;양원호
    • 한국환경보건학회지
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    • 제48권2호
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    • pp.59-65
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    • 2022
  • Background: Since people move through microenvironments rather than staying in one place, they may be exposed to both indoor and outdoor PM2.5 concentrations. Objectives: The aim of this study was to assess the exposure level of each sub-population group and evaluate the contribution rate of the major microenvironments. Methods: Exposure scenarios for sub-population groups were constructed on the basis of a 2019 Time-Use survey and the previous literature. A total of five population groups were classified and researchers wearing MicroPEM simulated monitoring PM2.5 exposure concentrations in real-time over three days. The exposure contribution for each microenvironment were evaluated by multiplying the inhalation rate and the PM2.5 exposure concentration levels. Results: Mean PM2.5 concentrations were 33.0 ㎍/m3 and 22.5 ㎍/m3 in Guro-gu and Wonju, respectively. When the exposure was calculated considering each inhalation rate and concentration, the home showed the highest exposure contribution rate for PM2.5. As for preschool children, it was 90.8% in Guro-gu, 94.1% in Wonju. For students it was 65.3% and 67.3%. For housewives it was 98.2% and 95.8%, and 59.5% and 91.7% for office workers. Both regions had higher exposure to PM2.5 among the elderly compared to other populations, and their PM2.5 exposure contribution rates were 98.3% and 94.1% at home for Guro-gu and Wonju, respectively. Conclusions: The exposure contribution rate could be dependent on time spent in microenvironments. Notably, the contribution rate of exposure to PM2.5 at home was the highest because most people spend the longest time at home. Therefore, microenvironments such as home with a higher contribution rate of exposure to PM2.5 could be managed to upgrade public health.

Energy evolution characteristics of coal specimens with preformed holes under uniaxial compression

  • Wu, Na;Liang, Zhengzhao;Zhou, Jingren;Zhang, Lizhou
    • Geomechanics and Engineering
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    • 제20권1호
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    • pp.55-66
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    • 2020
  • The damage or failure of coal rock is accompanied by energy accumulation, dissipation and release. It is crucial to study the energy evolution characteristics of coal rock for rock mechanics and mining engineering applications. In this paper, coal specimens sourced from the Xinhe mine located in the Jining mining area of China were initially subjected to uniaxial compression, and the micro-parameters of the two-dimensional particle flow code (PFC2D) model were calibrated according to the experimental test results. Then, the PFC2D model was used to subject the specimens to substantial uniaxial compression, and the energy evolution laws of coal specimens with various schemes were presented. Finally, the elastic energy storage ratio m was investigated for coal rock, which described the energy conversion in coal specimens with various arrangements of preformed holes. The arrangement of the preformed holes significantly influenced the characteristics of the crack initiation stress and energy in the prepeak stage, whereas the characteristics of the cumulative crack number, failure pattern and elastic strain energy during the loading process were similar. Additionally, the arrangement of the preformed holes altered the proportion of elastic strain energy Ue in the total energy in the prepeak stage, and the probability of rock bursts can be qualitatively predicted.

Amino-Functionalized Alkylsilane SAM-Assisted Patterning of Poly(3-hexylthiophene) Nanofilm Robustly Adhered to SiO2 Substrate

  • Pang, Ilsun;Boo, Jin-Hyo;Sohn, Honglae;Kim, Sung-Soo;Lee, Jae-Gab
    • Bulletin of the Korean Chemical Society
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    • 제29권7호
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    • pp.1349-1352
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    • 2008
  • We report a novel patterning method for a homo-polymeric poly(3-hexylthiophene) (P3HT) nanofilm particularly capable of strong adhesion to a $SiO_2$ surface. An oxidized silicon wafer substrate was micro-contact printed with n-octadecyltrichlorosilane (OTS) monolayer, and subsequently its negative pattern was selfassembled with three different amino-functionalized alkylsilanes, (3-aminopropyl)trimethoxysilane (APS), N- (2-aminoethyl)-3-aminopropyltrimethoxy silane (EDAS), and (3-trimethoxysilylpropyl) diethylenetriamine (DETAS). Then, P3HT nanofilms were selectively grown on the aminosilane pre-patterned areas via the vapor phase polymerization method. To evaluate the adhesion, patterning, and the film itself, the PEDOT nanofilms and SAMs were investigated with a $Scotch^{(R)}$ tape test, contact angle analyzer, ATR-FT-IR, and optical and atomic force microscopes. The evaluation showed that the newly developed all bottom-up process can offer a simple and inexpensive patterning method for P3HT nanofilms robustly adhered to an oxidized Si wafer surface by the mediation of $FeCl_3$ and amino-functionalized alkylsilane SAMs.

$Ga^+$ 이온 빔 조사량에 따른 자기 조립 단분자막의 습식에칭 특성 (Effect of $Ga^+$ Ion Beam Irradiation On the Wet Etching Characteristic of Self-Assembled Monolayer)

  • 노동선;김대은
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 추계학술대회 논문집
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    • pp.326-329
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    • 2005
  • As a flexible method to fabricate sub-micrometer patterns, Focused Ion Beam (FIB) instrument and Self-Assembled Monolayer (SAM) resist are introduced in this work. FIB instrument is known to be a very precise processing machine that is able to fabricate micro-scale structures or patterns, and SAM is known as a good etch resistance resist material. If SAM is applied as a resist in FIB processing fur fabricating nano-scale patterns, there will be much benefit. For instance, low energy ion beam is only needed for machining SAM material selectively, since ultra thin SAM is very sensitive to $Ga^+$ ion beam irradiation. Also, minimized beam spot radius (sub-tens nanometer) can be applied to FIB processing. With the ultimate goal of optimizing nano-scale pattern fabrication process, interaction between SAM coated specimen and $Ga^+$ ion dose during FIB processing was observed. From the experimental results, adequate ion dose for machining SAM material was identified.

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Membrane Morphology: Phase Inversion to Electrospinning

  • Chanunpanich N.;Byun Hongsik;Kang Inn-Kyu
    • 멤브레인
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    • 제15권2호
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    • pp.85-104
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    • 2005
  • Recently, membrane can be prepared by two methods, phase inversion and electrospinning techniques. Phase inversion technique is a conventional but commercially preparation membrane. The most versatile of preparation in this technique is immersion of the cast film into nonsolvent bath, causing dense top layer with a finger-like pattern in the sub layer membrane. The membrane pore size getting from phase inversion is in the range of micro or submicrometer. As a result, it can be used as microfiltration and ultrafiltration applications. A new technique, electrospinning, is introduced for membrane preparation. Nonwoven nanofibrous mat or nanofibrous membrane is obtained. In this technique, electrostatic charge is introduced to the solution jet, causing a thin fiber with high surface area; hence it can be used in the applications where high surface area-to-volume or length-to-diameter ratios are required. Moreover, the pore size can be controlled by controlling the time of electrospinning. Hence, it can be used as a filter for filtering microparticles as well as nanoparticles.

Fabrication and Measurement of a Micro strip-Array Antenna for the Electronic Toll Collection System (ETCS)

  • Yoon, Joong-Han;Lee, Sang-Mok;Lee, Hwa-Choon;Kwak, Kyung-Sup;Chun, Su-Mi;Byun, Woo-Sub;Jung, Myung-Nam;Shin, Dong-Hun
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 2002년도 ITC-CSCC -2
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    • pp.723-726
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    • 2002
  • This paper describes the design, fabrication, and measurement of a sequential-rotation microstrip-array antenna for the Electronic Toll Collection System (ETCS). The ETCS is made possible by using roadside equipment with radiation pattern that can accurately pinpoint the designated communication area, without interference from other lanes. The sequential-rotation microstrip-array antenna was applied to the absorber to reduce the side lobe level (SLL). Results showed that the antenna yields a return loss at a center frequency of -20.675 dB, an axial ratio of 1.15 dB, and a gain of 20.26 dBi.

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고 종횡비의 미세 채널 패턴에서의 습식 식각 특성 분석 (The Characteristics of Wet Etch Process for Sub-micron Channel pattern with High Aspect Ratios)

  • 이춘수;최상수;백종태;유형준
    • 한국재료학회지
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    • 제5권2호
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    • pp.208-214
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    • 1995
  • 콘택 홀 패턴의 미세화가 HF 용액의 침투에 미치는 영향을 파악하고자, 미세 채널 패턴에서의 산화막 습식 식각 특성을 조사하였다. LPCVD로 증착된 산화막을 두께 0.1~1$\mu\textrm{m}$, 선폭 0.1~20$\mu\textrm{m}$, 그리고 초기 깊이 ~1.2$\mu\textrm{m}$ 범위의 질화막으로 둘러 쌓인 미세 채널 패터으로 제작한 후, HF용액에 의한 산화막의 식각속도를 관찰하였다. 실험 결과로써, 크기가 $0.1 \times 0.1 \mu \textrm{m}^{2} 초기 깊이가 1.2$\mu\textrm{m}$인 고종횡비(~12)의 초미세 패턴에서도 식각 속도가 일정함을 볼 수 있어서, 콘택 홀 패턴의 미세화에 관계없이 반응액의 침투가 원활하게 이루어짐을 알 수 있었다.

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근막통증증후군의 통증유발점 치료를 위한 멀티어레이 전극과 프로그램 가능한 다채널 전기자극기 개발 (Development of Multi-Array Electrode and Programmable Multi-channel Electrical Stimulator for Firing Trigger Point of Myofascial Pain Syndrome)

  • 김수홍;김수성;전계록
    • 대한의용생체공학회:의공학회지
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    • 제36권5호
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    • pp.221-227
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    • 2015
  • In this study, Multi-Array Electrodes (MAE) and Programmable Multi-channel Electrical Stimulator (PMES) were implemented for firing Trigger Points (TPs) of the patient with Myofascial Pain Syndrome (MPS). MAE has 25 Ag/AgCl electrodes arranged in the form of array ($5{\times}5$) fabricated with flexible pad, which are applicable to be easy-attached to curved specific region of the human body. PMES consisted of 25 channels. Each channel was to generate various electric stimulus patterns (ESPs) by changing the mono-phasic or bi-phasic of ESP, On/Off duration of ESP, the interval between ESP, and amplitude of ESP. PMES hardware was composed of Host PC, Stimulation Pattern Editing Program (SPEP), and Multi-channel Electrical Stimulator (MES). Experiments were performed using MAE and PMES as the following. First experiment was performed to evaluate the function for each channel of Sub- Micro Controller Unit (SMCU) in MES. Second experiment was conducted on whether ESP applied from each channel of SMCU in PMES was focused to the electrode set to the ground, after applying ESP being output from each channel of SMCU in PMES to MAE.

Boosted 국부 이진 패턴을 적용한 얼굴 표정 인식에 관한 연구 (A Study on Facial Expression Recognition using Boosted Local Binary Pattern)

  • 원철호
    • 한국멀티미디어학회논문지
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    • 제16권12호
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    • pp.1357-1367
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    • 2013
  • 최근 얼굴 표정 인식에 있어 영상 기반의 방법의 하나로서 ULBP 블록 히스토그램 피쳐와 SVM을 분류기로 사용한 연구가 수행되었다. Ojala 등에 의해 소개된 LBP는 높은 식별력과 조명의 변화에 대한 내구성과 간단한 연산 때문에 영상 인식 분야에 많이 사용되고 있다. 본 논문에서는 ULBP 블록 히스토그램을 계산함에 있어 분할 영역의 이동, 크기 변화에 더하여 미세한 특징 요소를 표현할 수 있도록 $LBP_{8,2}$$LBP_{8,1}$를 결합하였다. $LBP_{8,1}$ 660개, $LBP_{8,2}$ 550개의 분할 창으로부터 1210개의 ULBP 히스토그램 피쳐를 추출하고 이로부터 AdaBoost를 이용하여 50개의 약 분류기를 생성하였다. $LBP_{8,1}$$LBP_{8,2}$가 결합된 하이브리드 형태의 ULBP 블록 히스토그램 피쳐와 SVM 분류기를 이용함으로써 표정 인식률을 향상시킬 수 있었으며 다양한 실험을 통하여 이를 확인하였다. 본 논문에서 제안한 하이브리드 Boosted ULBP 히스토그램의 경우에 표정의 인식률이 96.3%로 가장 높은 결과를 보였으며 제안한 방법의 우수성을 확인하였다.