Journal of the Korean Society of Manufacturing Process Engineers (한국기계가공학회지)

The Korean Society of Manufacturing Process Engineers (한국기계가공학회)
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Analysis of Size Effect of Nano Scale Machining Based on Normal Stress and Indentation Theories

수직응력과 압입이론에 기반한 나노스케일 기계가공에서의 크기효과 분석

  • Jeon, Eun-chae (School of Materials Science and Engineering, University of Ulsan) ;
  • Lee, Yun-Hee (Division of Industrial Metrology, Korea Research Institute of Standards and Science) ;
  • Je, Tae-Jin (Department of Nano Manufacturing Technology, Korea Institute of Machinery and Materials)
  • 전은채 (울산대학교 첨단소재공학부) ;
  • 이윤희 (한국표준과학연구원 융합물성측정센터) ;
  • 제태진 (한국기계연구원 나노공정연구실)
  • Received : 2018.11.15
  • Accepted : 2018.11.23
  • Published : 2018.12.31
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Abstract

Recently nano meter size pattern (sub-micro scale) can be machined mechanically using a diamond tool. Many studies have found a 'size effect' which referred to a specific cutting energy increase with the decrease in the uncut chip thickness at micro scale machining. A new analysis method was suggested in order to observe 'size effect' in nano scale machining and to verify the cause of the 'size effect' in this study. The diamond tool was indented to a vertical depth of 1,000nm depth in order to simplify the stress state and the normal force was measured continuously. The tip rounding was measured quantitatively by AFM. Based on the measurements and theoretical analysis, it was verified that the main cause of the 'size effect' in nano scale machining is geometrically necessary dislocations, one of the intrinsic material characteristics. st before tool failure.

Keywords

References

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